• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1068-1071
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• 2001

Recently, the minimum line width shows a tendancy to decrease and the multi-level to increase in semiconductor. Therefore, a planarization technique is needed, which chemical polishing(CMP) is considered as one of the most important process. CMP accomplishes a high polishing performance and a global planarization of high quality. But there are several defects in CMP such as microscratches, abrasive contaminations, and non-uniformity of polished wafer edges. Spin Etching can improve the defects of CMP. It uses abrasive-free chemical solution instead of slurry. Wafer rotates and chemical solution is simultaneously dispensed on a whole surface of the wafer. Thereby chemical reaction is occurred on the surface of wafer, material is removed. On this study, TEOS film is removed by CMP and Spin Etching, the results are estimated at a viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.935-938
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• 1997

Recently, the minimum line width shows a tendency to decrease and the multi-level increase in semiconductor. Therefore, a planarization technique is needed and chemical mechanical polishing(CMP) is considered as one of the most suitable process. CMP accomplishes a high polishing performance and a global planarization of high quality. But there are several defects in CMP such as micro-scratches, abrasive contaminations, and non-uniformity of polished wafer edges. Wet etching include of Spin-etching can improve he defects of CMP. It uses abrasive-free chemical solution instead of slurry. On this study, ILD(INterlayer-Dielectric) was removed by CMP and wet-etching methods in order to investigate the superiority of wet etching mechanism. In the thin film wafer, the results were evaluated at a viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU). And pattern step height was also compared for planarization characteristics of the patterned wafer.

• Structural Engineering and Mechanics
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• v.36 no.3
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• pp.279-299
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• 2010

A methodology on application of the discrete singular convolution (DSC) technique to the free vibration analysis of thin plates with curvilinear quadrilateral platforms is developed. In the proposed approach, irregular physical domain is transformed into a rectangular domain by using geometric coordinate transformation. The DSC procedures are then applied to discretization of the transformed set of governing equations and boundary conditions. For demonstration of the accuracy and convergence of the method, some numerical examples are provided on plates with different geometry such as elliptic, trapezoidal having straight and parabolic sides, sectorial, annular sectorial, and plates with four curved edges. The results obtained by the DSC method are compared with those obtained by other numerical and analytical methods. The method is suitable for the problem considered due to its generality, simplicity, and potential for further development.

• Steel and Composite Structures
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• v.24 no.5
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• pp.523-536
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• 2017

A layerwise (LW) formulation based on the Galerkin method is presented to investigate the three-dimensional stress state in long sandwich plate which is subjected to tension force and pure bending moment. Based on the Galerkin method and the LW discretization approach, the equilibrium equations of elasticity for the long plate are written in the weak form and discretized through the thickness of the plate. The discretized equations are written in terms of displacement components of the numerical layers. The governing equations of the plate are solved analytically for the free edge boundary conditions. The distribution of stress state especially the 3D stress state in the vicinity of the edges of the sandwich plate which is subjected to tension and pure bending is studied. In order to increase the accuracy, the out of plane stresses are obtained by integrating the equilibrium equations of elasticity. The convergence and accuracy of the predictions are studied and various numerical results are presented for distribution of the in-plane and out of plane stresses in symmetric and un-symmetric sandwich plates.

• International Journal of CAD/CAM
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• v.6 no.1
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• pp.157-166
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• 2006

In order to model blending surfaces with curvature continuity, in this paper we apply sixth order partial differential equations (PDEs), which are solved with a composite power series based method. The proposed composite power series based approach meets boundary conditions exactly, minimises the errors of the PDEs, and creates almost as accurate blending surfaces as those from the closed form solution that is the most accurate but achievable only for some simple blending problems. Since only a few unknown constants are involved, the proposed method is comparable with the closed form solution in terms of computational efficiency. Moreover, it can be used to construct 3- or 4-sided patches through the satisfaction of continuities along all edges of the patches. Therefore, the developed method is simpler and more efficient than numerical methods, more powerful than the analytical methods, and can be implemented into an effective tool for the generation and manipulation of complex free-form surfaces.

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.303-306
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• 1995

The present paper deals with extraction of figures and characters from their background using the knowledge of color. At each pixel of the image on the CRT sent from a video camera, RGB values are transformed into the values in another color system, HSI, where "H" denotes hue;"S" denotes saturation;"I" denotes intensity. Representing color in HSI color space is advantageous, since a human feels color mainly in hue with the aid of brightness and purity. Comparing HSI data thus obtained with the masked original image detects noise-free edges included in the orginal image. Then setting a set of HSI thresholds and changing it identifies the portion of image of the same color. This color information is used in recongnizing characters and figures as an auxiliary system of a hierachical figure categorization method for characters and figures recognition.cters and figures recognition.

• Nuclear Engineering and Technology
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• v.47 no.4
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• pp.500-511
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• 2015

In this study, the natural frequencies of the perforated square plate with a square penetration pattern are obtained as a function of ligament efficiency using the commercial finite-element analysis code ANSYS. In addition, they are used to extract the effective modulus of elasticity under an assumption of a constant Poisson's ratio. The effective modulus of elasticity of the fully perforated square plate is applied to the modal analysis of a partially perforated square plate using a homogeneous finite-element analysis model. The natural frequencies and the corresponding mode shapes of the homogeneous model are compared with the results of the detailed finite-element analysis model of the partially perforated square plate to check the validity of the effective modulus of elasticity. In addition, the theoretical method to calculate the natural frequencies of a partially perforated square plate with fixed edges is suggested according to the Rayleigh-Ritz method.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.22 no.1
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• pp.49-57
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• 1986

The vibrations problem of thin orthotropic skew plates of linearly varying thickness is analyzed using the small deflection theory of plates. Using dimensionless oblique coordinates, the deflection surface can be expressed as a polyonmial series satisfying the boundary conditions. For orthotropic plates which is clamped on all the four edges, numerical results for the first two natural frequencies are presented for various combinations of aspect ratio, skew angle and taper parameter. The properties of material used are one directional glass fibre reinforced plastic GFRP. The results obtained may be summarised as follows: 1. In case of the first mode vibration of plates with increase in the skew angle, the natural frequencies of plates decrease. 2. As the aspect ratio decrease, the natural frequencies of plates decrease. 3. For the identical skew angle, natural frequencies of plates increase with the taper parameter of thickness.

• Journal of Ocean Engineering and Technology
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• v.10 no.1
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• pp.81-91
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• 1996

Numerical study is carried out to make clear the wavemaking phenomena for a planning flat plate. Through the mumerical computations, some schematic wave patterns are compared with experimental results, for example, such as the bow divergent waves, triangle waves, stern divergent saves, stern cross waves. The characteristic distance of waves is found to be more inconsistent as the incidence angle increases. The comparison was mode between computations and experiments for incidence angles of 5, 10 and 15 degrees. However, a numerical difficulty is found around and behined the trailing edges for more than 20 degree.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.92-97
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• 2004

The aim of this study is to estimate the strength of injection molded plastic stepped gear. We considered stepped gear as plate model which are fixed by two edges. While, on the other sides are free. Normal gear is calculated by Lewis formula which can be derived quite simply from the equation for the stress at the root of a cantilever beam. Stress ratio(step factor) is represented for the ratio of the bending stress of normal and the bending stress of stepped gear, and it is plotted by face width factor. This study is propose the step factor added in Dupont equation which are strength estimation of step gear