• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2004년도 총회 및 춘계학술발표회
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• pp.307-310
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• 2004

Micellar enhanced ultrafiltration (MEUF) is a surfactant-based separation process and it can remove heavy metal ions from aqueous stream effectively. However, it is necessary to recover and reuse surfactants for economic feasibility because surfactant is expensive. Foam fractionation was investigated for both anionic and cationic surfactant recovery. Chelating agent such as ethylenediaminetetraacetic acid (EDTA) was studied for the separation of heavy metals from surfactant solution. Anionic surfactants bound with heavy metals can be recovered by lowering pH (acidification). In this study, citric acid and imminodiacetic acid (IDA) were applied to release copper from sodium dodecyl sulfate (SDS) micellar solution and compared with EDTA. Precipitation of copper by ferricynide and sodium sulfide were also investigated. As a result, ca. 100 % of copper was released from SDS micellar solution by 5 mM of EDTA and citric acid. And 3.3 mM of ferricyanide formed precipitate with 82.7 % of copper. 5 mM of IDA and sodium sulfide released or formed precipitate 82.5 % and 58.9 % of copper, respectively. Citric acid is harmless to environments and ferricyanide precipitates with Cu easily. Therefore, it is considered that citric acid and ferricyanide have competiveness over a famous chelating agent, EDTA, for the separation of Cu from SDS solution.

• 한국주조공학회지
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• 제17권1호
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• pp.93-99
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• 1997

A possibility of production of aluminium matrix composites by using the lost foam process was investigated. Silicon carbide particles, graphite particles, and stainless steel wires were used as reinforcement materials. The reinforcement materials were introduced to the polystyrene to form patterns via injection molding process. The results obtained from this experiment can be summarized as follows. In Al/SiCp system, the particles with the radius of $100{\mu}m$ and over were entrapped in the matrix in the case of upward freezing of which solidification direction was opposite to floating direction of the particles. And few particles were entrapped in the matrix in downward freezing. In Al/graphite system, almost no particles were entrapped in the matrix except the area chill attatched. When the thickness of polystyrene slice was 4mm in Al/stainless steel wire system, the floating tendency of fibers was observed to increase as the distance from the ingate was increased.

• Geomechanics and Engineering
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• 제32권6호
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• pp.615-625
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• 2023

Initial geometrical imperfection is an important factor affecting the structural characteristics of plate and shell structures. Studying the effect of geometrical imperfection on the structural characteristics of cylindrical shell is beneficial to explore the thermal post-buckling response characteristics of cylindrical shell. Therefore, we devote to investigating the thermal post-buckling behavior of graphene platelets reinforced mental foam (GPLRMF) cylindrical shells with geometrical imperfection. The properties of GPLRMF material with considering three types of graphene platelets (GPLs) distribution patterns are introduced firstly. Subsequently, based on Donnell nonlinear shell theory, the governing equations of cylindrical shell are derived according to Eulerian-Lagrange equations. Taking into account two different boundary conditions namely simply supported (S-S) and clamped supported (C-S), the Galerkin principle is used to solve the governing equations. Finally, the impact of initial geometrical imperfections, the GPLs distribution types, the porosity distribution types, the porosity coefficient as well as the GPLs mass fraction on the thermal post-buckling response of the cylindrical shells are analyzed.

• 한국산학기술학회논문지
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• 제14권2호
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• pp.542-547
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• 2013

본 연구에서는 알루미늄 폼 코어 복합재료의 기계적 성질을 시뮬레이션 해석을 통하여 고찰하였다. 시험편 모델에는 50J, 70J, 100J의 충격에너지를 가하였다. 50J, 70J 및 100J의 충격에너지에 대해서는 각각 3.4 ms, 3.2 ms 및 3.2 ms의 시점에서 최대하중이 발생하였다. 50J의 충격에너지를 가한 경우는 스트라이커가 복합재료의 상부 면재를 뚫고, 심재까지 손상을 입혔다. 그러나 하부 면재까지는 손상이 없이 그대로이었고 52 J의 에너지가 발생하였다. 70J의 충격에너지를 가한 경우는 스트라이커가 상부 면재를 관통한 후 하부 면재까지 손상을 주었고 65 J의 에너지가 발생하였다. 100J의 충격에너지를 가한 경우는 스트라이커가 면재와 심재를 완전히 관통하여 손상을 주었다. 스트라이커가 상부 면재를 관통하는 시점에서는 최대하중이 되고 그 후로는 하중이 급격히 감소하다가 하부 면재에 도달할 때에 다시 급격히 증가하고 있다가 감소하였고 95 J의 에너지가 발생하였다.

