• The Korean Journal of Ceramics
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• v.5 no.3
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• pp.211-216
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• 1999

Four different $\beta-Si_3N_4$ ceramics with silicon oxynitrides $[Y_10(SiO_4)_6N_2, Yb_4Si_2N_2O_7, Er_2Si_3N_4O_3, \;and La_{10}(SiO_4)_6N_2$, respectivley] as secondary phases have been fabricated by hot-pressing the $Si_3N_4-Re_4Si_2N_2O_7$ (Re=Y, Yb, Er, and La) compositions at $1820^{\circ}C$ for 2h under a pressure of 25 MPa. The high temperature strength and oxidation behavior of the hot-pressed ceramics were characterized and compared with those of the ceramics fabricated from $Si_3N_4-Si_2O_7$ compositions. The $Si_3N_4-Re_4Si_2N_2O_7$composition investigated herein showed comparable high temperature strength to those from $Si_3N_4-Re_2Si_2O_7$ compositions. Si3N4 ceramics from a $Si_3N_4-Y_4Si_2N_2O_7$ composition showed the highest strength of 877 MPa at $1200^{\circ}C$ among the compositions. All $Si_3N_4$ ceramics investigated herein showed a parabolic weight gain with oxidation time at $1400^{\circ}C$ and the oxidation products of the ceramics were $SiO_2$ and $Re_2Si_2O_7$. The $Si_3N_4-Re_4Si_2N_2O_7$ compositions showed inferior oxidation resistance to those from $Si_3n_4-Re_2Si_2O_7$ compositions, owing to the incompatibility of the secondary crystalline phases of those ceramics with $SiO_2$, the oxidation product of Si3N4.Si3N4 ceramics from a $Si_3N_4-Er_4Si_2N_2O_7$ composition showed the best oxidation resistance of 0.375mg/$\textrm{cm}^2$ after oxidation at $1400^{\circ}C$ for 102 h in air among the compositions.

• Clean Technology
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• v.14 no.3
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• pp.204-210
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• 2008

A series of $V_{2}O_{5}-TiO_2$ xerogel catalysts were prepared by nonhydrolytic sol-gel method and analysed by various characterization techniques. These catalysts showed much higher surface areas and total pore volumes than conventional V$V_{2}O_{5}-TiO_2$ xerogel and impregnated $V_{2}O_{5}/TiO_2$ catalysts. It was found that the textural property of $V_{2}O_{5}-TiO_2$ material varies with the method and conditions of synthesis. Surface vanadates and $TiO_2$ anatase phase are the crucial factors to obtain high catalytic activities. The selective oxidation of hydrogen sulfide in the presence of excess water and ammonia was studied over these catalysts. Xerogel catalysts prepared by non-hydrolytic sol-gel method showed very high conversion of $H_{2}S$ without harmful emission of $SO_2$. The highest catalytic activity shown by these $V_{2}O_{5}-TiO_2$ catalysts may be due to their high surface area and good dispersion of vanadia species in the titania matrix.

• Journal of Information Display
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• v.1 no.1
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• pp.35-41
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• 2000

Manganese-doped $Zn_2SiO_4$ phosphors well known as a green emitter with high luminescence efficiency were prepared by the homogeneous precipitation method, and their photoluminescence properties under vacuum-ultraviolet (VUV) excitation were investigated. $Zn_2SiO_4$:Mn phosphors obtained by this method have exhibited a high luminance of property and a spherical shape of particles. In particular, the green emission intensity of zinc orthosilicate prepared as containing around 2 mole% of manganese was much stronger than that of the commercial $Zn_2SiO_4$:Mn phosphor, while the decay time was longer. However, addition of $Al^{3+}$ and $Li^+$ into $Zn_2SiO_4$:Mn composition has significantly diminished the decay time of the phosphor without much degradation of the emission intensity.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.217-217
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• 2011

Recently, demand for thermally stable metal nanoparticles suitable for chemical reactions at high temperatures has increased to the point to require a solution to nanoparticle coalescence. Thermal stability of metal nanoparticles can be achieved by adopting core-shell models and encapsulating supported metal nanoparticles with mesoporous oxides [1,2]. However, to understand the role of metal-support interactions on catalytic activity and for surface analysis of complex structures, we developed a novel catalyst design by coating an ultra-thin layer of titania on Pt supported silica ($SiO_2/Pt@TiO_2$). This structure provides higher metal dispersion (~52% Pt/silica), high thermal stability (~600$^{\circ}C$) and maximization of the interaction between Pt and titania. The high thermal stability of $SiO_2/Pt@TiO_2$ enabled the investigation of CO oxidation studies at high temperatures, including ignition behavior, which is otherwise not possible on bare Pt nanoparticles due to sintering [3]. It was found that this hybrid catalyst exhibited a lower activation energy for CO oxidation because of the metal-support interaction. The concept of an ultra-thin active metal oxide coating on supported nanoparticles opens-up new avenues for synthesis of various hybrid nanocatalysts with combinations of different metals and oxides to investigate important model reactions at high-temperatures and in industrial reactions.

