• 한국진공학회지
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• 제9권4호
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• pp.360-366
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• 2000

LSMCD (Liquid Source Misted Chemical Deposition)공정으로 Sr/Ta몰비 0.35~0.65 조성범위에서 150 nm 두께의 $Sr_xBi_{2.4}Ta_2O_9$ (SBT)박막을 제조하여, Sr/Ta몰비에 따른 결정상과 미세구조, 강유전 특성 및 누설전류 특성을 분석하였다. LSMCD 공정으로 제조한 SBT박막은 Sr/Ta 몰비 0.425의 조성에서 최적의 강유전 특성을 나타내어 $\pm$5 V의 구동전압 인가시 15.01 $\mu$C/$\textrm{cm}^2$의 잔류분극 $2P_{r}$과 41kV/cm의 항전계 $E_{c}$를 나타내었다. LSMCD공정으로 제조한 Sr/Ta 몰비 0.35~0.5 범위의 SBT 박막은 100 kV/cm의 전기장 하에서 $10^{-5}$A/$\textrm{cm}^2$ 미만의 낮은 누설전류 밀도를 나타내었으며, $\pm$5V의 구동전압 인가시 $10^{10}$회의 스위칭 후에도 잔류분극 감소가 1% 미만인 우수한 분극피로 특성을 나타내었다.

• The Korean Journal of Ceramics
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• 제6권3호
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• pp.219-223
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• 2000

The ferroelectric SBT films were deposited on Pt/Ti/SiO$_2$/Si substrates by liquid injection metalorganic chemical vapor deposition (MOCVD) with single-mixture solution of Sr[Ta(OEt)$_5$(dmae)]$_2$and Bi(C$_6$ 6/H$_5$)$_3$. The Sr/Ta and Bi/Ta ratio in SBT films depended on deposition temperature and mol ratio of precursor in the single-mixture solution. At the substrate temperature of 40$0^{\circ}C$, Sr/Ta and Bi/Ta ratio were close to 0.4 and 1 at precursor mol ratio of 0.5~1.0, respectively. As-deposited film was amorphous. However, after annealing at 75$0^{\circ}C$ for 30 min in oxygen atmosphere, the diffraction patterns indicated polycrystalline SBT phase. The remanent polarization (Pr) and coercive field (Ec) of SBT film annealed at 75$0^{\circ}C$ were 4.7$\mu$C/$\textrm{cm}^2$ and 115.7kV/cm at an applied voltage of 5V, respectively. The SBT films annealed at 75$0^{\circ}C$ showed practically no polarization fatigue up to 10$^10$ switching cycles.

• 한국표면공학회지
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• 제48권6호
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• pp.315-321
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• 2015

Rare-earth zirconates, such as $La_2Zr_2O_7$ and $Gd_2Zr_2O_7$, have been investigated as one of the candidates for replacing conventional yttria-stabilized zirconia (YSZ) for thermal barrier coating (TBC) applications at higher turbine inlet temperatures. In this study, double-ceramic-layer (DCL) TBCs of YSZ 1st layer and $La_2Zr_2O_7$ top coat layer are fabricated by suspension plasma spray with serial liquid feeders. Microstructures, hardness profiles, and thermal durability of DCL-TBCs are also characterized. Fabricated DCL-TBCs of YSZ/$La_2Zr_2O_7$ exhibit excellent properties, such as adhesion strength (>25 MPa) and electrical thermal fatigue (~1429 cycles), which are comparable with TBCs fabricated by atmospheric plasma spray.

• 전자공학회논문지D
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• 제35D권3호
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• pp.39-45
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• 1998

SrBi$_{2}$Ta$_{2}$O$_{9}$ (SBT) ferroelectric thin films for nonvolatile memory were prepared on Pt/Ti/SiO$_{2}$/Si and RuO$_{2}$/SiO$_{2}$/Si substrates by RF magnetron sputtering. The dependences of crystalline and electrical properties on the lower electrode type(Pt and RuO$_{2}$) and the annealing temperatures were investigated. SBT films regardless of their electrode types showed typeical Bi layered peroviskite crystal structures. The crystalline quality of as-deposited SBT films was improved by the rapid thermal annealing at 650.deg. C for 30 sec. The remanetn polarization of 2Pr (Pr+-Pr-) of the annealed SBT films deposited on Pt/Ti/SiO$_{2}$/Si substrates were about 11 .mu.C/cm$^{2}$ and 3 .mu.C/cm$^{2}$, respectively. The leakage currents at 3 V bias voltage were about 0.8 .mu.A/cm$^{2}$ for SBT/ Pt/Ti/SiO$_{2}$/Si and about 1 .mu.A/cm$^{2}$ for SBT/RuO$_{2}$/SiO$_{2}$/Si sample. SBT films annealed at 650 .deg. C showed no degradation in Pr values after 10$^{11}$ polarization switching cycles, indicating good fatigue properties. In addition, for SBT samples deposited on Pt/Ti/SiO$_{2}$/Si, Pr values increased to more than that of initial state, suggesting the increament of leakage current caused by repeated polarization.

