• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.655-656
• /
• 2005

In the future, plastic based system will play a crucial role in modem life, for examples, transparent display or disposable electronics and so on. In this paper, we introduced a new method to fabricate the metal line on the plastic substrate. Metal lines were fabricated by hot embossing and CMP process on PMMA (polymethylmethacrylate) substrates. A Si mold was made by wet etching process and a PMMA wafer was cut off from I mm thick PMMA sheet. A 100 nm thick Al was deposited on PMMA wafers. The Al deposited PMMA wafer and the Si mold carefully sandwiched which was directly imprinted by hot embossing. After imprinting process, a residual Al layer was removed by CMP process. Finally, we found the entire process may be very useful to fabricate the metal line on plastic substrates.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.5 no.3
• /
• pp.223-226
• /
• 2004

Injection molding using plastic materials was expected to mass production of structure with nano pattern for low cost phase. The PDMS mold was produced easily and uniformly by using thermal embossing. Quartz master for embossing method was made using electron beam lithography it had 100-500 nm size of line and dot type. The PDMS mold was produced after a brief hardening process and the master removal. The results show that various patterns are successfully fabricated the nano scale.. The replicated mold would be useful a stamper fabrication for injection molding.

• Korean Journal of Materials Research
• /
• v.15 no.9
• /
• pp.589-593
• /
• 2005

Nanoimprinting lithography (NIL) is known as a suitable technique for fabricating nano and micro structures of high definition. Hot embossing is one of NIL techniques and can imprint on thin films and bulk polymers. Key issues of hot embossing are time and expense needed to produce a stamp withstanding a high temperature and pressure. Fabrication of a metal stamp such as an electroplated nickel is cost intensive and time consuming. A ceramic stamp made by silicon is easy to break when the pressure is applied. In this paper, a plastic stamp using a high temperature epoxy was fabricated and tested. The plastic stamp was relatively inexpensive, rapid to produce and durable enough to withstanding multiple hot embossing cycles. The merits of low viscosity epoxy solutions were a fast degassing and a rapid filling the microstructures. The hot embossing process with plastic stamp was performed on PMMA substrates. The hot embossing was conducted at 12.6 bar, $120^{\circ}C$ and 10 minutes. An imprinted PMMA wafer was almost same value of the plastic stamp after 10 times embossing. Entire fabrication process from silicon master to plastic stamp was completed within 12 hours.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.117-118
• /
• 2008

• Transactions of Materials Processing
• /
• v.20 no.1
• /
• pp.23-28
• /
• 2011

For the fabrication of nano patterned products manufacturing a nano patterned mold is needed in advance. The nano patterned stamper was fabricated by electroforming the AAO master with nickel. The surface of nickel-plated stamper had nano-patterned holes with the diameter of 73 nm and the depth of 83 nm. Hot embossing was used for forming P3HT sheet and the process factors of hot embossing were closer as pressure, temperature and time. In the present paper hot embossing experiments were performed to find the main process conditions to affect the replication ratio of nano patterns on surface of P3HT sheet. As a result, main contributing factors for the replication ratio of hot embossed pattern could be sequentially enumerated as pressure, temperature and time.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.9 no.1
• /
• pp.99-105
• /
• 2010

This study was performed to solve the breaking problem in the fine blanking(FB) process of sector gears for car seat recliner using nickel chrome molybdenum steel(SNCM220) plate. The optimal design of embossing circle is changed to oval with labors' experiences and finite element analysis. The maximum principal stress and effective strain in a forming process are analyzed by commercial finite element software to solve the problems in embossing stage of FB process. As a result of FE analysis, the maximum principal stress in forming is lower than yield point of material. It is shown from experiments in the modified die that the formed gear does not break in embossing stage.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.18 no.6
• /
• pp.697-701
• /
• 2009

A simple method for the fabrication of porous nano-master for the anti-reflection effect on the transparent substrates is presented. In the conventional fabrication methods for antireflective surface, coating method using materials with low refractive index has usually been used. However, it is required to have a high cost and long processing time for mass production. In this paper, we developed a porous nano-master with anti-reflective surface for the molding stamper of the injection mold, hot embossing and UV imprinting by using the aluminum anodizing process. Through two-step anodizing and etching processes, a porous nano-master with anti-reflective surface was fabricated at the large area. Pattern size Pore diameter and inter-pore distance are about 130nm and 200nm, respectively. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master.

• Korean Journal of Optics and Photonics
• /
• v.13 no.3
• /
• pp.223-227
• /
• 2002

Polymeric multi-mode optical waveguides were fabricated for parallel optical interconnection. Waveguide structures were molded by a Ni mold master using a hot embossing technique. The Ni mold master was manufactured by LIGA process. Multimode optical waveguides with a 48$\times$47 ${\mu}{\textrm}{m}$$^2$cross-section were produced by a simple two-step process. The propagation losses of the multimode waveguide measured at 0.85 ${\mu}{\textrm}{m}$ and 1.3 ${\mu}{\textrm}{m}$ wavelengths were 0.38 dB/cm and 0.66 dB/cm, respectively.

• Journal of the Korean Society for Precision Engineering
• /
• v.34 no.3
• /
• pp.199-203
• /
• 2017

Hot embossing techniques are used to engrave patterns on plastic substrates. Roll based hot embossing uses a heated roll for a continuous process. A heated roll with relief patterns is impressed on a preheated plastic substrate. Then, the substrate is cooled down quickly to prevent thermal shrinkage. The roll speed is normally very slow to ensure substrate temperature increase up to the glass transition temperature. In this paper, we propose a noncontact preheating technique using focused infrared light. The infrared light is focused as a line beam on a plastic substrate using an elliptical mirror just before entering the hot embossing roll. The mid range infrared light efficiently raises the substrate temperature. For preliminary tests, substrate deformation and temperature changes were monitored according to substrate speed. The experiments show that the proposed technique is a good possibility for high speed hot embossing.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.95-96
• /
• 2012