• Title/Summary/Keyword: film uniformity

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Characterization of Atomic-Layer Deposited ZnSnO Buffer Layer for 18%- Efficiency Cu(In,Ga)Se2 Solar Cells (18% 효율 Cu(In,Ga)Se2 박막태양전지용 ZnSnO 버퍼층의 원자층 증착법 및 분석)

  • Kim, Sun Cheul;Kim, Seung Tae;Ahn, Byung Tae
    • Current Photovoltaic Research
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    • v.3 no.2
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    • pp.54-60
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    • 2015
  • ZnSnO thin films were deposited by atomic layer deposition (ALD) process using diethyl zinc ($Zn(C_2H_5)_2$) and tetrakis (dimethylamino) tin ($Sn(C_2H_6N)_4$) as metal precursors and water vapor as a reactant. ALD process has several advantages over other deposition methods such as precise thickness control, good conformality, and good uniformity for large area. The composition of ZnSnO thin films was controlled by varying the ratio of ZnO and $SnO_2$ ALD cycles. The ALD ZnSnO film was an amorphous state. The band gap of ZnSnO thin films increased as the Sn content increased. The CIGS solar cell using ZnSnO buffer layer showed about 18% energy conversion efficiency. With such a high efficiency with the ALD ZnSnO buffer and no light soaking effect, AlD ZnSnO buffer mighty be a good candidate to replace Zn(S,O) buffer in CIGSsolar cells.

Characteristics of Painting Film Corresponding with Particle Distribution of Oyster Shell Powders (굴 패각 분말의 입자분포에 따른 도막특성)

  • Song, You Na;Park, Ga Yeong;Lee, Han Hyoung;Chung, Yong Jae
    • Journal of Conservation Science
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    • v.32 no.2
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    • pp.261-271
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    • 2016
  • We have investigated relationship between particle characteristics of oyster shell powder pigments and their performance such as workability and durability. Three types of the powder which have different particle size and shape(spherical, elliptical, columnar and irregular) distributions were made for this study and we evaluated spreadability and uniformity for workability, and adhesion and surface hardness for durability of painted films by each powder paints. As a result, we found out that the workability and durability of the paints were influenced by the particle shape distribution more than the particle size distribution. The durability, especially, was enhanced as the ratio of columnar particles in the powders was increased. This result verifying the important factor affecting the durability can be base data for selecting oyster shell white paint and assessing its quality for conservation and restoration of Dancheong, as well as to produce high quality traditional paints.

Multi-component $ZnO-In_2O_3-SnO_2$ thin films deposited by RF magnetron co-sputtering

  • Lee, Byoung-Hoon;Hur, Jae-Sung;Back, Sang-Yul;Lee, Jeong-Seop;Song, Jung-Bin;Son, Chang-Sik;Choi, In-Hoon
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.10a
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    • pp.68-71
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    • 2006
  • Multi-component $ZnO-In_2O_3-SnO_2$ thin films have been prepared by RF magnetron co-sputtering using targets composed of $In_3Sn_4O_{12}$(99.99%) [1] and ZnO(99.99%) at room temperature. $In_3Sn_4O_{12}$ contains less In than commercial ITO, so that it lowers cost. Working pressure was held at 3 mtorr flowing Ar gas 20 sccm and sputtering time was 30 min. RF power ratio [RF1 / (RFI + RF2)] of two guns in sputtering system was varied from 0 to 1. Each RF power was varied $0{\sim}100W$ respectively. The thickness of the films was $350{\sim}650nm$. The composit ion concentrations of the each film were measured with EPMA, AES and XPS. The low resistivity of $1-2\;{\times}\;10^3$ and an average transmittance above 80% in the visible range were attained for the films over a range of ${\delta}\;(0.3\;{\leq}\;{\delta}\;{\leq}\;0.5)$. The films also showed a high chemical stability with time and a good uniformity.