• 한국안전학회지
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• 제33권4호
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• pp.90-97
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• 2018

As the result(also after it's been carried out the damping force test with 800ea lateral dampers of 50ea trainset from entering heavy maintenance workshop to implement heavy maintenance inspection cycle, there were 86.25%(650ea) which were out of $350kg{\pm}15%$ of the standard value of damping force compared to the reference value. After the implementation of heavy maintenance inspection cycle, it's been examined damping force test with total samples 32ea(samples 8ea per a trainset) from actual running EMU 4ea trainset. As the result, percent defective was 84.4%(27ea), which was a very high level. System. The lateral damper's the failure cause of damping force defective was oil leakage caused by tearing crack of oil seal and foreign material in oil iron 473 ~ 1932 times higher than that of new oil, copper 36 ~ 98 times higher than that of new oil reduced oil amount cycling damping valve. It resulted from the change cause of damping force. In the static analysis on the shape of lateral damper oil seal's the existing and improved product, the stress of the improved product was smaller than that of the existing product. In the fatigue analysis, the existing product showed a low life in the upper area. However, in case of the improved product, it could be confirmed that the destruction did not occur up to the specified 1.0e + 006 cycles and the lifetime was further improved in most areas.

• Transactions on Electrical and Electronic Materials
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• 제5권6호
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• pp.223-226
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• 2004

The PZT thin films are one of well-known materials that has been widely studied for ferroelectric random access memory (FRAM). We etched the PZT thin films by $CF_{4}/(Cl_{2}+Ar)$ plasma and investigated improvement in etching damage by $O_{2}$ annealing. The maximum etch rate of the PZT thin films was 157 nrn/min and that the selectivity of the PZT thin films to Pt was 3.1 when $CF_{4}(30{\%})$ was added to a $Cl_{2}(80{\%})/Ar(20{\%})$ gas mixing ratio. To improve the ferroelectric properties of PZT thin films after etching, the samples were annealed for 10 min at various temperatures in $O_{2}$ atmosphere. After $O_{2}$ annealing, the remanent polarization of the asdeposited films was $34.6{\mu}/cm^{2}$ and the sample annealed at 650, 550, and $450^{\circ}C$ was 32.8, 22.3, and $18.6{\mu}/cm^{2}$, respectively. PZT thin films with $O_{2}$ annealing at $450^{\circ}C$ retained $77{\%}$ of their original polarization at 106 cycles. Also as the annealing temperature increased, the fatigue properties improved. And the leakage current was decreased gradually and almost recovered to the as-deposited value after the annealing at $450^{\circ}C$.

• 전기전자학회논문지
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• 제21권4호
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• pp.404-407
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• 2017

에어로졸 증착 공정을 이용하여 ZnO, AZO 및 ITO 막을 증착하고 코팅막의 미세구조, 광학적 및 전기적 특성을 연구하였다. 상온에서 PET 기판 위에 약 400 nm의 두께를 가지는 ZnO, AZO 및 ITO 막을 성공적으로 제조할 수 있었으며 캐리어 가스 유량이 증가하면서 ZnO, AZO 및 ITO 막의 광학적 특성 및 전기적 특성이 향상되었다. 기계적인 유연 내구성 시험에 있어 ZnO 막은 5,000회의 굽힘에도 파괴가 발생하지 않은 반면 AZO 및 ITO 막은 5000회 굽힘 시험 후 막의 파괴가 발생하고 투과도 및 저항의 성능이 저하되었다. 결론적으로 AZO 및 ITO 막의 성능은 ZnO 막에 비하여 약간 열세이나, 입자크기 제어 및 공정 최적화를 통해 성능을 향상시킬 수 있을 것으로 판단된다.