• Proceedings of the Materials Research Society of Korea Conference
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• 1993.11a
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• pp.9-9
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• 1993

• Applied Chemistry for Engineering
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• v.31 no.1
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• pp.57-60
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• 2020

An acetaldehyde, a representative food waste odor, was decomposed using a hybrid system comprised of a non-thermal plasma and catalyst at an ambient temperature under high humidity. A five wt.% Mn was impregnated on two differently structured microporous zeolites, namely Beta and ZSM-5, with a different molar ratio of SiO₂/Al₂O₃. Under high humidity conditions, the acetaldehyde degradation was higher in zeolites with the high ratio of SiO₂/Al₂O₃. Among studied catalysts, a five wt.% Mn/Beta (SiO₂/Al₂O₃ = 300) showed the highest acetaldehyde removal activity owing to its high hydrophobicity and reducibility. During long term stability test using the same catalyst for 110 hours, the acetaldehyde removal activity was relatively well-maintained.

• Journal of Korean Society for Atmospheric Environment
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• v.32 no.5
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• pp.536-546
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• 2016

The diurnal variations of $O_3$ and $NO_2$ in an urban park and the effects of air temperature and wind speed on the diurnal variations are investigated. $O_3$ and $NO_2$ concentrations were observed at a site in an urban park of Seoul from 27 July 2015 to 9 August 2015. The $O_3$ and $NO_2$ concentrations observed in the urban park are compared to those observed at the Gangnam air quality monitoring station (AQMS). The $O_3$ concentration is higher in the urban park than at the Gangnam AQMS in the daytime because the amount of $O_3$ dissociated by NO is smaller as well as partly because the amount of $O_3$ produced in the oxidation process of biogenic volatile organic compounds (VOCs) is larger in the urban park than at the Gangnam AQMS. The $NO_2$ concentration is lower in the urban park than at the Gangnam AQMS during day and night because the observation site in the urban park is relatively far from roads where $NO_x$ is freshly emitted from vehicles. The difference in $NO_2$ concentration is larger in the daytime than in the nighttime. To examine the effects of air temperature and wind speed on the diurnal variations of $O_3$ and $NO_2$, the observed $O_3$ and $NO_2$ concentrations are classified into high or low air temperature and high or low wind speed days. The high $O_3$ and $NO_2$ concentrations in the daytime appear for the high air temperature and low wind speed days. This is because the daytime photochemical processes are favorable when the air temperature is high and the wind speed is low. The scatter plots of the daytime maximum $O_3$ and minimum $NO_2$ concentrations versus the daytime averages of air temperature and wind speed show that the daytime maximum $O_3$ and minimum $NO_2$ concentrations tend to increase as the air temperature increases or the wind speed decreases. The daytime maximum $O_3$ concentration is more sensitive to the changes in air temperature and wind speed in the urban park than at the Gangnam AQMS.

• Journal of the Korean Ceramic Society
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• v.29 no.5
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• pp.410-418
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• 1992

Si3N4, AlN and Y2O3 powder mixtures of the Y0.1(Si, Al)12(N, O)16 composition were hot-pressed at 1900℃ for 0 to 60 min under 30 MPa in order to fabricate the partially-stabilized α-Sialon ceramics (X=0.1). Room and high temperature flexural strengths of the specimens were compared with those of Si3N4-5 wt%Y2O3, Si3N4-5 wt%Y2O3-2 wt%Al2O3, and β-Sialon (Z=0.5) ceramics. The flexural strength of the α-Sialon ceramics which was hot-pressed for 15 min showed the highest value of 820 MPa at 1400℃ that is relatively higher temperature. It is guessed that a little amount of glassy phase existed in grain boundary because Y2O3 and AlN components were incoperated in Si3N4 grains, or transient liquid phase sintering, and microstructure with the smaller grain size and the interlocked grains of α'-and β-Si3N4 was obtained by the hot-pressing at high temperature of 1900℃ for the short time (15 min).

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.161-161
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• 2011

Titanium (IV) dioxide (TiO2) is one of the most attractive d-block transition metal functional oxides. Many applications of TiO2 such as dye-sensitized solar cells and photocatalyst have been widely investigated. To utilize solar energy efficiently, TiO2 should be well-aligned with a high surface area and promote the charge separation as well as electron transport. Herein, the TiO2 nanotubes were successfully fabricated by a template-directed method. The electrospun PEO(Polyethylene oxide, Molecular weight, 400k)fibers were used as a soft template for coating with titanium dioxide using an atomic layer deposition (ALD) technique. The deposition was conducted onto a template at 50$^{\circ}C$ by using titaniumisopropoxide [Ti(OCH(CH3)2)4; TTIP] as precursors of TiO2. While the as-deposited TiO2 layers onto PEO fibers were completely amorphous with atomic layer deposition, the TiO2 layers after calcination at 500$^{\circ}C$ for 1 h were properly converted into polycrystalline nanostructured hallow TiO2 nanotube. The TiO2 nanotube with high surface area can be easily handled and reclaimed for use in future applications related to solar cell fabrications.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.