• Journal of information and communication convergence engineering
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• v.5 no.4
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• pp.374-376
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• 2007

The output characteristics of HF and DF lasers were compared theoretically. The simulation code shows the good agreement with the experimental results well. As results, the effect of chain termination reaction in $F_2$ rich mixture is larger than that of $SF_6$ rich mixture in HF and DF lasers.