• Title/Summary/Keyword: hybrid film

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Organic-inorganic Hybrid Materials for Spin Coating Hardmask (스핀코팅 하드마스크용 유-무기 하이브리드 소재에 관한 연구)

  • Yu, Je Jeong;Hwang, Seok-Ho;Kim, Sang Bum
    • Applied Chemistry for Engineering
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    • v.22 no.2
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    • pp.230-234
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    • 2011
  • In this work, the primary material for a single layered hardmask which can afford a spin-on process was prepared by the minture of organic and inorganic sources. The preparation of hybrid polymer was attempted by esterification from silanol terminated siloxane compounds and acetonide-2,2-bis(methoxy)propionic acid. The optical, thermal and morphological properties of the test hardmask film was examined in terms of cross-linking agent and additives. In addition, the etch rate of hardmask film and photo resist layer were compared. The hybrid polymer prepared from organic and inorganic materials was found to be useful for hardmask film to form the nano-patterns.

A study on selective hybrid-structure film fabricated by 355nm UV-pulsed laser processing (355nm UV 레이저를 이용한 선택적 하이브리드 구조 필름의 제작에 관한 연구)

  • Kim, Myung-Ju;Lee, Sang-Jun;Shin, Bo-Sung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.5
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    • pp.2979-2984
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    • 2015
  • This paper has presented a new foaming technology of selective hybrid-structured polymer film with expanded pores. The porous structure of closed pore was firstly fabricated by applying the 355nm UV-pulsed laser to 0.1mm thick film that was uniformly mixed with PP pellets, copper powder, and CBA (Chemical Blowing Agent). In order to expand pore size of closed-cell shape, LAMO(Laser Aided Micro pore Opening) processing was conducted to heat the copper powder, and then the bigger pore size of closed-cell more than existing pore size was successfully formed because of rapid conduction of heated metal powder. From the experimental results, various process parameters such as laser fluence, intensity, scan rate, spot size and density of powder and CBA were considerably considered to reveal the correlation among the pore characteristics. In the future, a function experiment will be carried out to use the hybrid film of industrial applications.

Synthesis and Characterization of Polyimide/silica Hybrid Films Derived from Silane Oligomer Containing Epoxy Group (에폭시 그룹을 함유한 실란 올리고머의 합성과 그로부터 유도된 폴리이미드/실리카 혼성 필름의 특성)

  • Lee, Jun Hyuk;Park, Yun Jun;Choi, Jong-Ho;Nam, Sang Yong;Kim, Sung Won;Hong, Young Taik
    • Journal of Adhesion and Interface
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    • v.10 no.2
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    • pp.98-105
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    • 2009
  • Poly(amic acid) was synthesized from the reaction of p-PDA/ODA and PMDA/BPDA and silane oligomer containing epoxy group was also synthesized from the reaction of tetramethylorthosilicate (TMOS) and glycidol. After hybridizing poly (amic acid) and silane oligomer, they were effectively converted into polyimide/silica hybrid films by thermal imidization process. As the silica contents in hybrid films increased, CTE values decreased from 17 ppm/K to 10 ppm/K and the tensile modulus increased, in spite of decreasing tensile strength. In addition, the peel test showed that the adhesion strength of hybrid film was enhanced from $0.43kg_f/cm$ to $1.02kg_f/cm$. Therefore, it could be concluded that the polyimide/silica hybrid film is effective to enhance adhesion strength for FCCL films.

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A study on development of continuity process system for thin film solar cell (박막 태양전지 연속 생산 시스템 개발에 관한 연구)

  • Bae, Sung-Woo;Jo, Jeong-Dai;Kim, Dong-Soo;Yoo, Seong-Yeon
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.377-377
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    • 2009
  • Currently, new and renewable energy come into the spotlight, such as solar energy, wind power, fuel cell, hybrid car etc., due to the energy resources is being depleted. In order to solve like this problem, we addressed the roll to roll printing machine for the thin film solar cell by using printing technology. For the this research, we archived concept design and verified propriety.

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Enhanced photoluminescence of a hybrid luminescent film infiltrated into a colloidal photonic crystal

  • Yoo, Hyoung-Sun;Jeon, Duk-Young
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.204-206
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    • 2009
  • Luminescent films were prepared by infiltration of tris(dibenzoylmethane) mono(1, 10-phenanthroline) europium incorporated ormosil into colloidal $SiO_2$ photonic crystal templates. The PL intensity of the infiltrated film into the template was about 13 times higher than that of the plane film prepared without the template.