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Design and Fabrication of Light Guiding Plate for Photobioreactor (광생물 반응기를 위한 도광판 설계 및 제작)

  • Park, Gi Chan;Kim, Hun;Shin, Seong Seon;Shin, Hyun Keel;Kim, Jongtye;Jeong, Sanghwa;Park, Jong Rak
    • Korean Journal of Optics and Photonics
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    • v.23 no.2
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    • pp.55-63
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    • 2012
  • We present results of optical design and fabrication of a light guiding plate (LGP) to be used as an illumination system for photobioreactors. Modeling of a light-emitting diode (LED) light source, a reflection film, and LGP patterns was performed. Especially, the LGP patterns were modeled as Lambertian scatterers. The modeling parameters (reflectance, scatterer width) were determined through matching simulations with the experimentally measured illuminance distribution for a test LGP. An LGP for an LED light source was designed with the extracted model parameters, and fabricated using a computerized numerical control machine. Optical characteristics including average illuminance and uniformity of illuminance distribution were measured for the fabricated LGP.

Low Temperature Recrystallization of Self-Implanted Amorphous Silicon Films (저온공정에 의한 자기이온주입된 비정질 실리콘 박막의 재결정화)

  • Lee, Man-Hyeong;Choe, Deok-Gyun;Kim, Jeong-Tae
    • Korean Journal of Materials Research
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    • v.2 no.6
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    • pp.417-427
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    • 1992
  • Silicon ion implantation was performed to LPCVD amorphous Si films and the low temperature annealing process followed with various conditions to find the optimal physical properties by studying recrystallization behavior. The uniformity of the recrystallized films was inspected by optical microscopy and for this purpose, new KOH: (IPA) : $H_2$O: $K_2$C${r_2}{O_7}$, etchant was developed. XRD and TEM results showed that the crystallites were grown as a form of dendrite with (111) preferred orientation, and the grain size was increased with dose concentration. The maximum grain size was obtained when the 3${\times}{10^{15}}$c$m^2$ implanted amorphous Si film was recrystallized at 55 $0^{\circ}C$for more than 40 hrs and at this condition the grain size was 3.2${\mu}$m.

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A Novel Photonic Crystal Fiber Sensor with Three D-shaped Holes Based on Surface Plasmon Resonance

  • Bing, Pibin;Sui, Jialei;Huang, Shichao;Guo, Xinyue;Li, Zhongyang;Tan, Lian;Yao, Jianquan
    • Current Optics and Photonics
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    • v.3 no.6
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    • pp.541-547
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    • 2019
  • A novel photonic crystal fiber (PCF) sensor with three D-shaped holes based on surface plasmon resonance (SPR) is analyzed in this paper. Three D-shaped holes are filled with the analyte, and the gold film is deposited on the side of three planes. The design of D-shaped holes with outward expansion can effectively solve the uniformity problem of metallized nano-coating, it is beneficial to the filling of the analyte and is convenient for real-time measurement of the analyte. Compared with the hexagonal lattice structure, the triangular arrangement of the clad air holes can significantly reduce the transmission loss of light and improve the sensitivity of the sensor. The influences of the air hole diameter, the distance between D-shaped holes and core, and the counterclockwise rotation angle of D-shaped holes on sensing performance are studied. The simulation results show that the wavelength sensitivity of the designed sensor can be as high as 10100 nm/RIU and the resolution can reach 9.9 × 10-6 RIU.

A Study on Design and Application of Tissue Compensator for 6MV X-rays (6MV X-선에 대한 조직 보상체의 제작 및 응용에 관한 연구)

  • Chai Kyu Young;Choi Eun Kyung;Chung Woong Ki;kang Wee Saing;Ha Sung Whan;Park Charn Il
    • Radiation Oncology Journal
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    • v.7 no.1
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    • pp.123-132
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    • 1989
  • A radiation beam incident on an irregular or sloping surface produces the non-uniformity of absorded dose. The use of a tissue compensator can partially correct this dose inhomogeneity. The tissue compensator is designed based on the patient's three dimensional contour. After required compensator thickness was determined according to tissue deficit at $25cm\pm25cm$ field size, 10cm depth for 6MV x-rays, tissue deficit was mapped by isoheight technique using laser beam system. Compensator was constructed along the designed model using 0.8mm lead sheet or 5mm acryl plate. Dosimetric verification were peformed by film dosimetry using humanoid phantom. Dosimetric measurements were normalized to central axis full phantom readings for both compensated and non-compensated field. Without compensation, the percent differences in absorbed dose ranged as high as $12.1\%$ along transverse axis, $10.8\%$ along vertical axis. With the tissue compensators in place, the difference was reduced to $0\~43\%$ Therefore, it can be concluded that the compensator system constructed by isoheihnt technique can produce good dose distribution with acceptible inhomogeneity, and such compensator system can be effectively applied to clinical radiotherapy.

