• Journal of the Korean Institute of Gas
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• v.24 no.5
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• pp.74-81
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• 2020

In general, when manufacturing a semiconductor, a number of hazardous and dangerous substances such as flammability, toxic, and corrosiveness are used. In particular, semiconductors are manufactured using specialty gas in processes such as CVD and etching. The specialty gas is filled in a container in the state of compressed or liquefied gas, and a gas cylinder cabinet is used as a facility for supplying this specialty gas to the semiconductor manufacturing process. When a accident occurs in the gas supply system, gas is released through a pressure release device installed in the gas cylinder to secure the safety of the supply system. In this case, the gas released inside the gas cabinet, there is a risk of leaking to the outside. After that, by analyzing the gas flow in the gas cabinet, it is intended to identify the risk associated with leak and to provide measures to prevent accidents.

• Journal of the Korean Institute of Gas
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• v.26 no.5
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• pp.35-40
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• 2022

PCVD (Plasma Chemical Vapor Deposition), a solar cell manufacturing facility, is a facility that deposits plasma generated in a chamber (NH₃, SIH₄, O₂ on a wafer. In the PCVD facility, gas movement and injection is performed in the gas cabinet, and there are many leak points inside because MFC, regulator, valve, pipe, etc. are intricately connected. In order to prevent explosion in case of leakage of NH₃ with an upper explosive limit (UEL) of 33.6% and a lower explosive limit (LEL) of 15%, the dilution capacity must be capable of allowing the concentration of NH₃ to be out of the explosive range. This study was analyzed using the CFD analysis technique, which can confirm the dilution ability in 3D and numerical values when NH₃ gas leaks from the existing PCVD gas cabinet. As a result, it was concluded that it corresponds to medium dilution and that testicular ventilation is possible through facility improvement.

• Journal of the Korean Institute of Gas
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• v.20 no.6
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• pp.80-88
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• 2016

A fire station and scuba have operated filling facilities for respiratory high-pressure cylinder without getting authority or reporting according to High-Pressure Gas Safety Control Act. They need facility improvement and special management to make provision for the time of accident during filling process. The Government have strived to correct illegal operations and suggested an alternative, establishing and operating the safety cabinet. It insures a safety being distance from danger caused by overpressure and a safety provoked by the protective wall equals or superiors. The safety cabinet is required to have an internal structure that smoothly distribute overpressure at the time of rupture. Plus, it needs to minimize fragments. It is also equipped with the performance of protective wall that makes overpressure to outside vent on the place where there is no person (top or bottom). This study calculated the consequence of physical explosion damage and built a prototype of safety cabinet. In addition, through the gas burst test, it derives for the ways to mitigate the physical explosion damage.

• Journal of Korean Academy of Fundamentals of Nursing
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• v.21 no.2
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• pp.141-150
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• 2014

Purpose: This was a study on the expiration date of Ethylene Oxide (EO) gas sterilization and effects of the environmental factors of temperature, humidity and type of cabinet in sterile goods storage area on the expiration date. Methods: Sterile goods storage areas from 13 departments in one hospital were selected and 455 EO gas sterilization samples were prepared and kept in those areas over the 14 months of the study. Each sample was tested with a microbiological culture in the laboratory every week. If the result was positive, the sample was regarded as contaminated. The researcher visited once a month to check the temperature, humidity and type of cabinet. Results: With the exception of 1 sample which was positive at 56th week. 454 samples were confirmed as negative. The environment of the samples storage area was measured monthly. The annual average temperature was $24.2{\pm}1.6^{\circ}C$, and the mean relative humidity $34.7{\pm}15.2%$. The types of cabinet were 7 open and 6 closed. Conclusion: The results of the microbiological culture at 13 months showed that none of the samples were contaminated. Therefore the hospital's existing Expiration Date can be extended from 6 months to 13~14 months.

• Journal of the Korea Safety Management & Science
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• v.12 no.4
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• pp.93-98
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• 2010

본 연구에서는, 반도체, LCD 공정에서 금속막을 증착하기 위하여 PECVD장비에 화재, 폭발 위험성과 독성을 가진 Silane가스를 사용하게 되는 장비인 gas cabinet, pipeline, VMB(Valve manifold box), MFC(mass flow controller)장비 등, 전반적인 시스템에 대하여 영국 HES의 ALARP개념을 도입하여 위험성 평가를 실시하여 문제점을 도출하고 대책을 강구 하는데 목적이 있고, 여러 가지 문제점중 절대적으로 수용 할 수 없는 Critical Risk로는 Gas Cylinder를 사용하여 Silane을 공급하고자 할 때에는 필히 Gas Cabinet을 사용하여 공급하여야 하고, Tube Trailer를 사용하여 공급하고자 할 때에는 필수적으로 Purge System을 갖추어 공급하여야 한다. 선택적으로 수용할 수 있는 High, Medium Risk로는 Gas Cylinder 또는 Tube Trailer를 사용하여 Silane을 공급하고자 할 때는 Inlet 부분에 RFO(Resticted Flow Orifice)를 설치하여 사용하고 Gas Supply Room에는 CO2소화설비를 적용하지 말고 Water Mist등 물 분무설비를 적용하여야한다.

