• Journal of Surface Science and Engineering
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• v.40 no.2
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• pp.63-69
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• 2007

Ni-SiC composite coating layers were formed using two kinds of SiC nano-particles by DC electrodeposition in a nickel sulfamate bath containing SiC particles. The effect of stirring rate and SiC particle type on the microstructure and properties of Ni-SiC composite coating layers were investigated. Results revealed that the trend of deposition rate is closely related to the codeposition of SiC and the deposition rate. or nickel, and the codeposition behavior of SiC can be explained by using hydrodynamic effect due to stirring. The average roughness and friction coefficient are closely related to the codeposition of SiC and SiC particle size. It was found that the Victors microhardness of the composite coating layers increased with increasing codeposition of SiC. The composite coating layers containing smaller SiC particle showed higher hardness. This can be explained by using the strengthening mechanism resulting from dispersion hardening. Anti-wear property of the composite coating layers formed using 130 nm-sized SiC nano-particles has been improved by 2,300% compared with pure electroplated-nickel layer.

• Tribology and Lubricants
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• v.35 no.5
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• Tribology and Lubricants
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• v.37 no.4
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• pp.129-135
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• 2021

An air-bearing stage uses externally pressurized air as the lubricant between the stage and the rail. The supporting force generated by the supplied air makes the stage rise and move smoothly with extremely low friction. Mechanical contacts rarely happen, the bearing surfaces do not produce wear particles, and dust is not generated. It also has the advantage of having low energy loss and high precision. Because of its advantages, an air-bearing stage is used in several types of machines that require high precision. In this article, the effect of the pocket depth on the hammering phenomena of the air bearing is studied. An analysis program is developed to calculate the dynamic behavior of the stage by solving the Reynolds equation between the stage and the guideway and the equations of motion on the stage. The acceleration, constant movement, and deceleration are applied to the stage. The stage is modeled as a five-degree-of-freedom system. In the course of the dynamic behavior, the hammering phenomena occur under some special conditions. The deeper the pocket, the more unstable the behavior of the stage, and air hammering occurs when it exceeds a certain depth. In addition, the higher the supply pressure, the more unstable the behavior of the stage. However, hammering occurs even with a shallow pocket depth. Other conditions that affect the hammering phenomena are calculated and discussed.

• Tribology and Lubricants
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• v.37 no.4
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• pp.144-150
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• 2021

The most cost-effective method of reducing abrasive wear in mechanical parts is increasing their hardness with thin hard coatings. In practice, the composite hardness of the coated substrate is more important than that of the substrate or coating. After full unloading of the load applied to an indenter, its indentation hardness evaluated based on the dent created on the test piece was almost dependent on plastic deformation of the substrate. Following the first part of this study, which proposes a new Brinell hardness test method for a coated surface, the remainder of the study is focused on practical application of the method. Indentation analyses of a rigid sphere and elastic-perfect plastic materials were performed using finite element analysis software. The maximum principal stress and plastic strain distributions as well as the dent shapes according to the substrate yield stress and coating thickness were compared. The substrate yield stress had a significant effect on the dent size, which in turn determines the Brinell hardness. In particular, plastic deformation of the substrate produced dents regardless of the state of the coating layer. The hardness increase by coating behaved differently depending on the substrate yield stress, coating thickness, and indentation load. These results are expected to be useful when evaluating the composite hardness values of various coated friction surfaces.

• Journal of Surface Science and Engineering
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• v.52 no.3
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• pp.163-170
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• 2019

