• 한국초전도학회:학술대회논문집
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• 2008.08a
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• pp.69-69
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• 2008

• Journal of Korean Vacuum Science & Technology
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• v.2 no.1
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• pp.25-31
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• 1998

The reliability of fluorine doped silicon oxide (SiOF) films for intermetal dielectrics in multilevel interconnections of ultra-large scale integrated circuits (ULSIs) is investigated. SiOF films were deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECRPECVD) using H-free source gases, i.e., SiF4 and O2. The effect of post plasma treatment on the moisture absorption and dielectric properties of SiOF films was carried out I terms of air exposure time, The reliability test of Cu/TiN/SiOF/Fi specimen was carried out in terms of temperature by rapid thermal annealing (RTA) in N2 ambient. After O2 plasma treatment,, no appreciable peak directly related to moisture absorption was detected. The capacitance-voltage (C-V) characteristics of the O2 plasma treated SiOF film showed that the film remained to hold the sound dielectric properties even after boiling treatment. The Cu/TiN/SiOF/Si system was found to be reliable up to $600^{\circ}C$.

• Journal of the Korean Society of Safety
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• v.28 no.6
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• pp.23-28
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• 2013

In order to improve extinguishing performance of water mist, many studies of additives have been conducted. In this study, viscosity agent which has the ability to improve extinguishing performance by adhering to the surface on fire was used and fluorine-free surfactant was also added to water to enhance water's wetting ability. This study aimed to verify optimal concentration of extinguishing of additives according to fire source and extinguishing performance by comparison with pure water. In case of wood crib fire, the results show that flame suppression and extinguishing time of sodium alginate 0.4 wt.% are 3.4 times and 2.2 times shorter than those of pure water in 0.2 MPa respectively. It seems that large amount of water adhere to surface on fire, thus cooling effect on surface was enhanced. Also water consumption of sodium alginate 0.4wt.% is up to 65% lower than that of pure water. In case of heptane fire, extinguishing time of cocobetaine 0.1 wt.% is 9.7 times shorter than that of pure water in 0.2 MPa. It is thought that because cocobetaine can block oxygen and suppress oil mist by making emulsion film on fire surface due to a low surface tension. On the other hand, water consumption of cocobetaine 0.1 wt.% is 92% lower than that of pure water.