• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2004.04a
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• pp.307-310
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• 2004

Micellar enhanced ultrafiltration (MEUF) is a surfactant-based separation process and it can remove heavy metal ions from aqueous stream effectively. However, it is necessary to recover and reuse surfactants for economic feasibility because surfactant is expensive. Foam fractionation was investigated for both anionic and cationic surfactant recovery. Chelating agent such as ethylenediaminetetraacetic acid (EDTA) was studied for the separation of heavy metals from surfactant solution. Anionic surfactants bound with heavy metals can be recovered by lowering pH (acidification). In this study, citric acid and imminodiacetic acid (IDA) were applied to release copper from sodium dodecyl sulfate (SDS) micellar solution and compared with EDTA. Precipitation of copper by ferricynide and sodium sulfide were also investigated. As a result, ca. 100 % of copper was released from SDS micellar solution by 5 mM of EDTA and citric acid. And 3.3 mM of ferricyanide formed precipitate with 82.7 % of copper. 5 mM of IDA and sodium sulfide released or formed precipitate 82.5 % and 58.9 % of copper, respectively. Citric acid is harmless to environments and ferricyanide precipitates with Cu easily. Therefore, it is considered that citric acid and ferricyanide have competiveness over a famous chelating agent, EDTA, for the separation of Cu from SDS solution.

• Nutritional Sciences
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• v.4 no.1
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• pp.26-33
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• 2001

Animal and clinical studies as well as epidemiological data have provided convincing evidence that n-3 polyunsaturated fatty acids can protect against atherosclerosis. However, the effects of the fatty acids on atherogenesis are contradictory. This discrepancy could derive from great susceptibility of the fatty acids to oxidation. We investigated the effect of eicosapentaenoic aced(EPA) on cellular atherogenesis via the scavenger receptor of THP-1 derived macrophages. THP-1 cells were fully differentiated into macrophages by incubating with phorbol 12-myristate 13-acetate for seven days. Atherogenic features of EPA were compared by subsitituting for linoleic acid (LA). Macrophages were also incubated without treatment of the fatty acids as controls. EPA (5-50 nmol/mL) was not cytotoxic and did not measurably induce cellular oxidation compared to bovine serum albumin (BSA) vehicle or identical doses of LA. EPA increased macrophage uptake and degradation of acetylated LDL(AcLDL) up to 14% and 88%, respectively. EPA increased markedly total cellular sterol synthesis and heparin-releasable lipoprotein lipase activity of macrophages, indicating that EPA may enhance accumulation of cellular cholesteryl ester and possibly facilitate formation of foam cells. These results demonstrate that EPA promotes the modified LDL-triggered atherosclerotic process by the modulation of the scavenger receptor and the activation of LPL in macrophages.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.5
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• pp.572-577
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• 2012

Recently porous polymer has widely been applied to packaging, heat isolation, and sound absorption in various fields from the electrics to the automobiles industry. A lot of micro porosities inside foamed polymer provide lower heat conduction and lighter weight than non-porous polymer, because they involve gas or air during foaming process. In this paper experimental approaches of the UV laser micro machining behavior for Expanded Polypropylene (EPP) foamed polymer materials, which have different expansion rates, were investigated. From these results, the ablation phenomena were finally observed that the ablation is depended upon stronger photo-chemical than photo-thermal effect. This study will also help us to understand interaction between UV laser beam and porous polymer.

• Ocean and Polar Research
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• v.26 no.1
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• pp.102-111
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• 2004

Recirculating aquaculture system (RAS) consists of different treatment compartments that maintain water quality within the ranges commonly recommended for fish cultures. However, common RASs still exert considerable environmental impact since concentrations of organic matter and nutrients in their effluents are high. Compared with the traditional RAS, the model RAS developed here use a sedimentation basin for digestion purposes and then use the released volatile organic matter to stimulate a denitrification process. Different treatment compartments for solids, total ammonia nitrogen, and nitrate removal have been reviewed. This paper provides the basic information on designing different treatment compartments as well as the engineering criteria in closed seawater RAS, consisting of circular tanks for fish cultures; dual drain systems, sedimentation basins and foam fractionators for removal of solids; nitrification biofilters for TAN removal; denitrification biofilters for nitrate removal; and aerators for aeration. The main purpose is to outline a common procedure in designing of closed RAS for marine fish culture with an emphasis on easy management and low expense, as well as reduction of the environmental impact.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.23 no.2
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• pp.71-96
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• 1997

