• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.7
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• pp.311-315
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• 2002

Chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD), inter-level dielectric (ILD) layers of multi-layer interconnections. In this paper, we studied the characteristics of polishing pad, which can apply shallow trench isolation (STI)-CMP process for global planarization of multi-level interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was detected less than 2 on JR111 pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and device yield.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.54-57
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• 2001

We studied the characteristics of polishing pad, which can apply STI-CMP process for global planarization of multilevel interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was defected less than 2 on JRlll pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and devise yield.

• Journal of the Korean Ceramic Society
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• v.36 no.8
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• pp.813-819
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• 1999

Inner crack-like pores with controlled amount of Ca impurity level in the high purity alumina single crystal sapphire had been created by micro-fabrication technique which includes ion implantation photo-lithography Ar ion milling and hot press technique. The morphological change and the healing of crack-like pore in the Ca doped high purity single crystal alumina during high temperature heat treatment in vacuum were observed using optical microscopy. The hexagonal bridging ligaments were developed and the size of hexagonal bridging ligaments had been increased with temperature and Ca amount and had grown to their corner rounded. It appeared that the hexagonal bridging ligaments would have an equilbrium size with temperature and the amount of Ca addition. Three kinds of crack-like pore healing type were observed. Edge regression and ligament growth were observed from relatively low temperature in the crack-like pore. Edge regression were found in almost all of the crack-like pore but the ligament growth were found only in the several crack-like pores accelerating heating very fast. Flow type healing was observed above $1800^{\circ}C$ and It healed the crack-like pore very slowly.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.705-711
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• 2000

This paper presents a fast 3D mesh generation method using a surface based method with a stitching algorithm. This method uses the surface based method since the volume based method that uses 3D Delaunay triangulation can hardly deal with a large scale of scanned points. To reduce the processing time, this method also uses a stitching algorithm: after dividing the whole point data into several sections and performing mesh generation on individual sections, the meshes from several sections are stitched into one mesh. Stitching method prevents the surface based method from increasing the processing time exponentially as the number of the points increases. This method works well with different types of scanned points: a scattered type points from a conventional 3D scanner and a cross-sectional type from CT or MRI.

• Journal of Broadcast Engineering
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• v.18 no.3
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• pp.342-348
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• 2013

In this paper, a novel frame rate up conversion (FRUC) algorithm using adaptive extended bilateral motion estimation (AEBME) is proposed. Conventionally, extended bilateral motion estimation (EBME) conducts dual motion estimation (ME) processes on the same region, therefore involves high complexity. However, in this proposed scheme, a novel block type matching procedure is suggested to accelerate the ME procedure. We calculate the edge information using sobel mask, and the calculated edge information is used in block type matching procedure. Based on the block type matching, decision will be made whether to use EBME. Motion vector smoothing (MVS) is adopted to detect outliers and correct outliers in the motion vector field. Finally, overlapped block motion compensation (OBMC) and motion compensated frame interpolation (MCFI) are adopted to interpolate the intermediate frame in which OBMC is employed adaptively based on frame motion activity. Experimental results show that this proposed algorithm has outstanding performance and fast computation comparing with EBME.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.111.1-111.1
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• 2012

We examine the relationship between a type II radio burst that started from an unusually high frequency of 425 MHz (fundamental component) and an associated white-light coronal mass ejection on 2011 February 13. The radio burst had a drift rate of 2.5 MHz/sec, indicating a relatively high shock speed. From SDO AIA observations we find that a loop-like erupting front sweeps across high density coronal loops near the start time of the burst (17:34:15 UT). We find fragmented structures of the type II burst, which indicates the signature of the shock propagating through the multiple loops. The deduced distance of shock formation (0.06 Rs) from flare center and speed of the shock (1100 km $s^{-1}$) using the measured density from AIA/SDO observations are comparable to the height (0.05 Rs, from the solar surface) and speed (700 km $s^{-1}$) of the CME leading edge observed by STEREO/EUVI. We conclude that the type II burst could be onset even in the low corona (41 Mm or 0.06 Rs, above the solar surface) if a fast CME shock passes through the high density loops.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.7
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• pp.63-70
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• 2010

We developed a new punching system that generates pinholes expressing texts or images on a plastic plate. The pin-holed plate is used as a new glamorous display board reflecting colorful lights from the light emitting diode (LED) installed on the edge side of the plate. The four degree-of-freedom punching system was designed to make same multiple holes on four plastic plates simultaneously. For this motion, we designed a structure for a simultaneous motion of the system. For even reflection of the lights from texts or images on the board and fast production of the pin-holed boards, fast motion including precise position control is very important. We also built a PC-based integrated control system including a GUI program to help users easily design luminous texts or images on the plastic plate. Also, we conducted a performance test of the system to verify the punching speed and position control of the pin holes on the plate.