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On Atmospheres for Firing the Thick Film Coper Conductors (Thick Film Copper Conductor 의 소결과 소성 분위기)

  • Lee, Joon
    • Applied Chemistry for Engineering
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    • v.2 no.3
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    • pp.193-198
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    • 1991
  • Thick film copper conductors are of considerable interest in thick film industries because of both the potential cost saving compared to the noble metal conductors and the favorable properties in electrical conductivity, solderability, solder leach resistance and wire bondability, However, formation of the excellent copper thick film is a lot complicated due to easily oxidizing property of copper at high temperature. In order to get favorable thick film copper conductor, hybrid microcircuit industry utilizes majorly three kinds of firing atmosphere, such as nitrogen atmosphere, reactive atmosphere and air atmosphere. The processes and the three atmospheres for firing thick film copper conductor were extensively reviewed in this article.

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Luminescence Properties of Low Temperature Sol-Gel Organic-inorganic Hybrid Films Contained Rare-earth Ions

  • Que, Wenxiu;Cheng, L.;Jia, C.Y.;Sun, M.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1181-1184
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    • 2008
  • $GeO_2$/ormosil organic-inorganic hybrid films doped with neodymium ions and $TiO_2$/Ormosil organic-inorganic hybrid films dispersed with neodymium oxide nanocrystals are prepared by combining an inverse microemulsion technique and a low-temperature sol-gel technique. The effects of $Nd^{3+}$ concentration, $Nd_2O_3$ nanocrystal content, and heat treatment temperature on up-conversion and photoluminescence luminescence properties of the hybrid films are studied.

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Molecular Layer Deposition of Titanium Nitride Cross-linked Benzene Using Titaniumchloride and 1,4-Phenylenediamine

  • Han, Gyu-Seok;Yang, Da-Som;Kim, Se-Jun;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.305-305
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    • 2012
  • The organic-inorganic hybrid polymer thin films were deposited using the gas phase method which known as molecular layer deposition (MLD). Titaniumchloride (TiCl4) and 1,4-phenylenediamine (PD) were used as monomers to deposit hybrid polymer. Self-terminating nature of TiCl4 and PD reaction were demonstrated by growth rate saturation versus precursors dosing time. Infrared spectroscopic and X-ray photoelectron spectroscopy were employed to determine the chemical composition and state of hybrid polymer thin films. Layer by layer growth was showed by increasing UV-VIS absorption peak of hybrid polymer thin films.

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The Effect of Ionic Group and MMA Contents on the Physical Properties of PU/PMMA Hybrids (PU/PMMA Hybrids의 물성에 대한 이온성기와 MMA함량의 영향)

  • Jeong, Chang Nam;Cho, Hang Kyu;Noh, Si Tae
    • Applied Chemistry for Engineering
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    • v.8 no.4
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    • pp.575-581
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    • 1997
  • UDs were synthesized from two different polyols(PTMG, PBEAG), ionic chain extender(DMPA), EDA with $H_{12}-MDI$. PU/PMMA hybrids were prepared with free radical polymerization of MMA monomer in MMA-swelled PUD. PUD particle size and film properties were investigated ionic content and polyol type. Mechanical and thermal properties of PU/PMMA hybrid film were studied in terms of PU's ionic content and the venation of PU/PMMA compositions. As DMPA content increased from 2wt% to 10wt% in PUD, particle size of PUD decreased. PUD's particle size with ester type polyol was found to be smaller then ether type polyol used. Phase separation between hard segment(HS) and soft segment(SS) with ionic contents in PU was shown by the thermal, mechanical property measurement. Although the composition of MMA was changed from 0 to 40 wt% in PU/PMMA hybrid, the particle size of the hybrid did not increase. Using the ester type polyol, tensile strength of hybrid was found to increase by 2wt% - 6wt% DPMA content, but as higher content the strength of hybrid decreased. Moreover with the ether type polyol, tensile strength of hybrid was observed to increase by 2wt% - 4wt% DMPA content, while decreasing at higher content. PU and PMMA polymer molecule being mixed in molecular level was confirmed from the pattern of $T_g$ in DSC thermogram.

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