• Title/Summary/Keyword: diffusion pump

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Simulation of High Vacuum Characteristics by VacTran Simulator

  • Kim, Hyung-Taek;Jeong, Hyeongwon
    • International journal of advanced smart convergence
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    • v.11 no.4
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    • pp.88-95
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    • 2022
  • Vacuum simulation is associated with the prediction and calculation of how materials, pumps and systems will perform using mathematical equations. In this investigation, three different high vacuum systems were simulated and estimated with each vacuum characteristics by VacTran simulator. In each of modelled vacuum systems, selection of gas loads into vessel, combination of rough and high vacuum pumps and dimension of conductance elements were proposed as system variables. In pump station model, the pumping speed to pressures by the combination of root pump was analyzed under the variations of vessel volume. In this study, the effects of outgassing dependent on vessel materials was also simulated and aluminum vessel was estimated to optimum materials. It was obtained from the modelling with diffusion pump that the diameter, length of 50×250[mm]roughing line was characterized as optimum variables to reach the ultimate pressure of 10E-7[torr]. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacTran simulator. Feasibility of VacTran as vacuum simulator was verified and applications of VacTran in high tech process expected to be increased.

Performance Prediction of Centrifugal Pumps using Two Zone Model (두영역모델을 사용한 원심펌프의 성능예측)

  • Choi, Young-Seok;Shim, Jae-Hyeok;Kang, Shin-Hyoung
    • 유체기계공업학회:학술대회논문집
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    • 1998.12a
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    • pp.33-41
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    • 1998
  • In this study, the performance prediction programs for centrifugal pumps are developed. To estimate the losses in the centrifugal pump impellers, two-zone model and TEIS(two elements in series) model are applied to the program. The basic concept of two zone model considers the primary zone that is an isentropic core flow and the secondary zone that is non-isentropic region at the impeller exit. The flows through two different zones mixed out at the impeller exit and the mixing process occurs with an increase in entropy, a decrease in total pressure. The level of the core flow diffusion in a impeller was calculated using TEIS(two elements in series) model. The effects of various parameters which are used in this program on the prediction of head and efficiency are discussed. The correlation curves to select the effectiveness of the primitive TEIS model were suggested according to the specific speed of the centrifugal pumps.

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A Theoretical Study for the Thermal Diffusivity Measurement of Solid Material using Photothermal Displacement Method (광열변위법을 이용한 재료의 열확산계수 측정에 대한 이론적 연구)

  • Jeon, Pil-Soo;Lee, Eun-Ho;Lee, Kwang-Jai;Yoo, Jai-Suk;Kim, Ki-Hyun
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.132-137
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    • 2000
  • A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in solid materials. The influence of parameters - radius and modulation frequency of pump beam and thickness of material - on the phase lag was studied. The phase decreases up to a certain position, then starts to increase and does have an asymptotic value. The position, where phase has the minimum value, is a function of thermal diffusion length thickness of sample, and radius of pump beam. A new method based on minimum phase lag is described to determine the thermal diffusivity of solid material.

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Performance Prediction of Centrifugal Pumps using a Two Zone Model (두영역모델을 사용한 원심펌프의 성능예측)

  • Choi, Young-Seok;Shim, Jae-Hyeok;Kang, Shin-Hyoung
    • The KSFM Journal of Fluid Machinery
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    • v.2 no.1 s.2
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    • pp.56-63
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    • 1999
  • In this study, the performance prediction programs for centrifugal pumps are developed. To estimate the losses in the centrifugal pump impellers, a two-zone model and TEIS(two elements in series) model are applied to the program. The basic concept of a two zone model considers the primary zone that is an isentropic core flow and the secondary zone that has a non-isentropic region at the impeller exit. The flow goes through two different zones and is mixed out at the impeller exit and the mixing process occurs with an increase in entropy, a decrease in total pressure. The level of the core flow diffusion in an impeller was calculated using TEIS(two elements in series) model. The effects of various parameters which are used in this program on the prediction of head and efficiency are discussed. The correlation curves used to select the effectiveness of the primitive TEIS model were suggested according to the specific speed of the centrifugal pumps.

