The Effect of Diluent Gases of $H_2$ or $N_2$ on the Growth Behavior of CVD SiC
($H_2$ , $N_2$ 희석기체에 따른 화학증착 탄화규소의 성장 거동)
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- Journal of the Korean Ceramic Society
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- v.35 no.7
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- pp.764-774
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- 1998