Durability of instrument is one of the most important factor to ensure accurate treatment and decrease failure for the orthopedic surgical operation. Normally, a set-screw driver tip has been processed with hard coating for their higher durability and wear resistance. And several surface modification methods were obtained such as titanium nitride (TiN) coating, diamond like carbon coating, other nitriding, and etc. In this study, we have surface modified on set-screw driver tip with TiN and DLC, investigated whether the TiN and DLC coatings affect the mechanical properties and durability of the set-screw driver tip in the pedicle screw system. The surface morphologies were observed with scanning-electron microscopy (SEM), and the static/dynamic torsional properties were investigated with universal testing machine based on ASTM F543. Coating thickness of each coatings were commonly around $1^{\circ}C$. Static torsional stiffness, and ultimate torque values for DLC and TiN coated samples were significantly higher than those of non-coated sample by the pared T-test. Surface morphology of after the dynamic torsional test was more clean with less scratch or friction traces from DLC coating than that of TiN coating and non-coated sample.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.4
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• pp.464-469
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• 2019

Tapered roller bearings are used widely in vans, trucks, and trains because they can support the vehicle in a stable manner even under a heavy load. The cage of a tapered roller bearing maintains the gap between the rollers, which prevents friction wear and suppresses heating. If the cage is severely deformed due to resonance, the roller may not be able to roll smoothly and even leave the cage. Consequently, it is very important to analyze the dynamic characteristics of the cage for reliable performance of a bearing. The cage essentially has geometrical tolerance in the manufacturing process. In this paper, the effects of those geometrical imperfections on the dynamic characteristics of the cage were investigated. As a result, natural frequency separation occurred near the natural frequency of the ideal cage due to geometrical imperfections. In addition, the interval was proportional to the magnitude of the geometric error, and the interval increased with increasing mode number.

• Tribology and Lubricants
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• v.39 no.1
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• pp.1-7
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• 2023

Fluid pumps in chemical processes are typically driven by electric motors. Even if the motor is separated from the pump with seals, wear resulting from friction and misalignment can lead to leakage of chemical fluid, causing corrosion in the bearing supporting the motor, and, eventually, failure of the motor. It is thus a standard procedure to replace bearings at regular intervals. In this article, we propose 3D-printed plastic ball bearings for use as an alternative to commercial stainless-steel ball bearings. The plastic bearings are easy to manufacture, require less time to replace, and are chemically resistant. To validate the applicability of the plastic bearings, we first conducted chemical resistance tests. Bearings were immersed in 30 caustic acid and 30 nitric acid for 30 min and 24 h, respectively. The test results showed no corrosive damage to the bearings. A test rig was set up to compare the performance of the plastic bearings with that of the commercially equivalent deep-groove ball bearings. Loading test results showed that the plastic bearings performed as well as the commercial bearing in terms of vibration level and load-handling capability. Finally, a plastic bearing was subjected to a clean-in-place process for three months. It actually outperformed the commercial bearing in terms of chemical resistance. Thus, 3D-printed plastic bearings are a viable alternative to stainless-steel ball bearings.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.533-537
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• 2003

Compared to sintered polycrystalline diamond (PCD), the deposited thin film diamond has a great advantage on the fabrication of cutting tools with complex geometries such as drills. Because of high performance in high speed machining non-ferrous difficult-to-cut materials in the field of automobiles industry, aeronautics and astronautics industry, diamond-coated drills find large potentialities in commercial applications. However, the poor adhesion of the diamond film on the substrate and high surface roughness of the drill flute adversely affect the tool lift and machining quality and they become the main technical barriers for the successful development and commercialization of diamond-coated drills. In this paper, diamond thin films were deposited on the commercial WC-Co based drills by the electron aided hot filament chemical vapor deposition (EACVD). A new multiple coating technology based on changing gas pressure in different process stages was developed. The large triangular faceted diamond grains may have great contribution to the adhesive strength between the film and the substrate, and the overlapping ball like blocks consisted of nanometer sized diamond crystals may contribute much to the very low roughness of diamond film. Adhesive strength and quality of diamond film were evaluated by scanning electron microscope (SEM), atomic force microscope (AFM), Raman spectrum and drilling experiments. The ring-block tribological experiments were also conducted and the results revealed that the friction coefficient increased with the surface roughness of the diamond film. From a practical viewpoint, the cutting performances of diamond-coated drills were studied by drilling the SiC particles reinforced aluminum-matrix composite. The good adhesive strength and low surface roughness of flute were proved to be beneficial to the good chip evacuation and the decrease of thrust and consequently led to a prolonged tool lift and an improved machining quality. The wear mechanism of diamond-coated drills is the abrasive mechanical attrition.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2000.05a
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• pp.1-1
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• 2000

