• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권7호
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• pp.311-315
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• 2002

Chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD), inter-level dielectric (ILD) layers of multi-layer interconnections. In this paper, we studied the characteristics of polishing pad, which can apply shallow trench isolation (STI)-CMP process for global planarization of multi-level interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was detected less than 2 on JR111 pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and device yield.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.54-57
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• 2001

We studied the characteristics of polishing pad, which can apply STI-CMP process for global planarization of multilevel interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was defected less than 2 on JRlll pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and devise yield.

• 한국세라믹학회지
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• 제36권8호
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• pp.813-819
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• 1999

Ion implantation, photo-lithography, Ar ion milling과 hot press 법을 이용한 micro-fabrication techrique을 사용하여 고순도 알루미나 단결정인 사파이어의 내부에, 조절된 Ca의 첨가량을 갖고 있는, crack과 비슷한 형태의 기공들을 형성시켰다. 이 bi-cryslal을 각각의 온도에서 열처리하여 Ca 이온이 고온에서 알루미나의 morphology와 hcaling에 미치는 영향을 관찰하였다. 열처리 온도가 올라감에 따라서 crack-like pore의 내부에 hcxagonal bridging ligaments가 생성되었는데, 열처리 온도와 Ca의 첨가량이 증가할수록 크기가 커지는 것을 관찰할 수 있었고, 생성된 hexagonal bndgmg ligaments는 열처리가 진행됨에 따라 서서히 커지면서 모서리가 둥글어지는 현상을 관찰할 수 있었다. Bicrystal 내부에 형성된 crack-like pore는 열처리가 진행되면서 edge regression. ligamcnt growth 및 flow의 3가지의 특징적인 형태로 진행되었다. 이때 edge regression은 상대적으로 저온에서부터 전체 crack-like pore에서 서서히 일어나기 시작하였으며, ligament growth는 일부 crack-like pore에서 진행되있으며, 대단히 빠른 속도로 crack healing이 진행됨을 추정할 수 있었다. Flow는 $1800^{\circ}C$ 이상의 고온에서 모든 crack-like pore에 걸쳐서 느리게 일어남을 알 수 있었다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집A
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• pp.705-711
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• 2000

This paper presents a fast 3D mesh generation method using a surface based method with a stitching algorithm. This method uses the surface based method since the volume based method that uses 3D Delaunay triangulation can hardly deal with a large scale of scanned points. To reduce the processing time, this method also uses a stitching algorithm: after dividing the whole point data into several sections and performing mesh generation on individual sections, the meshes from several sections are stitched into one mesh. Stitching method prevents the surface based method from increasing the processing time exponentially as the number of the points increases. This method works well with different types of scanned points: a scattered type points from a conventional 3D scanner and a cross-sectional type from CT or MRI.

• 방송공학회논문지
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• 제18권3호
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• pp.342-348
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• 2013

본 논문에서는 적응적인 확장 블록을 사용하는 프레임율 증강 기법인 AEBME (Adaptive Extended Bilateral Motion Estimation)을 제안하고자 한다. 기존의 EBME (Extended Bilateral Motion Estimation) 알고리듬은 동일한 구역에 두 번의 움직임 예측을 수행함으로 인해 높은 계산량이 요구되었다. 본 논문에서는 영상의 edge 정보를 활용한 블록 유형의 일치 유무를 고려하여 EBME 수행여부를 결정함으로써 움직임 예측 과정을 보다 빠르게 수행하도록 하였다. 움직임 벡터 평활화 과정이 적용되어 움직임 벡터 필드 내의 이상 벡터를 찾아 수정한다. 최종적으로 OBMC (Overlapped Block Motion Compensation)와 MCFI (Motion Compensated Frame Interpolation)이 프레임 움직임의 성질에 따라 적용되어 중간 프레임을 보간하게 된다. 실험 결과를 통해 제안하는 알고리듬이 기존의 알고리듬인 EBME에 비해 향상된 성능과 빠른 속도를 보임을 알 수 있다.

• 천문학회보
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• 제37권2호
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• pp.111.1-111.1
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• 2012

We examine the relationship between a type II radio burst that started from an unusually high frequency of 425 MHz (fundamental component) and an associated white-light coronal mass ejection on 2011 February 13. The radio burst had a drift rate of 2.5 MHz/sec, indicating a relatively high shock speed. From SDO AIA observations we find that a loop-like erupting front sweeps across high density coronal loops near the start time of the burst (17:34:15 UT). We find fragmented structures of the type II burst, which indicates the signature of the shock propagating through the multiple loops. The deduced distance of shock formation (0.06 Rs) from flare center and speed of the shock (1100 km $s^{-1}$) using the measured density from AIA/SDO observations are comparable to the height (0.05 Rs, from the solar surface) and speed (700 km $s^{-1}$) of the CME leading edge observed by STEREO/EUVI. We conclude that the type II burst could be onset even in the low corona (41 Mm or 0.06 Rs, above the solar surface) if a fast CME shock passes through the high density loops.

