• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.239-240
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• 2008

As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

• The Journal of the Petrological Society of Korea
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• v.20 no.3
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• pp.161-172
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• 2011

Open beaker digestion method is routinely used as the sample preparation technique for trace element determination of rock samples by inductively coupled plasma mass spectrometry, With this method, however, dissolution of Zr and Hf is not always guaranteed especially when the samples contain refractory minerals. In this study, glass bead digestion technique was compared with conventional open beaker digestion technique for the sample preparation of three USGS rock standards such as AGV-2, BHVO-2, and G-3. Thirty trace elements including rare earth elements were analysed by ICP-MS and ICP-AES. There were no clear differences in analytical results for the AGV-2 and BHVO-2 standards between the two techniques, but Zr, Hf, Y, and middle- to heavy- rare earth element concentrations of the G-3 standard prepared by open beaker digestion technique were significantly lower than the recommended values. This can be attributed to the presence of refractory mineral zircon. On the contrary, all the analytical results of the G-3 standard prepared by glass bead digestion technique were in good agreement with the recommended values, indicating complete dissolution of zircon. The analytical results show that the volatile elements such as Pb and Zn were not lost during the preparation of glass bead. Low dilution glass bead digestion technique described here will be very helpful to enhance precision and accuracy of trace element analysis for geological samples containing refractory minerals.

• Korean Journal of Environment and Ecology
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• v.27 no.1
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• pp.99-112
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• 2013

This study aims to show the changes of characteristics of vegetation structure for 20 years(1991~2010) in Naejangsan National Park. As a result of analysis of actual vegetation, the mixed community of Quercus variabilis and Quercus serrata was distributed with 56.1%, and Q. variabilis community showed in southern steep slope with 17.6%. Pinus densiflora community(5.8%) was observed on the ridge and Carpinu tschonoskii community distributed in the slope of the valley with 6.6%. Zelkova serrata and Prunus sargentii community were distributed in valley. The classification by TWINSPAN, ordination by DCA considering importance percentage and property of vegetation class were divided into 4 communities, which are community I(P. densiflora-Q. variabilis community), community II(Q. variabilis community), community III(C. tschonoskii community) and community IV(Mixed deciduous broad-leaved trees community). The age of Pinus densiflora was 32years old and Q. serrata was 36 years old in the community I, that of Q. variabilis was 64 years old in the community II, Q. serrata was 46 years old and C. tschonoskii was 45 years old in the community III, and Acer palmatum was 54 years old and Cornus controversa was 47 years old in the community IV. As the result of Shannon's index of species diversity, the community Iwas ranged from 0.9751 to 1.4199, community II was ranged from 1.0765 to 1.3278, community III was ranged from 1.0353 to 1.2881, and community IV was ranged from 1.1412 to 1.3807. The change of vegetation structure analyzed through the comparison with results of studies carried out 20 years ago were natural selection of P. densiflora, expansion of Quercus spp. and increase of C. tschonoskii. Especially, A. palmatum is dominated by Q. variabilis in canopy layer like the result of study 20 years ago. A. palmatum was analysed by 14.6% in the canopy layer of only mixed deciduous broad-leaved trees community. As a result of analysis of habitat property of Q. variabilis and A. palmatum, Q. variabilis was distributed in dry area with the low value of pH, O.M., exchangeable cations and Avail. P, and A. palmatum was located in the wet valley with huge value of nourishment. The tendency of reduction of bio-diversity by Sasa borealis is same as previous study but, the distributed areas were reduced in Naejangsan area.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.11
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• pp.9-18
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• 2003

Two configurations of Film Bulk Acoustic Wave Resonators with acoustic quater-wave bragg reflector layers are theoretically analyzed using equivalent circuits and the difference of their characteristics are discussed. We compare the characteristics of λ/2 mode to those of ideal FBAR with top and bottom electrode contacting air and the characteristics of λ/4 mode to those of ideal FBAR with top electrode contacting air and bottom electrode clamped. We assume that the piezoelectric film is ZnO, the electrode is A1 and the substrate is Si, ABCD parameters are extracted and input impedance is calculated by converting the equivalent circuit from Mason equivalent circuits to the simplified equivalent circuits that ABCD parameters are extracted possible, From the variation of resonance frequency due to the change of thickness of reflector layers and the variation of electrical Q due to the change of mechanical Q of reflector layers, it is confirmed that the reflector layer just under the bottom electrode have the greatest effect on the varation of resonance frequency and electrical Q. It is shown that the number of reflector layers required for the saturation of electrical Q decreases with the increase of the impedance ratio of reflector layers and electrical Q of λ/2 mode is larger than that of λ/4 mode, Electromechanical coupling factor is independent of the number of layers, The impedance ratio of reflector layers becomes larger as the electromechanical coupling factor becomes larger, The electromechanical coupling factor of the two mode are smaller than those of ideal FBARs because of the trapping of acoustic energy in the reflector layers, The insertion loss of the ladder filter decreases with the increase of the number of reflector layers but the bandwidth is not affected much by the number of reflector layers, As the impedance ratio of reflector layers becomes larger the insertion loss becomes smaller and the bandwidth becomes wider, In our analysis of the two mode, characteristics of λ/2 mode appear to be slightly more favorable than that of λ/4 mode