We have used a novel liquid surface forces apparatus to determine the variation of disjoining pressure with film thickness for dodecane-water-dodecane emulsion films. The LSFA allows measurement of film thicknesses in the range 5-100 nm and disjoining pressure from 0-1500 Pa. Disjoining pressure isotherms are given for films stabilised by the nonionic surfactnat n-dodecyl pentaoxyethylene glycol ether$(C_{12}E_5)$ and n-decyl-$\beta$-D-glucopyranoside($C_{10}- $\beta$-Glu)$ and the anionic surfactant sodium bis(2-ethylhexyl) sulphosuccinate(AOT) in the presense of added electrolyte. For $C_{12}E_5$ and AOT, the emulsion films are indefinitely stable even for the highest concentration of NaCl tested (136.7 Nm) whereas the $C_{10}-{eta}-Glu$ film shows coalescence at this salt concentration. For film thicknesses greater than approximately 20 nm with all three surfactants, the disjoining pressure isotherms are reasonably well described in terms of electrostatic and van der Waals, forces. For the nonionic surfactant emulsion films, the charge properties of the monolayers are qualitatively similar to those seen for foam films. For AOT emulsion films, the monolayer surface potentials estimated by fitting the isotherms are similar to the values of the zeta potential measured for AOT stabilised emulsion droplets. For thin emulsion films certain systems showed isotherms which suggested the presence of an additional repulsive force with a range of approximately 20 nm.

• Journal of ILASS-Korea
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• v.12 no.2
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• pp.86-93
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• 2007

There is a growing interest to develop an eco-friendly air cleaner with high performance through a remanufacturing process. Two kinds of polyurethane filter media, a coarse (Filter-A) and a fine filter media (Filer-B), are used in this study to protect a vehicle engine from airborne particles. In order to improve the collection performance of the filters (Filter-A, Filter-B), an oil coating technology on the filter surface was introduced. As a result, inertial force is a dominant collection mechanism for a dry filter media, so that collection efficiency increases with increasing filtration velocity. However, intra-structure change of an oil-coated filter media influences on the collection mechanism, which shows a non-linear collection efficiency curve in terms of filtration velocity. The result shows that the developed filter media are eco-friendly and effective to protect a vehicle engine from airborne particles especially at low filtration velocity.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.4
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• pp.398-402
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• 2014

This paper presents the results of a study on the optimal footpad design for vertical climbing on acrylic surfaces with various curvatures used Taguchi methods. For a climbing robot, the adhesion system plays an important role in the climbing process. Only an appropriate adhesion strength will prevent the robot from falling and allow it to climb normally. Therefore, the footpad is a significant parameter for a climbing robot and should be studied. Taguchi methods were used to obtain a robust optimal design, where the design variables were the flat tacky elastomeric shape, area, thickness, and foam thickness of the footpad. Experiments were conducted using acrylic surfaces with various curvatures. An optimized footpad was selected based on the results of the experiments and analysis, and the stability of the wall-climbing robot was verified.

• 한국지구물리탐사학회:학술대회논문집
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• 2003.11a
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• pp.676-683
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• 2003

A laboratory experiment using artificial fracture rocks was used to understand the 3-dimensional dispersion of a tracer and the mixing process in a fractured network. In this experiment, 12cm polystyrene foam cubes with two electrodes for monitoring electric conductivity (EC) were used as artificial fractured rocks. Distilled water with 0.5mS/m was used as a tracer in water with 35mS/m and the difference of EC between the tracer and the water was monitored by a multipoint simultaneous measurement system of electrical resistance. The results showed that even if the fracture arrangement pattern was not straight in the direction of the flow, the tracer did not diffuse along individual fractures and an oval tracer plume, which was the distribution of tracer concentrations, tended to be form in the direction of the flow. The vertical cross section of the tracer distribution showed small diffusivity in the vertical direction. The calculated total tracer volume passing through each measurement point in the horizontal cross section showed while that the solute passed through measurement points near the direction of hydraulic gradient and in other directions, the passed tracer volumes were small. Using Peclet number as a criterion, it was found that the mass distribution at the fracture intersection was controlled in the stage of transition between the complete mixing model and the streamline routing model.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.1000-1005
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• 2003

The shock separation test simulates the environmental effects of the spacecraft separation from launch vehicle. The shock separation test for a structural model of KOMPSAT-Ⅱ(Korea Multi-Purpose SATellite Ⅱ) was performed in SITC(Satellite Integration ＆ Test Center) launch environmental test hall at KARI(Korea Aerospace Research Institute) to verify the shock test requirement of the spacecraft, to predict the induced acceleration responses on the primary structures and payloads by the explosion of pyre-lock and to perform mechanical fit check. The spacecraft with S/A was mated vertically to LV(Launch Vehicle) adapter simulator via a clamp band, then hoisted and suspended above a foam test bed by four isolation springs secured to the spacecraft hoist fittings to isolate the payload platform shock wave from the sling elements. For separation process, real pyre-devices were used and the time response signals from 60 accelerometers installed on the interested points was acquired and recorded. The SRS responses for each response channels were calculated and the achieved SRS's on the separation plane was reviewed and evaluated in comparison to the ICD(Interface Control Document) value.