• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.2
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• pp.187-192
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• 2002

The open-connect type eddy current transducer for the flaw detection in continuously connected pipelines was developed. This eddy current transducer is for the on-line inspection of the tubes in industries, to which commercial encircling probes are not applicable. The excitation coil that consists of a ribbon type cable and a flat connector can be opened and closed on purpose. The sensing coils of this transducer are circumferentially arrayed near the outside of the tube wall but axially displaced from the exciter by about one and half tube diameter. In application to steel tubes, and the performance of this transducer was evaluated as a little behind those of magnetic saturation type in signal to noise ratio and flaw size decision, but usable to detect or to locate large size flaws in steel tubes. Surface cracks deeper than 19% of the tube thickness could be detected with good signal to noise ratio.

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.10
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• pp.109-115
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• 2016

In this paper, In this paper, we use two methods to compare the slim speakers. That way, the diaphragm scan using laser and diaphragm photographed using a thermal imaging camera. Slim speaker has the structure of a flat plate type. Break-up mode by this characteristic is displayed in a larger size. Further, since the installation space is narrow, it has limited moving coil cooling. As a result, the break-up mode slim speakers, a significant impact on quality. In this study, try to connect the break-up mode of the diaphragm, the heat transfer mode of the diaphragm. Experiment for comparison, a two-step. The first step is to measure the divided vibration through the vibration plate scan. The second step measures the diaphragm photographed using a thermal imaging camera. Then, compare the results of both of the same frequency. Thus, comparing the heat transfer pattern and the pattern of break-up mode. Tend to be analysis of break-up mode from the pattern comparison, and document for the optimum design.

• Progress in Superconductivity and Cryogenics
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• v.15 no.2
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• pp.20-23
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• 2013

For sensitive measurements of micro-Tesla nuclear magnetic resonance (${\mu}T$-NMR) signal, a low-noise superconducting quantum interference device (SQUID) system is needed. We have fabricated a liquid He dewar for an SQUID having a large diameter for the pickup coil. The initial test of the SQUID system showed much higher low-frequency magnetic noise caused by the thermal magnetic noise of the aluminum plates used for the vapor-cooled thermal shield material. The frequency dependence of the noise spectrum showed that the noise increases with the decrease of frequency. This behavior could be explained from a two-layer model; one generating the thermal noise and the other one shielding the thermal noise by eddy-current shielding. And the eddy-current shielding effect is strongly dependent on the frequency through the skin-depth. To minimize the loop size for the fluctuating thermal noise current, we changed the thermal shield material into insulated thin Cu mesh. The magnetic noise of the SQUID system became flat down to 0.1 Hz with a white noise of 0.3 $fT/{\surd}Hz$, including the other noise contributions such as SQUID electronics and magnetically shielded room, etc, which is acceptable for low-noise ${\mu}T$-NMR experiments.

• International Journal of Aeronautical and Space Sciences
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• v.4 no.1
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• pp.63-74
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• 2003

The vortical flow of a 65-deg flat plate delta wing with a leading edge extension(LEX) was examined through off-surface visualization, 5-hole probe and hot-film measurements. The off-surface flow visualization technique used micro water droplets generated by a home-style ultrasonic humidifier and a laser beam sheet. The angles of attack ranged from 10 to 30 degrees, and the sideslip angles ranged from 0 to -15 degrees. The Reynolds number was $1.82{\times}10^5$ for the flow visualization, and $1.76{\times}10^6$ for the 5-hole probe and hot-film measurements. The comparison of the visualization photos and the flow field measurement showed that the two results were in a good agreement for the relative position and the structure of the wing and LEX vortices, even though the flow Reynolds numbers of the two results were much different. The wing vortex and the LEX vortex coil each other while maintaining a comparable strength and identity at zero sideslip. Neither a looping of the wing vortex around the strake vortex, nor the lopsided coiling of the stronger strake and the weaker wing vortices was observed. At non-zero sideslip, the downward movement of the LEX vortex when going downstream was enhanced on the windward side, and the downward and inboard movement of the LEX vortex when going downstream was suppressed on the leeward side. The counterclockwise coiling of the wing and LEX vortices was decreased significantly on the leeward side.