• Journal of the Korean Chemical Society
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• v.57 no.5
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• pp.640-655
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• 2013

The purpose of this study is to analyze the cognitive demands level of the description about 'changes of state' and 'kinetic theory' on the 'science 1' textbooks by the 2007 revised curriculum. The three types of curriculum analysis taxonomy have been used to analyze the cognitive demands level of those contents on the 6 kinds of 'science 1' textbooks. The most higher level of cognitive demands about the concepts have been discussed here due to the focus of the concepts. The first, the cognitive demand level about 'three states of substances' depending on the motion of their particles in 6 textbooks is a early formal operational stage because of using by the application of kinetic theory. The second, the cognitive demand level about 'diffusion' and 'evaporation' is a early formal operational stage, because the particles move around faster so they can change their position. The third, the cognitive level of the pressure and volume in a gas is a early formal operational stage because of explaining only phenomena in simple correspondence with formal model of kinetic theory. And simple functional relationships beyond linear on the graph of the volume and pressure of gas, the volume and temperature of gas is also a early formal operational stage. The fourth, the cognitive level of the energy of heat by a change of the state is also a early formal operational stage because kinetic theory picture accepted as providing explanation by the change of the state. And functional relationships beyond linear on the graph of the explanation of boiling point of water in water is also a early formal operational stage.

• Journal of Life Science
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• v.24 no.6
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• pp.618-625
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• 2014

Rice flour is used in many food products. However, dough made from rice lacks extensibility and elasticity, making it less suitable than wheat for many food products such as bread and noodles. The high-molecular weight glutenin subunits (HMW-GS) of wheat play a crucial role in determining the processing properties of the wheat grain. This paper describes the development of marker-free transgenic rice plants expressing a wheat Glu-Dy10 gene encoding the HMG-GS from the Korean wheat cultivar 'Jokyeong' using Agrobacterium-mediated co-transformation. Two expression cassettes, consisting of separate DNA fragments containing Glu-1Dy10 and hygromycin phosphotransferase II (HPTII) resistance genes, were introduced separately into Agrobacterium tumefaciens EHA105 for co-infection. Each EHA105 strain harboring Glu-1Dy10 or HPTII was infected into rice calli at a 3: 1 ratio of Glu-1Bx7 and HPTII. Among 290 hygromycin-resistant $T_0$ plants, we obtained 29 transgenic lines with both the Glu-1Dy10 and HPTII genes inserted into the rice genome. We reconfirmed the integration of the Glu-1Dy10 gene into the rice genome by Southern blot analysis. Transcripts and proteins of the Glu-1Dy10 in transgenic rice seeds were examined by semi-quantitative RT-PCR and Western blot analysis. The marker-free plants containing only the Glu-1Dy10 gene were successfully screened in the $T_1$ generation.

• Journal of the Korean Electrochemical Society
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• v.17 no.4
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• pp.222-228
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• 2014

Ni-rich system $Li[Ni_{1-x-y}Co_xMn_y]O_2$ of lithium secondary battery cathode material keep a high discharge capacity. However, by the Ni content increases, there is a problem that the electrochemical properties and stability of the structure are reduced. In order to solve these problems, research for positive ion doping is performed. The one of the cathode material, barium-doped $Li[Ni_{0.6-x}Ba_xCo_{0.1}Mn_{0.3}]O_2$ (x=0.01), was synthesized by the precursor, $Ni_{0.6}Co_{0.1}Mn_{0.3}(OH)_2$, from the co-precipitation method. The barium doped materials have studied the structural and electrochemical properties. The analysis of structural properties, results of X-ray diffraction analysis, and those results confirmed the change of the lattice from the binding energy in the structure by barium doping. Increased stability of the layered structure was observed by $I_{(006)}+I_{(102)}/I_{(101)}$(R-factor) ratio decrease. we expected that the electrochemical characteristics are improved. 23 mAh/g discharge capacity of barium-doped $Li[Ni_{0.6-x}Ba_xCo_{0.1}Mn_{0.3}]O_2$ (x=0.01) electrode is higher than discharge capacity of $Li[Ni_{0.6}Co_{0.1}Mn_{0.3}]O_2$ due to decrease overvoltage. And, through the structural stability was confirmed that improved the cycle characteristics. We caused a reduction in charge transfer resistance between the electrolyte and the electrode was confirmed that the C-rate characteristics are improved.

