• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.876-879
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• 2009

Fischer-Tropsch 합성 반응과 같은 slurry bubble column reactor에서는 반응 속도를 증진시키기 위해서는 서로 다른 상간의 접촉 면적을 최대화함으로써 물질 전달을 원활하게 유지하여야 한다. 특히 Fischer-Tropsch 합성 반응에서는 반응물인 기체가 촉매로서 기능하는 고체 표면으로의 external mass transfer가 효과적으로 이루어져야 하기 때문에 반응기 내의 기체의 거동뿐만 아니라 고체인 촉매의 분포에 대한 연구가 활발하게 이루어지고 있다. 따라서 본 연구에서는 반응기 내에 기체의 superficial velocity를 변화시키면서 기체의 hold up 뿐만 아니라 고체 입자의 분포특성에 대하여 관찰하였다. Superficial velocity가 증가함에따라 gas hold up의 경우, 일정하게 증가하다가 6 cm/sec 이상에서 그 증가폭이 감소하였다. 즉 6 cm/sec이상에서 turbulent flow regime을 형성하였다. 또한 고체입자의 분포 역시 기체의 superficial velocity가 증가함에따라 보다 균일하게 되는 것을 확인할 수 있었다.

• 한국환경농학회지
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• 제30권1호
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• pp.31-36
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• 2011

축산농가에서 발생되는 돈분 슬러리의 처리 능력을 평가하기 위하여 Full-scale의 단상 혐기성 소화조에서 중온소화와 고형물 체류시간을 20일로 하여 연속식으로 운전하면서 성능평가 및 특성연구를 실시하였다. 운전기간 중 알칼리도는 약 4,000 mg/L(3,500~9,000 mg/L as $CaCO_3$)이였고, 소화조내의 pH는 7.5~8.0 범위로 약간 높은 경향이었으나 pH는 안정적이었다. 바이오가스의 발생량은 OLR 1.2 $g{\cdot}COD/L{\cdot}day$에서 0.69 L/L/day의 바이오가스를 생산하였고, 제거된 COD를 바탕으로 계산된 메탄가스 발생량은 63% 수준이였다. 생산된 바이오가스 중 메탄가스 함량은 65~70%이었고, CO2는 약 30% 전후였으며, 열병합 발전을 실시하였을 때 총전력요구량의 50~75% 수준을 공급하였다. 또한 발전기 부하가 5~9 kW시 평균 1 kWh의 전력을 생산하기 위한 바이오가스 소모량은 약 1.8 $m^3$이였다. 따라서 실제 규모의 plant에서 약 500일간 운전한 결과 유입되는 돈분 슬러리의 TS 농도에 상관없이 소화조 내에 일정 농도의 유기물을 확보할 수 있었고, 바이오가스의 발생량은 일반적인 축산분뇨 가스 발생량 보다 높게 나타나 단상 혐기성 소화공정으로 고효율 처리가 가능한 것으로 나타났다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1600-1604
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• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis of used slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.93-96
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• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis of used slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.184-187
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• 2003

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) lyaer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2-CMP$ process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis or used slurry.

• 한국환경과학회지
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• 제23권10호
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• pp.1693-1701
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• 2014

A rapid and simple method for the quantitative determination of volatile fatty acids (VFAs; propionic acid, n-butyric acid, i-valeric acid and n-valeric acid) and indoles (phenol, p-cresol, 4-ethyl phenol, indole and skatole) in pig slurry and dog excrement using solid-phase micro-extraction (SPME) coupled to gas chromatography was evaluated. $50/30{\mu}m$ DVB/CAR/PDMS (Divinylbenzene/Carboxen/Polydimethylsiloxane) fiber was used to extract the target compounds in aqueous media. Sample amount and adsorption time was standardized for the routine analysis. Detection limits were from 0.11 to $0.15{\mu}gL$ for VFAs and from 0.12 to $0.28{\mu}gL$ for indoles and the correlations observed ($R^2$) were 0.975~1.000. This method was applied to the pig slurry, fertilizer, compost and dog excrement. In nearly all cases, the indoles were detected in concentrations of higher than their limits of detection (DOLs). But the VFAs in swine manure were below their DOLs.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 한국초지조사료학회지
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• 제40권4호
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• pp.274-278
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• 2020

Pig slurry (PS) is the most applicable recycling option as an alternative organic fertilizer. The application of pig slurry has the risk of air pollution via atmospheric ammonia (NH3) and nitrous oxide (N2O) emission. The zeolite has a porous structure that can accommodate a wide variety of cations, thus utilizing for the potential additive of deodorization and gas adsorption. This study aimed to investigate the possible roles of zeolite in mitigating NH3 and N2O emission from the pig slurry applied to the maize cropping. The experiment was composed of three treatments: 1) non-N fertilized control, 2) pig slurry (PS) and 3) pig slurry mixed with natural zeolite (PZ). Both of NH3 and N2O emission from applied pig slurry highly increased by more than 3-fold compared to non-N fertilized control. The NH3 emission from the pig slurry was dominant during early 14 days after application and 20.1% of reduction by zeolite application was estimated in this period. Total NH3 emission through whole period of measurement was 0.31, 1.33, and 1.14 kg ha-1. Nitrous oxide emission in the plot applied with pig slurry was also reduced by zeolite treatment by 16.3%. Significant increases in forage and ear yield, as well as nutrient values were obtained by pig slurry application, while no significant effects of zeolite were observed. These results indicate that the application of zeolite and pig slurry efficiently reduces the emission of ammonia and nitrous oxide without negative effects on maize crop production.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.79-84
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• 2001

The effect of spray characteristics on desulfurization yield was evaluated by performing experiments with pilot spray drying sorber (SDS). Among the variables of operating conditions, the slurry-spraying conditions were chosen as major parameters; Stoichiometric ratio and Sauter mean diameter of slurry droplet were varied for the different gas temperatures and $SO_{2}$ concentrations in the inlet gas flow. From the experimental results, we proposed semi-empirical models of desulfurization yield for both Stoichiometric ratio and Sauter mean diameter of droplets. The optimal condition of spray can be determined based on these results, which might be applied to the design or scale-up of SDS systems.

• 한국수소및신에너지학회논문집
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• 제17권2호
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• pp.204-211
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• 2006

The electrolyte in the solid oxide fuel cell must be dense enough to avoid gas leakage and thin enough to reduce the ohmic resistance. In order to manufacture the thin and dense electrolyte layer, 8 mol% $Y_2O_3$ stabilized-$ZrO_2$ (8YSZ) electrolyte layers were coated on the porous tubular substrate by the novel vacuum slurry dip-coating process. The effects of the slurry concentration, presintering temperature, and vacuum pressure on the thickness and the gas permeability of the coated electrolyte layers have been examined in the vacuum slurry coating process. The vacuum-coated electrolyte layers showed very low gas permeabilities and had thin thicknesses. The single cell with the vacuum-coated electrolyte layer indicated a good performance of $495\;mW/cm^2$, 0.7 V at $700^{\circ}C$. The experimental results show that the vacuum dip-coating process is an effective method to fabricate dense thin film on the porous tubular substrate.