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Effect by Temperature Distribution of Target Surface during Sputtering by Bipolar Pulsed Dc and Continuous Dc (직류와 양극성 펄스직류에 의한 스퍼터링시 타겟 표면의 온도 분포와 그 영향)

  • Yang, Won-Kyun;Joo, Jung-Hoon;Kim, Young-Woo;Lee, Bong-Ju
    • Journal of the Korean Vacuum Society
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    • v.19 no.1
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    • pp.45-51
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    • 2010
  • We measured the temperature of target surface inducing by various physical phenomenon on magnetron sputtering target and confirmed the possibilities if the temperature distribution could affect plasma and deposited thin film. The target of magnetron sputtering has two types: round type and rectangular type. In a rectangular target, the concentrated discharge area by corner effect by magnetic field and non-uniform erosion of target are generated. And we found the generation of non-uniform temperature distribution on the target surface from this. This area was $10{\sim}20^{\circ}C$ higher than non-sputtering area. And if particles are generated during sputtering process, they were $20^{\circ}C$ higher than the area where is higher than non-sputtering area. These effects result in non-uniformity of thin films, crack of ceramic target, and shortening target life by non-uniform erosion.

Preparation of MgO Protective layer by reactive magnetron Sputtering (반응성 스퍼트링에 의한 MgO 유전체 보호층 형성에 관한 연구)

  • Ha, H. J.;Lee, W. G.;Ryu, J. H.;Song, Y.;Cho, J. S.;Park, C. H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.05a
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    • pp.59-62
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    • 1996
  • Plasma displays (PDP) as a large area wall-hanging display device are rabidly developed with flat CRT, TPT LCD and etc. Especially, AC Plasma Display Panels(AC PDPs) have the inherent memory function which is effective for large area displays. The memory function in AC PDPs is caused by the accumulation of the electrical charge on the protecting layer formed on the dielectric layer. This MgO protective layer prevents the dielectric layer from sputtering by ion in discharge plasma and also has the additional important roll in lowering the firing voltage due to the large secondary electron emission coefficient). Until now, the MgO Protective layer is mainly formed by E-Beam evaporation. With increasing the panel size, this process is difficult to attain cost reduction, and are not suitable for large quantity of production. To the contrary, the methode of shuttering are easy to apply on mass production and to enlarge the size of the panel and shows the superior adhesion and uniformity of thin film. In this study, we have prepared MgO protective layer on AC PDP Cell by reactive magnetron sputtering and studied the effect of MgO layer on the surface discharge characteristics of ac PDP.

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MWCNT thin film based supercapictor using spray deposition and gel electrolytes

  • Han, Song-Yi;Park, Sung-Hwak;Kim, Sung-Hyun;Kim, Sun-Min;Han, Joung-Hoon;Bae, Joon-Ho;Lee, Churl-Seung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.465-465
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    • 2011
  • In recent years, electrochemical supercapacitors have attracted much attention due to their high power density, long life cycles, and high efficiency. Some supercapacitors using CNTs have been reported, but there are several issues to be resolved for further development of CNT based supercapacitors. One issue is time consuming procedures to prepare CNT films, which may provide poor control of CNT uniformity over the large area of the substrates. Another is new electrolytes replacing the conventional liquid electrolytes in supercapacitors. In this work, We have successfully demonstrated that spray deposition method of multiwalled CNT films using gel electroytes could be promising for CNT-based supercapacitors on ITO substrates. Specific capacitances using gel electrolyte reached up to 1.5 F/g and 9 mF/$cm^2$, and internal resistance was 28 ${\Omega}$. Specific capacitances and internal resistance of supercapacitors with gel electrolyte were better than or comparable to those with liquid electrolytes($KNO_3$, $Na_2SO_4$), indicating that gel electrolytes could replace liquid counterparts in CNT-based supercapacitors. Combined with gel electrolyte, spray deposition method could provide low cost and easily scalable process for high performance supercapacitors using CNT films on ITO for applications in display devices.

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