• Nuclear Engineering and Technology
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• 제53권6호
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• pp.1834-1845
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• 2021

Liquid lead-bismuth cooled fast reactor is one of the most promising reactor types among the fourth-generation nuclear energy systems. The flow and heat transfer characteristics of lead-bismuth eutectic (LBE) are completely different from ordinary fluids due to its special thermal properties, causing that the traditional Reynolds analogy is no longer recommended and appropriate. More accurate turbulence flow and heat transfer model for the liquid metal lead-bismuth should be developed and applied in CFD simulation. In this paper, a specific CFD solver for simulating the flow and heat transfer of liquid lead-bismuth based on the k - 𝜀 - k_𝜃 - 𝜀_𝜃 model was developed based on the open source platform OpenFOAM. Then the advantage of proposed model was demonstrated and validated against a set of experimental data. Finally, the simulation of LBE turbulent flow and heat transfer in a 7-pin wire-wrapped rod bundle with the k - 𝜀 - k_𝜃 - 𝜀_𝜃 model was carried out. The influence of wire on the flow and heat transfer characteristics and the three-dimensional distribution of key thermal hydraulic parameters such as temperature, cross-flow velocity and Nusselt number were studied and presented. Compared with the traditional SED model with a constant Pr_t = 1.5 or 2.0, the k - 𝜀 - k_𝜃 - 𝜀_𝜃 model is more accurate on predicting the turbulence flow and heat transfer of liquid lead-bismuth. The average relative error of the k - 𝜀 - k_𝜃 - 𝜀_𝜃 model is reduced by 11.1% at most under the simulation conditions in this paper. This work is meaningful for the thermal hydraulic analysis and structure design of fuel assembly in the liquid lead-bismuth cooled fast reactor.

• 대한기계학회논문집A
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• 제37권8호
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• pp.1051-1057
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• 2013

본 연구에서는 광학적 방법으로 곡면변형률을 측정하고자 할 때, 소재 표면이 임의의 곡면이거나 요철이 많은 경우, 부식이나 오염으로 표면이 불량한 경우, 그리고 고무나 폼, 생체 조직 등과 같이 규칙적인 격자망을 인쇄하기 어려운 경우에도 적용할 수 있는 자동 곡면변형률 측정시스템 'ASIAS-bio'를 개발하였다. 이 시스템은 시편의 재질과 표면상태, 격자 패턴과 크기, 격자 마킹 방법, 변형 정도 등 측정 조건에 관계없이 사용이 가능한 것이 특징이다. 우선 그 신뢰성을 평가하기 위하여 금속판재 성형제품의 변형률 분포를 상용 장비로 측정한 결과와 비교하였다. 또한, 돼지 어깨 관절막, 인체 무릎 피부 등 연질 생체 조직의 변형 측정에 적용함으로써 본 시스템의 유용성을 확인하였다.

• 한국응용과학기술학회지
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• 제35권3호
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• pp.876-885
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• 2018

폐 RHDM(Residue Hydrodemetallation) 촉매상에 침적된 비활성화 성분인 탄소, 황 을 고온배소 처리하여 제거한 후, 과량 침적되어 있는 바나듐은 초음파 교반기에서 5~15wt% 옥살산 수용액을 이용하여 $50^{\circ}C$, 5분 조건하에 바나듐 추출량을 조절함으로써 NOx 저감을 위한SCR(Selective Catalytic Reduction) 촉매로의 적용 가능성을 확인하고자 하였다. 폐촉매와 단계별 처리된 RHDM 촉매를 대상으로 상압반응기상에서 NOx 저감 효율을 측정하였고, 촉매의 성분분석은 ICP, C & S analyzer 및 XRF를 이용하여 분석하였다. 10wt% 옥살산 수용액으로 바나듐을 침출한 촉매가 가장 안정적이었으며 높은 NOx 저감 효율을 보였다. 이를 메탈폼 형태의 지지체에 워시코팅한 촉매는 상용 SCR 촉매와 동등 수준의 NOx 저감 효율을 나타내었다. 따라서 폐 RHDM 촉매의 처리 조건 조정에 관한 후속 연구를 통하여 각 적용처에 적합한 SCR 촉매로의 이용 가능성은 충분할 것으로 사료된다.

• 한국수소및신에너지학회논문집
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• 제32권4호
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• pp.245-255
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• 2021

Various studies about metallic bipolar plates have been conducted to improve fuel cell performance through flow field design optimization. These research works have been mainly focused on fuel cells for vehicle, but not fuel cells for building. In order to reduce the price and volume of fuel cell stacks for building, it is necessary to apply a metallic flow field, In this study, for a metallic flow field applied to a fuel cell for building, the effect of a change in the flow field shape on the performance of a polymer electrolyte membrane fuel cell was confirmed using a model and experiments with a down-sizing single cell. As a result, the flow field using a metal foam outperforms the channel type flow field because it has higher internal differential pressure and higher reactants velocity in gas diffusion layer, resulting in higher water removal and higher oxygen concentration in the catalyst layer than the channel type flow field. This study is expected to contribute to providing basic data for selecting the optimal flow field for the full stack of polymer electrolyte membrane fuel cells for buildings.

• 한국결정성장학회지
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• 제34권3호
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• pp.92-97
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• 2024

수소 생산을 위한 물 분해 시스템의 효율성을 높이려면 산소 발생 반응(OER, Oxygen Evolution Reaction)에서 촉매로 인해 발생하는 전기화학 반응의 높은 과전압을 감소시켜야 한다. 그중 전이금속을 포함하는 LDH(Layered Double Hydroxide)와 같은 화합물은 현재 사용되고 있는 백금 등의 귀금속을 대체할 수 있는 촉매 소재로 주목받고 있다. 본 연구에서는 저렴한 금속 다공성 물질인 니켈 폼을 지지체로 사용하였고, 수열합성 공정을 통해 NiCo LDH 나노결정을 합성하였다. 또한, OER 특성을 향상시키기 위해 Mo를 도핑하여 합성한 Mo 도핑된 NiCo LDH 나노결정 시료의 형태, 결정구조, 물분해 특성의 변화를 관찰하였다.