• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.29 no.2
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• pp.104-112
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• 2015

This paper deals with an methodology for acquiring optimal order of rational function model in FDNE(frequency dependent network equivalents) with GA(genetic Algorithm). In order to analyze the modern power system with huge complexity, an practical and efficient equivalent model is needed which represents the system's characteristics of transient phenomenon. this paper shows developing a z domain rational function model which have the resultant coefficient from proposed GA simulation. To demonstrate this methodology, some simulations are performed with practical power system of NZ which applied with fault condition and nonlinear converter load.