• Smart Structures and Systems
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• v.20 no.3
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• pp.311-328
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• 2017

The characteristics of boundary layers have significant effects on the aerodynamic forces and vibration of the wind turbine blade. The incorporation of active trailing edge flaps (ATEF) into wind turbine blades has been proven as an effective control approach for alleviation of load and vibration. This paper is aimed at investigating the effects of external trailing edge flaps on the flow pattern and velocity distribution within a boundary layer of a NREL 5MW reference wind turbine, as well as designing a new type of velocity sensors for future validation measurements. An aeroelastic-aerodynamic simulation with FAST-AeroDyn code was conducted on the entire wind turbine structure and the modifications were made on turbine blade sections with ATEF. The results of aeroelastic-aerodynamic simulations were combined with the results of two-dimensional computational fluid dynamic simulations. From these, the velocity profile of the boundary layer as well as the thickness variation with time under the influence of a simplified load case was calculated for four different blade-flap combinations (without flap, with $-5^{\circ}$, $0^{\circ}$, and $+5^{\circ}$ flap). In conjunction with the computational modeling of the characteristics of boundary layers, a bio-inspired hair flow sensor was designed for sensing the boundary flow field surrounding the turbine blades, which ultimately aims to provide real time data to design the control scheme of the flap structure. The sensor element design and performance were analyzed using both theoretical model and finite element method. A prototype sensor element with desired bio-mimicry responses was fabricated and validated, which will be further refined for integration with the turbine blade structures.

• Nuclear Engineering and Technology
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• v.47 no.5
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• pp.523-533
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• 2015

Three-dimensional flow phenomena in a wire-wrapped 37-pin fuel assembly mock-up of a Japanese loop-type sodium-cooled fast reactor, Monju, were investigated with a numerical analysis using a general-purpose commercial computational fluid dynamics code, CFX. Complicated and vortical flow phenomena in the wire-wrapped 37-pin fuel assembly were captured by a Reynolds-averaged Navier-Stokes flow simulation using a shear stress transport turbulence model. The main purpose of the current study is to understand the three-dimensional complex flow phenomena in a wire-wrapped fuel assembly to support the license issue for the core design. Computational fluid dynamics results show good agreement with friction factor correlation models. The secondary flow in the corner and edge subchannels is much stronger than that in an interior subchannel. The axial velocity averaged in the corner and edge subchannels is higher than that averaged in the interior subchannels. Three-dimensional multiscale vortex structures start to be formed by an interaction between secondary flows around each wire-wrapped pin. Behavior of the large-scale vortex structures in the corner and edge subchannels is closely related to the relative position between the hexagonal duct wall and the helically wrapped wire spacer. The small-scale vortex is axially developed in the interior subchannels. Furthermore, a driving force on each wire spacer surface is closely related to the relative position between the hexagonal duct wall and the wire spacer.

• Journal of Welding and Joining
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• v.27 no.6
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• pp.74-79
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• 2009

Titanium and titanium alloy can be reproduced immediately even if oxide films($TiO_2$) break apart in sea water. Therefore, since titanium demonstrates large specific strength and outstanding resistance to stress corrosion cracking, crevice corrosion, pitting and microbiologically influenced corrosion in sea water environment, it has been widely applied to heat exchanger for ships. In particular, with excellent elongation, pure titanium may be deemed as optimal material for production of heat exchanger plate which is used with wrinkles formed for efficient heat exchange. Conventional plate type heat exchanger prevented leakage of liquid through insertion of gasket between plates and mechanical tightening by bolts and nuts, but in high temperature and high pressure environment, gasket deterioration and leakage occur, so heat exchanger for LPG re-liquefaction device etc do not use gasket but weld heat exchanger plate for use. On the other hand, since welded plate cannot be separated, it is important to obtain high quality reliable welds. In addition, for better workability and production performance, lasers that can obtain weldment with large aspect ratio and demonstrate fast welding speed even in atmospheric condition not in vacuum condition are used in producing products. So far, 1st report and 2nd report compared and analyzed embrittlement degrees by bead colors of weldment through quantitative analysis of oxygen and nitrogen and measurement of hardness as fundamental experiment for the evaluation of titanium laser welding, and evaluated the welding performance and mechanical properties of butt welding. This study welded specimens in various conditions by using laser and GTA welding machine to apply edge welding to heat exchanger, and evaluated the mechanical strength through tensile stress test. As a result of tensile test, laser weldment demonstrated tensile strength 4 times higher than GTA welds, and porosity could be controlled by increasing and decreasing slope of laser power at overlap area.