• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.267-274
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• 2005

This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.

• 한국전기전자재료학회논문지
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• 제29권4호
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• pp.210-214
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• 2016

We investigated the sintering behavior and piezoelectric properties of lead-free $(K_{0.5}Na_{0.5})NbO_3$ ceramics co-doped with excess 0.01 mol ZnO and x mol $MnO_2$, where x was varied from 0 to 0.03. Excess $MnO_2$ addition was found to retard the grain growth and densification during sintering. However, 0.005 mol $MnO_2$ addition improved the piezoelectric properties of 0.01 mol ZnO added $(K_{0.5}Na_{0.5})NbO_3$ ceramics. The planar mode piezoelectric coupling coefficient, electromechanical quality factor, and piezoelectric constant $d_{33}$ of 0.01 mol ZnO and 0.005 mol $MnO_2$ added specimen were 0.40, 304, and 214 pC/N, respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1244-1245
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• 2008

Recently, piezoelectric transformer is applied to wide fields. Multi layer piezoelectric transformer has the advantage of high step up ratio, electromechanical coupling coefficient(Kp) and mechanical quality factor(Qm), but is indicated of peeling-phenomenon of electrode, rising sintering temperature made price of costly electrode. So in this study, it discuss on method for fabrication of rosen type piezoelectric transformers. For the fabrication as rosen type piezoelectric transformers, synthesized the powder using 0.01Pb$(ni_{1/3}Nb_{2/3})O_3$ - 0.08Pb$(Mn_{1/3}Nb_{2/3})O_3$ - 0.91Pb$(Zr_{0506}Ti_{0496})O_3$ (abbreviated as PNN-PMN-PZT) ceramics. The density, microstructure, dielectric and piezoelectric properties as a function of sintering temperature were investigated. The results indicated that the optimized properties of ceramics were obtained at sintering temperature of 1200$^{\circ}C$, showed the value of $d_{33}$=273pC/N, $K_p$=0.60 $Q_m$=1585, ${\varepsilon}_r$=1454, density=7.917$g/cm^3$ and $tan{\delta}$=0.0064.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권10호
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• pp.458-463
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• 2003

In order to develope piezoelectric transformer for the ballast of fluorescent lamp, a new shape and electrode pattern of piezoelectric transformer has been investigated in this work. The composition of piezoelectric ceramics was 0.95Pb(Zr$_{0.51}$Ti$_{0.49}$)O$_3$+0.03Pb(Mn$_{1}$3/Nb$_{2}$3/)O$_3$+0.02Pb(Sb$_{1}$2/Nb$_{1}$2/)O$_3$. The sample prepared by this composition system showed the characteristics which has about 1200 of relative dielecric constant, 1100 of the mechanical quality factor, 0.53 of the electromechanical coupling coefficient, 320 pC/N of the piezoelectric constant d$_{33}$, 0.3 % of the dissipation factor. Diameter and thickness of disk-type piezoelectric transformer was 45 mm and 4 mm, respectively. The driving and generating electrode with their gap of 1mm were fabricated on the top surface. But the common electrode was fabricated on the whole bottom surface. The electrode surface ratio of driving and generating part on the top surface ranges from 1.4:1 to 3:1. We investigated the electrical characteristics with the variation of the electrode surface ratio of driving and generating part in the range of load resistance of 100 $\Omega$～70 k$\Omega$. The set-up voltage ratio of this piezoelectric transformer increases with increasing both the electrode surface of driving part and the load resistance. The set-up voltage ratio at no load resistance was more than 60 times. On the other hand, the efficiency decreases with increasing the electrode surface of driving part. In the case of the electrode surface of both 1.4:1 and 2:1, maximum efficiency showed above 97 % at load resistance of 2 k$\Omega$. However, in the case of the electrode surface of 3:1, maximum efficiency showed about 94 % at load resistance of 3 k$\Omega$.>.>.>.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.68-69
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• 2005

Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

• 한국결정성장학회지
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• 제10권3호
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• pp.245-251
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• 2000

Pb($(Ni_{1/3}Nb_{2/3})O_3-PbTiO_3-PbZrO_3$세라믹스에서 NiO첨가에 따른 유전, 압전 및 기계적 특성의 변화를 연구하였다. Columbite precursor법을 사용하여 분말을 제조 후 공기중에서 $1100^{\circ}C$~$1250^{\circ}C$의 온도로 2시간 소결하여 시편을 제조하였다. $1150^{\circ}C$이하 온도에서 소결한 시편에서는 NiO를 1 mol% 첨가시까지 유전상수와 압전상수가 증가하였으나 첨가량이 그 이상 증가함에 따라 감소하였는데 이는 NiO가 소결조제 역할을 한 것으로 보여진다. 그러나 $1200^{\circ}C$ 이상 온도에서 소결한 시편에서는 NiO 첨가량 증가에 따라 유전상수와 전기기계결합계수가 감소하였으며, 기계적품질계수는 증가하였다. 경도 및 파괴인성은 1 mol% 첨가시 최대 값을 보이다가 그 이후 감소하였다. NiO 첨가 PNN-PT-PZ 세라믹스의 전기적 및 기계적 특성은 결정립크기, 소결밀도 및 2차상의 양 등의 미세구조적 요소와 긴밀한 관계가 있음을 보여준다.

• 한국음향학회지
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• 제41권3호
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• pp.278-286
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• 2022

본 연구에서는 압전세라믹 기반의 상용 Free-Flooded Ring(FFR) 트랜스듀서 대비 소형이면서 저주파 고감도 특성을 확보하기 위해, 높은 압전상수와 전기-기계 결합계수를 가지는 압전단결정 PIN-PMN-PT를 적용한 33-모드 FFR 트랜스듀서를 설계하였다. FFR 트랜스듀서의 광대역 특성을 확보하기 위해 비능동소자를 삽입한 링 구조를 적용하였으며, 3종의 비능동소자 소재 별 특성 해석 결과를 비교하여 최적의 소재를 선정하였다. 링 트랜스듀서의 특성 변화를 최소화하기 위해 오일 충진형 FFR 트랜스듀서로 제작하였으며, 음향시험을 통해 송신감도, 수중 임피던스 및 수평/수직 빔패턴이 해석결과와 잘 일치하는지 확인하였다. 해석 및 시험 결과를 비교한 결과, 송신감도는 공동공진 주파수에서 약 1.3 dB, 구조공진 주파수에서는 약 0.3 dB 차이를 보였다. 또한 상용 트랜스듀서 대비 높은 송신감도를 보유하면서도 직경을 약 17 % 축소하여 제작할 수 있었다. 이를 통해 소형이면서 고출력 특성을 가지는 압전단결정적용 FFR 트랜스듀서의 구현 가능성과 해석을 통한 특성 예측 방법의 유효성을 확인하였다.