• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.194-194
• /
• 2008

Lead oxide based ceramics, represented by PZT, are the most widely used materials for piezoelectric actuators, sensors, and transducers due to their excellent piezoelectric properties. In particular, high-performance multilayered piezoelectric ceramics for advanced electronic components have drawn great attention. In order to develop piezoelectric ceramics capable of being sintered at low temperature for multilayer piezoelectric device applications, the effect of CuO additions on the microstructures and electromechanical properties of the 0.4Pb$(Mg_{1/3}Nb_{2/3})O_3-0.25PbZrO_3-0.35PbTiO_3$ ceramics was investigated. The samples with CuO addition were synthesized by ordinary sintering technique. X-ray diffractions indicated that all samples formed a single phase perovskite structure. The addition of CuO improved the sinterability of the samples and caused an increase in the density and grain size at low temperature. The optimum sintering temperature was lowered by CuO additions. Excellent piezoelectric and electromechanical responses, $d_{33}$ ~ 663 pC/N, $k_p$ ~ 0.72, were obtained for the samples of high density with 0.1 wt% CuO addition sintered at $1050^{\circ}C$ for 4 h in air. These results show that the piezoelectric properties of PMNZT ceramics can be improved by controlling the microstructure and this system is potentially a good candidate as multilayer piezoelectric device for a wide range of electro-mechanical transducer applications.

• Korean Journal of Optics and Photonics
• /
• v.15 no.4
• /
• pp.385-390
• /
• 2004

In this paper, we designed a 4-bit optical true time-delay(TTD) for phased array antennas(PAAs), which is composed of a wavelength-fixed optical source, 2 ${\times}$ 2 optical MEMS switches, and fiber-optic delay lines. A 4-bit TTD with a unit time delay difference of 6 ps for 10-GHz PAAs has been implemented. Measurement results on time delay show an error of -0.4 ps at maximum, corresponding to a radiation angle error of less than 1.63$^{\circ}$. Thus, the TTD implemented in this research performs in excellent agreement with theory. Each TTD line, composed of MEMS switches and fiber-optic delay lines, connected to the corresponding antenna element has insertion loss in between 1.36 ㏈ and 2.40 ㏈ depending upon the setup of the switches. On the other hand, the insertion loss difference between TTD lines was 0.32 ㏈ at maximum for a fixed radiation angle. The TTD structure proposed in this paper might be more reliable and economical than those previously proposed using tunable wavelength sources if proper power equalization either with gain control of RF amplifiers or variable attenuators is achieved.

• Journal of the Microelectronics and Packaging Society
• /
• v.13 no.3 s.40
• /
• pp.9-12
• /
• 2006

We have designed and fabricated micro power generators by electroplating which is important in MEMS(micro electro mechanical system) technique. We have electroplated MEMS coils on the glass substrates and have chosen one of these coils for experiments. The thickness, width, and length of the coil are $7{\mu}m,\;20{\mu}m$, and 1.6 m, respectively. We have analyzed the structure of MEMS coil by SEM. We have made a vibrating system for reproducible results in measurement. With reciprocating a magnet on the surface of a fabricated winding coil, the micro power generator produce an alternating voltage. We have changed the vibrational frequency from 0.5 Hz to 8 Hz. The generated voltage was 106 mV at 3 Hz and 198 mV at 6 Hz. We aim at the micro power generator which can change vibration energy to useful electric energy.

• Journal of Advanced Navigation Technology
• /
• v.21 no.3
• /
• pp.251-257
• /
• 2017

Recently, hybrid positioning system combining GPS, vision sensor, and inertial sensor has drawn many attentions to estimate accurate vehicle positions. Since accurate multi-sensor fusion requires efficient time synchronization, this paper proposes an efficient method to obtain time synchronized measurements of vision sensor, inertial sensor, and OBD device based on GPS time information. In the proposed method, the time and position information is obtained by the GPS receiver, the attitude information is obtained by the inertial sensor, and the speed information is obtained by the OBD device. The obtained time, position, speed, and attitude information is converted to the color information. The color information is inserted to several corner pixels of the corresponding image frame. An experiment was performed with real measurements to evaluate the feasibility of the proposed method.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.24 no.6
• /
• pp.573-580
• /
• 2004

The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the $Si_3N_3$ deposition which forms the membrane of the cMUT were characterized after growing the $Si_3N_3$ on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the $SiO_2$ deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2012.05a
• /
• pp.81.2-81.2
• /
• 2012

To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.

