• Title/Summary/Keyword: engineering

Search Result 349,839, Processing Time 0.188 seconds

Quenching rate controlled Laser Annealing (QLA) for poly-Si TFT fabrication

  • Han, Gyoo-W.;Alexander, Voronov;Ryu, S.G.;Kim, H.S.;Roh, C.L.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2005.07b
    • /
    • pp.897-897
    • /
    • 2005
  • We report QLA (Quenching-rate controlled Laser Annealing) system as new concept using pulsed DPSSL and CW lasers. This process can control temperature quenching-rate of poly-Si crystallization by additional CW laser and fabricate high quality poly-Si with faster scanning speed than conventional processes. In this paper, QLA system, the experimental results and theoretical discussion will be introduced.

  • PDF