• Journal of Institute of Control, Robotics and Systems
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• v.5 no.1
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• pp.54-61
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• 1999

Objective of the research is to put the vast and complex fault tracking knowledge of human experts in semiconductor production line into the knowledge base of computer system. We mined the fault tracking knowledge of domain experts(engineers of production line) for the construction of knowledge base of the expert system. Object oriented fact models which increase the extensibility and reusability have been built. The rules are designed to perform the fault diagnosis of the items in production device. We have exploited the evidence accumulation method to assign check priority in rules. The major contribution is in the overall design and implementation of the nile base and related facts of the expert system in object oriented paradigm for the application of the system in fault diagnosis in semiconductor production line.