• Korean Journal of Optics and Photonics
• /
• v.16 no.3
• /
• pp.287-294
• /
• 2005

In this paper, an optical true time-delay (TTD) for two-dimensional (2-D) phased array antennas (PAAs), composed of a multi-wavelength optical source and a fiber optic delay line matrix consisting of $2\times2$ optical switches with optical fiber connected between cross ports, has been proposed. A 2-bit $\times4-bit$ optical TTD for 10-GHz 2-D PAAs has been implemented by cascading a wavelength dependent TTD (WD-TTD) and a wavelength independent TTD (WI-TTD). The unit time delay for WD-TTD and WI-TTD have been chosen as ${\Delta}T=12ps$ and $\Delta\tau=6ps$, respectively. Time delay have been measured at all radiation angles. The maximum delay error for WD-TTD was measured to be 3 ps due to jitter incurred from gain switching. For the case of WI-TTD, error was within ${\pm}\;1\;ps$. The proposed optical TTD for a 2-D PAA has the following advantages: 1) higher gain compared to one-dimensional linear PAAs, 2) stabilization of optical power and wavelength by using a multi-wavelength optical source, and 3) fast beam scan and simple operation due to electronic control of the $2\times2$ optical switches matrix on a column-by-column basis.

• Journal of the Korean Ceramic Society
• /
• v.38 no.11
• /
• pp.980-986
• /
• 2001

Bragg reflector type FBAR was fabricated on the Si(100) substrate. We measured a frequency response of the resonator at 5.2 GHz and analyzed it by numerical calculation considering actual acoustic losses of each layer in the structure. We fabricated nine layer Bragg reflector of W-SiO$_2$pairs using r.f. sputtering method and fabricated AlN piezoelectric and Al electrodes using pulsed dc sputtering. The return loss(S$_{11}$) of the fabricated Bragg reflector type FBAR was 12 dB at 5.38 GHz and the series resonance frequency(f$_{s}$) was 5.376 GHz and the parallel resonance frequency(f$_{p}$) was 5.3865 GHz. Effective electro-mechanical coupling constant (K$_{eff{^2}}$) and Quality factors(Q$_{s}$), the Figures of Merit of the resonator, were about 0.48% and 411, respectively. We extracted acoustic parameters of AlN piezoelectric and reflection coefficient of the Bragg reflector by numerical calculation. We could know that material acoustic impedance and wave velocity of AlN piezoelectric decreased for intrinsic value and the electromechanical coupling constant(K$_2$) value was very low owing to the poor quality of the AlN piezoelectric. Reflection coefficient of Bragg reflector was 0.99966 and reflection band was very wide from 2.5 to 9.5 GHz.

• Journal of the Korea Society of Computer and Information
• /
• v.19 no.5
• /
• pp.43-52
• /
• 2014

In this paper, we propose Gravity Removal and Vector Rotation algorithm for counting steps of wearable device, and we evaluated the proposed GRVR algorithm with Micro-Electro-Mechanical (MEMS) 3-axis accelerometer equipped in low-power wearable device while the device is mounted on various positions of a walking or running person. By applying low-pass filter, the gravity elements are canceled from acceleration on each axis of yaw, pitch and roll. In addition to DC-bias removal and the low-pass filtering, the proposed GRVR calculates acceleration only on the yaw-axis while a person is walking or running thus we count the step even if the wearable device's axis are rotated during walking or running. The experimental result shows 99.4% accuracies for the cases where the wearable device is mounted in the middle and on the right of the belt, and 91.1% accuracy which is more accurate than 83% of commercial 3-axis pedometer when worn on wrist for the case of axis-rotation.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.40 no.2
• /
• pp.397-407
• /
• 2015

In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.