The results of the modification of metal materials treated by high temperature pulst:d plasma fluxes (HTlPPF) with a specific power of incident flux changing in the $(3...100)10^5{]\;}W/cm^2$ range and a pulse duration lying from 15 to $50{\;}\mu\textrm{s}$ have been presented. The results of HTPPF action were studied on the stainless steels of 18Cr-l0Ni, 16Cr- 15Ni, 13Cr-2Mo types; on the structural carbon steels of (13...35)Cr, St. 3, St. 20, St. 45 types; on the tool steels of U8, 65G, ShHI5 types, and others; on nickel and high nickel alloy of 20Cr-45Ni type; on zirconium- and vanadium-base alloys and other materials. The microstructure and properties (mechanical, tribological, erosion, and other properties) of modified materials and surface alloying of metals exposed to HTPPF action have been investigated. It was found that the modification of materials by HTPPF resulted in a simultaneous increase of several properties of the treated articles: microhardness of the surface and layers of 40...60 $\mu\textrm{m}$ in depth, tribological characteristics (friction coefficient, wear resistance), mechanical properties ({\sigma_y}, {\;}{\sigma_{0.2}}.{\;}{\sigma_r}) on retention of the initial plasticity ($\delta$), corrosion resistance, radistanation erosion under ion irradiation, and others. The determining factor of the changes observed is the structural-phase modification of the near-surface layers, in particular, the formation of the fine cellular structure in the near-surface layers at a depth of $20{\;}{\mu\textrm{m}}$ with dimension of cells changing in the range from 0.1 to $1., 5{\;}\mu\textrm{m}$, depending on the kind of material, its preliminary treatment, and the parameters of plasma fluxes. The remits obtained have shown the possibility of purposeful surface alloying of metals exposed to HTPPF action over a depth up to 20...45 $\mu\textrm{m}$ and the concentration of alloying element (Ni, Cr, V) up to 20 wt.%. Possible industrial brunches for using the treatment have been also considered, as well as some results on modifying the serial industrial articles by HTPPF.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.32 no.1 s.55
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• pp.45-51
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• 2006

In the field of makeup cosmetics, especially, powder-based foundations such as two-way cake, pact and face powder, the quality of which is known to be strongly influenced by the properties of powder, surface treatment technology is widely used as a method to improve the various characteristics of powder texture, wear properties, dispersion ability and so on. The two-way cake or pressed-powder foundation is one of the familiar makeup products in Asian market for deep covering and finishing purpose. In spite of the relent progress in surface modification method such as composition of powders with different characteristics and application of a diversity of coating ingredient (metal soap, amino acid, silicone and fluorine), this product possess a technical difficulty to enhance both of the adhesion power and spreadability on the skin in addition to potential claim of consumer about heavy or thick feeling. This article is covering the preparation and coating method of nano-vesicle that mimic the double-layered lipid lamellar structure existing between the corneocytes of the stratum corneum in the skin for the purpose of improving both of two important physical characteristic of two-way cake, spreadability and adhering force to skin, and obtining better affinity to skin. Nano-vesicle was prepared using the high-pressure emulsifying process of lecithin, pseudo ceramide, butylene glycol and tocopheryl acetate. This nano-sized emulsion was added to powder-dispersed aqueous phase together with bivalent metal salt solution and then the filtering and drying procedure was followed to yield the nano-vesicle coated powder. The amount of nano-vesicle coated on the powder was able to regulated by the concentration of metal salt and this novel powder showed the lower friction coefficient, more uniform condition of application and higher adhesive powder comparing with the alkyl silane treated powder from the test result of spreadability and wear properties using friction meter and air jet method. Two-wav cake containing newly developed coated powder with nano-vesicle showed the similar advantages in the frictional and adhesive characteristics.