• 한국정밀공학회지
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• 제27권7호
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• pp.63-70
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• 2010

We developed a new punching system that generates pinholes expressing texts or images on a plastic plate. The pin-holed plate is used as a new glamorous display board reflecting colorful lights from the light emitting diode (LED) installed on the edge side of the plate. The four degree-of-freedom punching system was designed to make same multiple holes on four plastic plates simultaneously. For this motion, we designed a structure for a simultaneous motion of the system. For even reflection of the lights from texts or images on the board and fast production of the pin-holed boards, fast motion including precise position control is very important. We also built a PC-based integrated control system including a GUI program to help users easily design luminous texts or images on the plastic plate. Also, we conducted a performance test of the system to verify the punching speed and position control of the pin holes on the plate.

• Smart Structures and Systems
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• 제20권3호
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• pp.311-328
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• 2017

The characteristics of boundary layers have significant effects on the aerodynamic forces and vibration of the wind turbine blade. The incorporation of active trailing edge flaps (ATEF) into wind turbine blades has been proven as an effective control approach for alleviation of load and vibration. This paper is aimed at investigating the effects of external trailing edge flaps on the flow pattern and velocity distribution within a boundary layer of a NREL 5MW reference wind turbine, as well as designing a new type of velocity sensors for future validation measurements. An aeroelastic-aerodynamic simulation with FAST-AeroDyn code was conducted on the entire wind turbine structure and the modifications were made on turbine blade sections with ATEF. The results of aeroelastic-aerodynamic simulations were combined with the results of two-dimensional computational fluid dynamic simulations. From these, the velocity profile of the boundary layer as well as the thickness variation with time under the influence of a simplified load case was calculated for four different blade-flap combinations (without flap, with $-5^{\circ}$, $0^{\circ}$, and $+5^{\circ}$ flap). In conjunction with the computational modeling of the characteristics of boundary layers, a bio-inspired hair flow sensor was designed for sensing the boundary flow field surrounding the turbine blades, which ultimately aims to provide real time data to design the control scheme of the flap structure. The sensor element design and performance were analyzed using both theoretical model and finite element method. A prototype sensor element with desired bio-mimicry responses was fabricated and validated, which will be further refined for integration with the turbine blade structures.

• Nuclear Engineering and Technology
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• 제47권5호
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• pp.523-533
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• 2015

Three-dimensional flow phenomena in a wire-wrapped 37-pin fuel assembly mock-up of a Japanese loop-type sodium-cooled fast reactor, Monju, were investigated with a numerical analysis using a general-purpose commercial computational fluid dynamics code, CFX. Complicated and vortical flow phenomena in the wire-wrapped 37-pin fuel assembly were captured by a Reynolds-averaged Navier-Stokes flow simulation using a shear stress transport turbulence model. The main purpose of the current study is to understand the three-dimensional complex flow phenomena in a wire-wrapped fuel assembly to support the license issue for the core design. Computational fluid dynamics results show good agreement with friction factor correlation models. The secondary flow in the corner and edge subchannels is much stronger than that in an interior subchannel. The axial velocity averaged in the corner and edge subchannels is higher than that averaged in the interior subchannels. Three-dimensional multiscale vortex structures start to be formed by an interaction between secondary flows around each wire-wrapped pin. Behavior of the large-scale vortex structures in the corner and edge subchannels is closely related to the relative position between the hexagonal duct wall and the helically wrapped wire spacer. The small-scale vortex is axially developed in the interior subchannels. Furthermore, a driving force on each wire spacer surface is closely related to the relative position between the hexagonal duct wall and the wire spacer.

• Journal of Welding and Joining
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• 제27권6호
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• pp.74-79
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• 2009

Titanium and titanium alloy can be reproduced immediately even if oxide films($TiO_2$) break apart in sea water. Therefore, since titanium demonstrates large specific strength and outstanding resistance to stress corrosion cracking, crevice corrosion, pitting and microbiologically influenced corrosion in sea water environment, it has been widely applied to heat exchanger for ships. In particular, with excellent elongation, pure titanium may be deemed as optimal material for production of heat exchanger plate which is used with wrinkles formed for efficient heat exchange. Conventional plate type heat exchanger prevented leakage of liquid through insertion of gasket between plates and mechanical tightening by bolts and nuts, but in high temperature and high pressure environment, gasket deterioration and leakage occur, so heat exchanger for LPG re-liquefaction device etc do not use gasket but weld heat exchanger plate for use. On the other hand, since welded plate cannot be separated, it is important to obtain high quality reliable welds. In addition, for better workability and production performance, lasers that can obtain weldment with large aspect ratio and demonstrate fast welding speed even in atmospheric condition not in vacuum condition are used in producing products. So far, 1st report and 2nd report compared and analyzed embrittlement degrees by bead colors of weldment through quantitative analysis of oxygen and nitrogen and measurement of hardness as fundamental experiment for the evaluation of titanium laser welding, and evaluated the welding performance and mechanical properties of butt welding. This study welded specimens in various conditions by using laser and GTA welding machine to apply edge welding to heat exchanger, and evaluated the mechanical strength through tensile stress test. As a result of tensile test, laser weldment demonstrated tensile strength 4 times higher than GTA welds, and porosity could be controlled by increasing and decreasing slope of laser power at overlap area.