• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1117-1120
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• 2001

Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Corrosion Science and Technology
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• v.12 no.4
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• pp.179-184
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• 2013

Pipe wall thinning caused by erosion and corrosion can adversely affect the operation of aged nuclear power plants. Some injured workers owing to pipe rupture has been reported and power reduction caused by unexpected pipe damage has been occurred consistently. Therefore, it is important to develop erosion-corrosion damage prediction model and investigate its mechanisms. Especially, liquid droplet impingement erosion(LDIE) is regarded as the main issue of pipe wall thinning management. To investigate LDIE mechanism with corrosion environment, we developed erosion-corrosion damage simulation apparatus and its capability has been verified through the preliminary damage experiment of 6061-Al alloy. The apparatus design has been based on ASTM standard test method, G73-10, that use high-speed rotator and enable to simulate water hammering and droplet impingement. The preliminary test results showed mass loss of 3.2% in conditions of peripheral speed of 110m/s, droplet size of 1mm-diameter, and accumulated time of 3 hours. In this study, the apparatus design revealed feasibility of LDIE damage simulation and provided possibility of accelerated erosion-corrosion damage test by controlling water chemistry.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.192-199
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• 2001

Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• International Journal of Highway Engineering
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• v.18 no.5
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• pp.11-19
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• 2016

PURPOSES : This study identifies the causes and the mechanism of the occurrence of underground cavities. METHODS : A case study on cave-in and a series of model tests with a small soil chamber were conducted. RESULTS : A hypothesis about the mechanism of the cave-in in road was established, and the basic influencing factors on underground cavity expansion were identified. CONCLUSIONS : It was found that the characteristics of shear strength of soil and direction of water flow had a larger influence on cavity formation and expansion than the characteristics of internal erosion. In addition, large cavities suddenly expanded when cavities were caused owing to breakage of buried sewer pipe.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.36 no.2
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• pp.139-146
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• 2000

Cavitation can occur in pipes when liquid is moving at high velocity, especially at pittings where the smooth bore of the pipe is interrupted. The effect is usually to produce pitting on the downstream side of the turbulence. However, stress corrosion cracking behavior under cavitation erosion-corrosion was neatly unknown. In this study, therefore, some were investigated of stress corrosion cracking behavior, others were stress corrosion cracking behavior under cavitation erosion-corrosion of water injection. And datas obtained as the results of experiment were compared between the two. Mainresult obtained are as follows: 1) Stress corrosion cracking growth rate of heat affected zone under cavitation erosion-corrosion becomes most rapid, and stress intensity factor $K_1$becomes most high. 2) Stress corrosion cracking growth mechanism by cavitation erosion-corrosion is judgement on the strength of the film rupture model and the tunnel model. 3) The range of potential as passivation of heat affected zone is less noble than that of base metal, and that value is smaller. 4) Corrosion potential under cavitation erosion-corrosion in loaded stress is less noble than that of stress corrosion, and corrosion current density is higher.

• Proceedings of the KWS Conference
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• 2004.05a
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• pp.324-326
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• 2004

l2wt%Cr Steel has been applied on turbine bucket and nozzle partition material of power plant. Turbine bucket and nozzle get damaged by solid particle within steam, therefore they are protected by surface treatments such as ion nitriding, boriding and chrome carbide HVOF spray coating. In this study, solid particle erosion(SPE) characteristics after these surface treatments are examined at operating temperature 540$^{\circ}C$ and 590$^{\circ}C$ of fossil power plant and the mechanism of damage was studied. Erosion of 12wt%Cr steel is originated by micro cutting and that of boriding and chrome carbide HVOF spray is originated by these mechanism - repeating collision, crack initiation and propagation. As the results of SPE test at 540$^{\circ}C$ and 30$^{\circ}$ impact angle that is the most commonly occurred in power plant, Boriding had the best SPE -resistance property, Cr$_2$C$_3$-25(Ni20Cr) HVOF spayed and ion nitrided samples were also better than bare metals(l2wt%Cr Steels). At 590$^{\circ}C$ and 30$^{\circ}$ impact angle, Boriding had also the most superior characteristic and HVOF spay sample was better than bare metal.

• Proceedings of the Korea Water Resources Association Conference
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• 2007.05a
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• pp.454-458
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• 2007

Nonpoint source (NPS) pollution is a serious problem causing the degradation of soil and water quality. Concentrated overland flow is the primary transport mechanism for a large amount of NPS pollutants from hillslope areas to downslope areas in a watershed. In this study, a soil erosion model, nLS model, to identify transitional overland flow regions (i.e., ephemeral gully head areas) was developed using the kinematic wave overland flow theory. Spatial data, including digital elevation models (DEMs), soil, and landcover, were used in the GIS-based model algorithm. The model was calibrated and validated using gully head locations in a large agricultural watershed, which were identified using 1-m aerial photography. The model performance was better than two previous approaches; the overall accuracy of the nLS model was 72 % to 87 % in one calibration subwatershed and the mean overall accuracy was 75 to 89 % in four validation subwatersheds, showing that the model well predicted potential transitional erosion areas at different watersheds. However, the user accuracy in calibration and validation was still low. To improve the user accuracy and study the effects of DEM resolution, finer resolution DEMs may be preferred because DEM grid is strongly sensitive to estimating model parameters. Information gained from this study can improve assessing soil erosion process due to concentrated overland flow as well as analyze the effect of microtopographic landscapes, such as riparian buffer areas, in NPS control.

• Journal of the Korean institute of surface engineering
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• v.45 no.6
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• pp.272-277
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• 2012

The hull of a fast sailing aluminium ship are generally prone to erosion owing to the impact of seawater. At this time, synergistic effects of the erosion and the corrosion by aggressive ions such as chlorides tend to aggravate the damage. There have been various attempts, including selection of erosion-resistant materials, cathodic protection and addition of corrosion inhibitors, to overcome damage by erosion or corrosion under marine environments. These approaches, however, have limits on identifying the damage mechanism clearly, because they depend on analogical interpretation by correlating two damage behaviors after the individual studies are assessed. In this research, it was devised a hybrid testing apparatus that integrates electrochemical corrosion test and cavitation test, and thus the erosion-corrosion behavior by cavitation was investigated more reliably. As a result, the slightest damage was observed at the potentials between -1.6 V and -1.5 V. This is considered to be due to a reflection or counterbalancing effect caused by collision of the cavitation cavities and the hydrogen gas formed by activation polarization.

• Journal of Biomedical Engineering Research
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• v.19 no.3
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• pp.285-290
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• 1998

There are various reports on the fracture of mechanical heart valves implanted in human or animal, and they are pointed out that problems are induced by an erosion of disk surface, due to a cavitation effect. We have been investigating this mechanism using accelerated fatigue tester, and it was found that erosion was enhanced by a compliance effect in the test circuit. In this study, effects of compliance value and location on erosion were discussed, while disk closing velocity was measured by a high speed video camera. It was clarified that faster closing velocity was resulting in a enhancement of erosion on the disk surface.

• Corrosion Science and Technology
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• v.19 no.4
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• pp.231-231
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• 2020