• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.241-241
• /
• 2012

Semiconductor industry has been taking the advantage of improvements in process technology in order to maintain reduced device geometries and stringent performance specifications. This results in semiconductor manufacturing processes became hundreds in sequence, it is continuously expected to be increased. This may in turn reduce the yield. With a large amount of investment at stake, this motivates tighter process control and fault diagnosis. The continuous improvement in semiconductor industry demands advancements in process control and monitoring to the same degree. Any fault in the process must be detected and classified with a high degree of precision, and it is desired to be diagnosed if possible. The detected abnormality in the system is then classified to locate the source of the variation. The performance of a fault detection system is directly reflected in the yield. Therefore a highly capable fault detection system is always desirable. In this research, time series modeling of the data from an etch equipment has been investigated for the ultimate purpose of fault diagnosis. The tool data consisted of number of different parameters each being recorded at fixed time points. As the data had been collected for a number of runs, it was not synchronized due to variable delays and offsets in data acquisition system and networks. The data was then synchronized using a variant of Dynamic Time Warping (DTW) algorithm. The AutoRegressive Integrated Moving Average (ARIMA) model was then applied on the synchronized data. The ARIMA model combines both the Autoregressive model and the Moving Average model to relate the present value of the time series to its past values. As the new values of parameters are received from the equipment, the model uses them and the previous ones to provide predictions of one step ahead for each parameter. The statistical comparison of these predictions with the actual values, gives us the each parameter's probability of fault, at each time point and (once a run gets finished) for each run. This work will be extended by applying a suitable probability generating function and combining the probabilities of different parameters using Dempster-Shafer Theory (DST). DST provides a way to combine evidence that is available from different sources and gives a joint degree of belief in a hypothesis. This will give us a combined belief of fault in the process with a high precision.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.23 no.2
• /
• pp.138-147
• /
• 2009

In this paper, improved direct torque control(DTC) system for five-phase squirrel-cage induction motor(IM) is proposed. Due to the additional degrees of freedom, five-phase 1M drives present unique characteristics. Also five-phase motor drives possess many other advantages compared with the traditional three-phase motor drive system, such as reducing an amplitude of torque pulsation and increasing the reliability. The DTC method is advantageous when it is applied to the five-phase IM, because the five-phase inverter provides 32 space vectors in comparison to 8 space voltage vectors into the three-phase inverter. However, five-phase motor has structural drawback of 3rd space-harmonics current component, it is necessary to controlled 3rd harmonic current. So to control 3rd harmonic current and enhance dynamic characteristics of five-phase squirrel-cage IM drive, modified DTC method should be demanded. The characteristics and dynamic performance of traditional five-phase DTC are analyzed and new DTC for five-phase IM is presented. A more precise flux and torque control algorithm for the drives can be suggested and explained For presenting the superior performance of the proposed direct torque control, experimental results are presented using a 32-[bit] fixed point TMS320F2812 digital signal processor with 2.2[kW] induction motor.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2015.10a
• /
• pp.669-672
• /
• 2015

Recent Internet of Things (IoT, Internet of Things) that can be applied to various fields as the development of technology has been developed a lot of service and has been developed with the service also for crop management. To manage the essential elements of soil moisture in the crop growth but existing a direct person measuring the fluid point to carry the measuring instrument, if you take advantage of the WPAN (Wireless Personal Area Network) in this paper to manage sensor data, a fixed 3 points (30, 60, 90 cm) and can be managed can be scientifically analyzed the state of growth of the crop. Open field environment is utilized as it is less disturbance of the interference and the frequency of the radio frequency signal of the structure provides a relatively comfortable environment. Therefore, WPAN building and data transmission scheme of the minimum cost is to be developed. In addition, the operation to enter low power mode, the algorithm is necessary because a lot of restrictions on the power supply applied to the sensor nodes and the gateway is constructed in the open field. In the experiment, verifying the effectiveness by using a network configuration of each of the sensor nodes and the gateway, and provides a method for time synchronization of the operation and a low power mode. The study protocol for the RF communication with the LoRa and to enhance communication efficiency is needed in the future.

• Journal of Korean Society for Geospatial Information Science
• /
• v.12 no.1 s.28
• /
• pp.11-20
• /
• 2004

The purpose of this paper is to evaluate the applicability of GPS data for real-time traffic information collection especially after SA removal. Two major results have been reported. One is the GPS data availability and/or useful data point density for travel time estimation using Circle-X algorithm. 87.23% of data points can be mobilized after SA whereas only 29.94% of data was useful in calculating travel time. The other is the possible reduction of the buffer size that is used for screening the points of all GPS into useful and useless data, respectively. With these outcomes, it is safely expected that the regular GPS alone can provide the data points for real-time travel time estimation instead of the more expensive DGPS system.