• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.664-669
• /
• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.3 s.96
• /
• pp.154-163
• /
• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Journal of Institute of Control, Robotics and Systems
• /
• v.9 no.4
• /
• pp.277-283
• /
• 2003

Recently, near-field recording (NFR) disk drive schemes have been proposed with a view to increasing recording densities of hard disk drives. Compared with hard disk drives. NFR disk drives have narrower track pitches and are exposed to more severe periodic disturbances resulting from eccentric rotation of the disk. It is difficult to meet servo system design specifications for NFR disk drives with conventional VCM actuators in that the servo system for an NFR disk drive generally requires a feater gain and higher bandwidth. To tackle the problem various dual-stage actuator systems composed of a microactuator mounted on top of a conventional VCM actuator have been proposed. This article deals with the problem of designing a tracking servo system far an NFR disk drive adopting a dual-stage actuator. We summarize design constraints pertaining to the dual-stage servo system and present a new servo scheme using iterative teaming control. We design feedback compensators and an iterative teaming controller for a target plant and verify the validity of the proposed control scheme through a computer simulation.

• 제어로봇시스템학회:학술대회논문집
• /
• 1994.10a
• /
• pp.605-610
• /
• 1994

This paper discusses the solution to the precise positioning control problem applied to a simple model of a dual stage or redundant positioner. The dual stage actuator presented here uses a VCM(Voice Coil Motor) as a coarse actuator and a piezoelectric actuator as a fine actuator. By adopting controllers with two-degree-of-freedom and by optimizing H$_{2}$ faster precise tracking can be realized. Experimental and numerical results are presented to demonstrate the control effects.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2003.11a
• /
• pp.424-429
• /
• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2004.11a
• /
• pp.236-241
• /
• 2004

In this paper, the dual stage interaction between the coarse actuator and the fine actuator of an optical disk drive and the control method to enhance the track pull-in performance are discussed. First, the interaction analyses for the dual stage, and the experiments to find the each actuator dynamics are studied. From the experiments results, some physical parameters was derived, then, some simulations are performed to find the residual vibration effect of the fine actuator during seek motion. Second, the fine actuator control method to reduce the relative velocity, which is a key factor in track pull-in performance, between the target track and beam spot is proposed. From simulations, we show that fine actuator control which has same frequency and same phase of the disturbance is effective to reduce the relative velocity, hence, the control method is good approach in the track pull-in enhancement. Finally, the some comments are discussed briefly.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2000.06a
• /
• pp.1533-1539
• /
• 2000

In this paper, we propose a design method using Taguchi method and a neural network. Using this method, we can design a dual-stage actuator having the required tracking/focusing properties in real time. Also, as an application of this method, a proposed dual-stage pick-up actuator having the required properties was designed. The seek time of this designed actuator is less than 13 msec by a time optimal technique. Simulation results show that this method can potentially be implemented in all the dual-stage actuators.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.71-72
• /
• 2011

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.14 no.5
• /
• pp.385-393
• /
• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1995.10a
• /
• pp.437-441
• /
• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.