• Journal of the Korean Institute of Gas
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• v.25 no.2
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• pp.42-51
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• 2021

Facilities that supply specialty gases used in semiconductor manufacturing mainly handles with hazardous and dangerous substances with flammable, toxic, and corrosive properties, and gas cabinets are mainly used as such supply facilities. The effects of the supply facilities were analyzed for each leak through the rupture disk in the gas cabinet and a leak where the leak hole. In this case, gas leaked to the outside depending on the leak area. It is a factor that creates a risk depending on the concentration of the leaked gas. Depending on the risk of leakage, all measures such as safe operation procedures should be reviewed again.

• Journal of the Korean Institute of Gas
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• v.26 no.1
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• pp.34-40
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• 2022

Gas cylinder cabinets have risks such as cylinder explosion and scattering of debris when a fire occurs. These risks are likely to cause gas spills and cause secondary damage. In order to reduce damage, it is very important to secure the fire resistance performance of the gas cylinder cabinet. In foreign countries, NFPA codes in the United States and EN-14470-2 in Europe stipulate fire resistance test standards for gas cylinder cabinets to protect internal cylinders for a certain period of time in a situation where gas cylinder cabinets are exposed to flames. However, in Korea, only internal pressure performance and airtight performance standards are specified, and the target is limited to piping, and research and regulations for the fire resistance performance of gas cylinder cabinets are insufficient compared to overseas. Therefore, in this study, finite element analysis was used to establish fire resistance standards for domestic gas cylinder cabinets. In the event of a fire, optimal conditions are derived in terms of structure and material.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.23-27
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• 2006

Semiconductor industry has been dramatically developed with the information era of 21C, and the trend now is to consider that the technology of management system of the computer utility that has a high efficiency is important. This study investigated the intelligent decision system for residual gas purge process to effectively remove the residual gas in the tube after replacing the cylinder that is used for the gas cabinet or BSGS(Bulk Specialty Gas Supply System) of the semiconductor process. It was suggest from this study that it is possible to decide the type, frequency and volume of purge gas using various toxic gases which is necessary for each process. Also, this result will be utilized for operating the system, increasing the efficiency of management and saving energy.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.14 no.6
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• pp.493-502
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• 2002

During the defrosting process, the temperature in the cabinet of a showcase becomes high as compared to the setting point, which is not desirable for stored foods or materials. It is necessary to develop a more efficient defrosting method to prevent large temperature fluctuation. In this study, the performance of a showcase refrigeration system with three evaporators is investigated by employing a hot-gas bypass defrosting technology in the system under frosting and defrosting conditions. The operating characteristics are compared with those for the on-off defrosting method that has been widely used in current products. As a result, the hot-gas bypass defrosting method shows higher refrigerating capacity and less temperature fluctuation than the on-off method under frosting/defrosting conditions, while the power input is relatively high for the hot-gas bypass method.

• Journal of Food Hygiene and Safety
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• v.34 no.2
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• pp.170-177
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• 2019

The aim of this study was to investigate the effect of different concentrations of chlorine dioxide ($ClO_2$) on sterilization and deodorization of food-holding cabinets under different exposure times. For the measuring sterilization and deodorization, a 6.5 L chamber and a 625 L cabinet with circulation systems were used. Two bacteria (Staphylococcus aureus KCTC1916 and Escherichia coli KCTC 1682) that were artificially inoculated in the plate respectively were put into the 6.5 L chamber and the 625 L cabinet. The $ClO_2$ gas was produced by ampules. In the 6.5 L chamber, neither of the two bacteria was detected after 24 hours treatment by $ClO_2$ gas. Moreover, the deodorization rate against ammonia and phenol was 94% and 70%, respectively, but deodorization against formaldehyde was not effective. When the concentration reached maximum (6 ampule, 4.6 ppm) levels in the cabinet, it lasted for approximately 2 h and then decreased slowly. When a circulator was used, the gas concentration was very low (6 ampule, 0.8 ppm) and the antibacterial activity against S. aureus and E. coli was low. The level of reduction against S. aureus and E. coli was 2.98 log CFU/plate and 6.06 log CFU/plate, respectively, in the cabinet after 24 h without a circulator. The reduction against S. aureus KCTC1916 and E. coli KCTC1682 was 2.69 log CFU/plate and 4.41 log CFU/plate for 24 h, respectively.