• 한국세라믹학회지
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• 제43권11호
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• pp.688-692
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• 2006

Ferroelectric lanthanides-substituted $Bi_4Ti_3O_{12}$ $(Bi_{4-x}Ln_xTi_3O_{12}, BLnT)$ thin films approximately 200 nm in thickness were deposited by metal organic chemical vapor deposition onto Pt(111)/Ti/SiO$_2$/Si(100) substrates. Many researchers reported that the lanthanides substitution for Bi in the pseudo-perovskite layer caused the distortion of TiO$_6$ octahedron in the a-b plane accompanied with a shift of the octahedron along the a-axis. In this study, the effect of lanthanides (Ln=Pr, Eu, Gd, Dy)-substitution and crystallization temperature on their ferroelectric properties of bismuth titanate $(Bi_4Ti_3O_{12}, BIT)$ thin films were investigated. As BLnT thin films were substituted to lanthanide elements (Pr, Eu, Gd, Dy) with a smaller ionic radius, the remnant polarization (2P$_r$) values had a tendency to increase and made an exception of the Eu-substituted case because $Bi_{4-x}Eu_xTi_3O_{12}$ (BET) thin films had the smaller grain sizes than the others. In this study, we confirmed that better ferroelectric properties can be expected for films composed of larger grains in bismuth layered peroskite materials. The crystallinity of the thin films was improved and the average grain size increased as the crystallization temperature,increased from 600 to 720$^{\circ}C$. Moreover, the BLnT thin film capacitor is characterized by well-saturated polarization-electric field (P-E) curves with an increase in annealing temperature. The BLnT thin films exhibited no significant degradation of switching charge for at least up to $1.0\times10^{11}$ switching cycles at a frequency of 1 MHz. From these results, we can suggest that the BLnT thin films are the suitable dielectric materials for ferroelectric random access memory applications.

• Nuclear Medicine and Molecular Imaging
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• 제42권4호
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• pp.333-336
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• 2008

A 52-year-old woman with a history of general weakness, fatigue, weight loss, elevated serum levels of liver transaminase enzyme for three months underwent an F-18 FDG PET/CT scan to evaluate a cause of the hepatosplenomegaly found on abdominal ultrasonography. Initial PET/CT revealed markedly enlarged liver and spleen with intense FDG uptake. Otherwise, there were no areas of abnormal FDG uptake in whole body image. Histological evaluation by a hepatic needle biopsy demonstrated diffuse large B cell type lymphoma and final diagnosis for this patient was hepatosplenic B-cell lymphoma. She received five cycles of CHOP chemotherapy, and second PET/CT scan was followed after then. Follow-up PET-CT revealed normal sized liver with disappearance of abnormal FDG uptake. Hepatosplenic B-cell lymphoma is relatively rare and mostly presents as single or multiple nodules.1,2 Diffuse type hepatosplenic lymphoma is extremely rare and poorly recognized entity.3 The diagnosis is very difficult and complicated by the presence of misleading symptoms.4 In this rare hepatosplenic B-cell lymphoma case, F-18 FDG PET/CT scan provided a initial diagnostic clue of hepatosplenic lymphoma and an accurate chemotherapy response.

• 한국산학기술학회논문지
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• 제20권5호
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• pp.66-72
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• 2019

동력 집중식 고속 철도차량의 승차감과 주행 안정성 향상 방안으로서 채택한 관절형 대차는 차체와 결합된 기존 독립대차와 달리 객차 사이를 갱웨이 링에 의하여 연결한다. 갱웨이 링은 열차 주행 동안 객차분리를 방지하면서 객차사이 승객 이동에 대한 절대적 안전을 확보되어야 함에도 불구하고, 아직까지 정량적인 내구성 시험기준 설정이 미비하다. 따라서 동력 집중식 고속 철도차량의 승차감과 승객 안전성을 향상을 위해서는 관절형 대차 갱웨이 링에 대한 내구성 평가의 시험기준에 대한 체계적인 연구가 중요하다. 본 연구에서는 고속 철도차량 관절형 대차의 갱웨이 링에 대한 안전성을 검토하기 위하여, 열차 운행조건에 준한 전후, 좌우 및 수직의 3축 모드로부터 7가지 혼합모드 하중조건을 도출하였다. 이 하중조건하에 유한요소해석결과로부터 각 부품들의 안전율은 최소 2.4 이상이다. 또한 변형률-피로수명설계관점에서 내구성 해석을 통하여 피로안전성을 평가하였다. 본 갱웨이 링에 대한 내구성 시험은 혼합모드 하중조건하에 총 4단계의 1,000만 사이클을 수행하였다. 내구성 시험 후에 침투 탐상 검사기법을 이용하여 각 부품의 결함유무를 검토하였다.