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Dry Etching of PMMA and Polycarbonate in a Diffusion Pump-based Capacitively Coupled O2 Plasma (확산펌프 기반의 O2 축전결합 플라즈마를 이용한 PMMA와 폴리카보네이트의 건식 식각)

  • Park, Ju-Hong;Lee, Seong-Hyun;Choi, Jyoung-Hoon;Noh, Ho-Sub;Lee, Je-Won
    • Korean Journal of Materials Research
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    • v.19 no.8
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    • pp.421-426
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    • 2009
  • We report on the capacitively coupled O2 plasma etching of PMMA and polycarbonate (PC) with a diffusion pump. Plasma process variables were process pressure and CCP power at 5 sccm $O_2$ gas flow rate. Characterization was done in order to analyze etch rate, etch selectivity, surface roughness, and morphology using stylus surface profilometry and scanning electron microscopy. Self bias decreased with increase of process pressure in the range of 25$\sim$180 mTorr. We found an important result for optimum pressure for the highest etch rate of PMMA and PC, which was 60 mTorr. PMMA and PC had etch rates of 0.46 and 0.28 ${\mu}m$/min under pressure conditions, respectively. More specifically, etch rates of the materials increased when the pressure changed from 25 mTorr to 60 mTorr. However, they reduced when the pressure increased further after 60 mTorr. RMS roughnesses of the etched surfaces were in the range of 2.2$\sim$2.9 nm. Etch selectivity of PMMA to a photoresist was $\sim$1.5:1 and that of PC was $\sim$0.9:1. Etch rate constant was about 0.04 ${\mu}m$/minW and 0.02 ${\mu}m$/minW for PMMA and PC, respectively, with the CCP power change at 5 sccm $O_2$ and 40 mTorr process pressure. PC had more erosion on the etched sidewall than PMMA did. The OES data showed that the intensity of the oxygen atomic peak (777.196 nm) proportionally increased with the CCP power.

A study on the spray combustion characteristics in a cylinder of a D.I.diesel engine with the electronically controlled injector (전자제어식 직접분사 디젤 엔진 연소실내의 분무연소 특성에 관한 연구)

  • 정재우;김성중;이기형;선우명호
    • Transactions of the Korean Society of Automotive Engineers
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    • v.8 no.2
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    • pp.50-56
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    • 2000
  • It is well known that the combustion phenomenon of diesel engine is an unsteady turbulent diffusion combustion. Therefore, the combustion performance of diesel engine is related to a complex phenomenon which involves the various factors of combustion, such as a injection pressure, injection timing, injection rate, and operation conditions of engine. In this study, the spray and the flame development processes in a single cylinder D.I. diesel visualization engine which uses the electronically controlled injection system were visualized to interpret the complicated combustion phenomenon by using high speed CCD camera. In addition, the cylinder pressure and heat release rate were also obtained in order to analyze the diesel combustion characteristics under several engine conditions.

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A study on odor and ventilation in waste treatment facilities (폐기물 처리시설에서의 악취 및 환기에 관한 연구)

  • Seo, Byung-Suk;Jeon, Yong-Han
    • Design & Manufacturing
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    • v.14 no.2
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    • pp.28-33
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    • 2020
  • Recently, as the income level and quality of life have improved, the desire for a pleasant environment has increased, and a deodorization plan is required through thorough prevention and diffusion of odorous substances in waste treatment facilities recognized as hateful facilities, appropriate collection, and selection of the right prevention facilities. In this study, a waste disposal facility was modeled and computerized analysis for odor and ventilation analysis was conducted. Numerical analysis of the waste treatment facility was performed at the size of the actual plant. CATIA V5 R16 for numerical model generation and ANSYS FLUENT V.13 for general purpose flow analysis were used as analysis tools. The average air-age of the internal was 329 seconds, and the air-flow velocity was 0.384m/s. The odor diffusion analysis inside the underground pump room showed congestion-free air circulation through streamline distribution and air-age distribution. This satisfies the ASHRAE criteria. In addition, the results of diffusion analysis of odorous substances such as ammonia, hydrogen sulfide, methyl mercaptan and dimethyl sulfide were all expected to satisfy the regulatory standards. Particularly in the case of the waste loading area, the air-flow velocity was 0.297m/s, and the result of meeting the regulatory standards with 0.167ppm of ammonia, 0.00548ppm of hydrogen sulfide, 0.003ppm of methyl mercaptan, and 0.003ppm of dimethyl sulfide was found.