• Journal of the Korean association of regional geographers
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• v.4 no.2
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• pp.183-199
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• 1998

The purpose of this study is to review the meaning of the self-containment of new town from the viewpoint of ESSD and to derive some policy implications for enhancing the level of the self-containment. The case study area selected for empirical research is Ilsan in Seoul Metropolitan Area. As the self-containment of a new town is related to the energy consumption in transport and the increment of air pollution, the behavioral analysis of residents using self-contained facilities is one of the important subjects in ESSD. So, in this paper the characteristics of the land use plan and the level of self-containment in Ilsan new town are analyzed with regard to the supply of schools, jobs, goods and services. The empirical study shows that the degree of self-containment in the supply of jobs has low score(21.8%) because Ilsan new town is involved in the region in which the provision of a variety of employment opportunities is restricted by the metropolitan arrangement plan. The degree of self-containment in the supply of schools and goods has high score(94.0% and 89.4%). But there is a time lag in the supply of public services. It is suggested that new towns must be located remote from Seoul to avoid the restrictions by the metropolitan arrangement plan. To bring up the self-contained facilities, it is desirable to draw up a plan of attracting the tertiary sector in new town such as office industry. And, as the office industry prefers to locate in CBD of central city, it is necessary to give financial incentives to relocate the industry to new town. The establishment of an office complex for the pursuit of agglomeration economy would be an appropriate alternative. To solve the problem of time lag in the supply of self-contained facilities, it is necessary to prepare the synchronized development plan of housing and convenience facilities, especially schools and public services.

• Economic and Environmental Geology
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• v.46 no.1
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• pp.51-61
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• 2013

Researches on the oil recovery enhancement using the nanotechnology has recently been studied in the United States. The previous researches has focused mainly on the flow characteristics of nanoparticles in porous media, and the stability of the nano-emulsion itself. However, the analysis did not deal with the size effects between a nano-emulsion and the pore size which has an important role when nano-emulsion flows in the porous media. In this research, nano-based emulsion was fabricated which is able to be applied for the enhanced oil recovery techniques and its characteristics was analyzed. In addition, in order to identify the characteristics of nano-emulsions flowing through the porous media, the size effect was analysed by filtering test. According to the results, when the emulsion was fabricated, SCA(Silane Coupling Agent) or PVA(Poly Vinyl Alcohol) are added to improve the stability of emulsion. As the ratio of the decane to water increased, the viscosity of emulsion and the droplet size also increased. For the filtering test at the atmospheric conditions, the droplet did not go through the filter; only the separated water from the emulsion was able to be filtered. This phenomenon occurred because the droplet was not able to overcome the capillary pressure. At the filtering test by suction pressure, most of the emulsion was filtered over the filter size of $60{\mu}m$. However, the ratio of filtration was rapidly degraded at less than $45{\mu}m$ filters. This is caused due to deformation and destruction of the droplet by strong shear stress when passing through the pore. The results from the study on the basic characteristic of nano-emulsion and filtering test will be expected to play as the important role for the fabrication of the stable nano-emulsion or the research on the recovery of residual oil in porous media.

• Journal of Nutrition and Health
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• v.50 no.1
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• pp.74-84
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• 2017

Purpose: In this study, factors of metabolic syndrome and nutritional status were examined according to gender and occupations using the 2013 Korea National Health and Nutrition Examination Survey (KNHANES). Methods: This study was conducted on 1,750 workers (male : 892, female : 858) aged between 30 and 64, who participated in a health survey, health examination, and nutrition survey using the 6th 2013 KNHANES. Occupations were classified into white collar and blue collar workers, and nutrient intake was analyzed using a food frequency questionnaire. Analysis of complex sample design data through SPSS 19.0 was used for analysis. Results: The prevalence rate of metabolic syndrome among blue collar (35.1%) was higher than that among white collar workers (26.8%) in male subjects (p < 0.05) as well as in blue collar (24.8%) compared to white collar workers (8.9%) in female subjects (p < 0.001). Intake frequency per week, considering one portion by food category, showed significant differences in cooked rice (p < 0.05) and bakeries and confectioneries (p < 0.05) in make workers as well as stew and casserole (p < 0.01) and fruits (p < 0.05) in female workers. With regard to nutrient intake by occupation and gender, white collar workers consumed a greater amount of nutrients (not including total energy intake) compared to blue collar workers in both male and female workers. With regard to nutrient adequacy ratio (NAR) and mean adequacy ratio (MAR) according to gender and occupation, white collar workers showed higher numbers than blue collar workers in both male and female subjects. Conclusions: This study examined the prevalence rates of metabolic syndrome and nutrient intake according to gender and occupation. In both male and female subjects, blue collar workers showed higher prevalence rates compared to white collar workers, and their diet quality was worse than white collar workers' diet quality. Considering this result, customized nutrition education according to gender and occupation should be provided to workers to prevent diseases.