The Characteristics of Thermal Diffusion With the Vertical-Closed Loop Type Geothermal Heat Exchanger (수직밀폐형 지중열교환기의 온도분포 특성)

  • Sun, Jong-Cheol;Kim, Byung-Chul;Koh, Young-Ha
    • Journal of the Korean Solar Energy Society
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    • v.33 no.1
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    • pp.57-65
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    • 2013
  • The temperatures with the ground depth, the positions of circulation water in ground heat exchanger were measured and thermal diffusion characteristics with the distances of the direction normal to the borehole was analysed. The deeper the depth of ground, the less the influences of outdoor temperature, but below 10m of ground, there was no influences of ground temperature. When the depth of trench pipe was below the depth of 2m, there was no influence. In the ground of 10m when the distances between the pipe and the other places were above 0.5m, the variations of temperature were less than $1.6^{\circ}C$ and above 2.5m they were less than $0.1^{\circ}C$. When the distances of bore hole were above 5m, there were no. influences of the nearest ground heat exchanger.

A Study on Integrated Operation Strategies Between New & Renewable Energy Policy and Demand Side Management Policy (신재생에너지 정책과 수요관리 정책의 통합 운영 전략에 관한 연구)

  • Hwang, Sungwook;Jung, Hoon;Nah, Hwanseon;Won, Jongryul;Kim, Junghoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.11a
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    • pp.144-144
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    • 2010
  • Reasonable usage methods of energy resources, which are limited for human beings to use, consists of new & renewable energy (NRE) and demand side management (DSM). All technologies and policies for energy resources are classified into two fields, methods for using new energy resources and methods for using conventional fuel energy resources. Various development activities for these fileds have been implemented and various subsidy programs have been operated to penetrate into markets rapidly. These subsidy programs have various types of subsidy by energy resources and programs and the budget are funded by government, which is called Electric Power Industry Basis Fund and is managed considering technology level, economic analysis, global environment, etc. These subsidy programs are managed by Korea Energy Management Corporation (KEMCO) for NRE and by Korea Electric Power Corporation (KEPCO) for DSM, the management are different among two corporations because the purposes and features of establishment are different though these are all public organization. KEMCO is managing the NRE subsidy programs according to the government will, while the management of KEPCO subjects to power system operations though the government will for DSM is considered. NRE which is on the initial phase of diffusion would not affect on power system seriously but the affects could be grown when the diffusion and importance are expanded. Hence some integrated affection analyses considering NRE and DSM are required and this paper shows the concept of integrated operation strategies with ground source heat pump systems which are related with two fields simultaneously.

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Performance Analysis for Open-loop Geothermal System with Spill-way technology by Real-scale Experiment (관정간 도수통로를 설치한 개방형 지열 시스템의 냉방성능 실험)

  • Kim, Hong kyo;Bae, Sangmu;Nam, Yujin;Jeoun, Oun;Oh, Jong Hyun;Lee, Byong Ho
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.30 no.4
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    • pp.186-194
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    • 2018
  • A ground-source heat pump system (GSHP) is more energy efficient than other heat-source systems because it uses annual constant underground and water temperatures. Especially, two-well geothermal systems using groundwater as the heat source can achieve higher performance than closed-loop geothermal systems. However, performance of two-well geothermal systems is decreased by occurring overflow according to scale during long-term operations. Therefore, this study presents a two-well pairing geothermal system that controls the groundwater level of a diffusion well. In addition, a two-well pairing geothermal system and an SCW geothermal system were installed, and a comparative analysis of cooling performance depending on system operation under the same load conditions was conducted. The result was that the average heat pump coefficient of performance (COP) of the two-well pairing system was 6.5, and the entire system COP was 4.3.