• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.2
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• pp.76-79
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• 1999

Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.343-346
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• 2004

In recent years, various forms of indentation testing have been increasingly used to determine the material properties of specimens. This technique, particularly the nano-indentation method , has been extended to the testing of coating systems in order to calculate the individual properties of the thin coatings and the substrates. However, the interpretation of the test data to achieve this is complex and continues to be a widely studied subject. Based on the finite element method of coated surfaces indented by a Berkovich diamond tip, this paper describes methods for combining FEM and experimental indentation testing to determine coating modulus and hardness independent of substrate effects. Using this proposed methodology, testing and FEM to measure coefficients of friction of sheet steel for outer panel were studied.

• Journal of Power System Engineering
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• v.12 no.3
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• pp.66-71
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• 2008

Diamond-like-carbon (DLC) coatings could be good candidates as solid lubricants for cutting tools in dry machining of aluminum alloy. In this work, DLC thin films were produced as a friction reduction coating for WC-Co insert tip using the plasma immersion ion beam deposition (PIIED) technique. DLC coatings were also coated on $Al_2O_3$ specimens and high temperature wear tested up to $400^{\circ}C$ in dry air to observe the survivability of the DLC coating in simulated severe cutting conditions using a pin-on-disc tribotester with Hertzian contact stress of 1.3GPa. It showed reduced friction coefficients of minimum 0.02 up to $400^{\circ}C$. And cutting performance of DLC coated WC-Co insert tips to Al 6061 alloy were conducted in a high speed machining center. The main problems of built-up edge formation in aluminum machining are drastically reduced with improved surface roughness. The improvements were mainly related to the low friction coefficient of DLC to Al alloy and the anti-adhesion of Al alloy to WE due to the inertness of DLC.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.7
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• pp.508-516
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• 1998

Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.

• Journal of Mechanical Science and Technology
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• v.18 no.10
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• pp.1772-1781
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• 2004

The mechanical as well as tribological characteristics of coating films as thin as a few nm become more crucial as applications in micro-systems grow. Especially, the amorphous carbon film has a potential to be used as a protective layer for micro-systems. In this work, quantitative evaluation of nano-indentation, scratching, and wear tests were performed on the 7nm thick amorphous carbon film using an Atomic Force Microscope (AFM). It was shown that AFM-based nano-indentation using a diamond coated tip can be feasibly utilized for mechanical characterization of ultra-thin films. Also, it was found that the critical load where the failure of the carbon film occurred was about 18${\mu}$N by the ramp load scratch test. Finally, the wear experimental results showed that the quantitative wear rate of the carbon film ranged 10$\^$-9/～10$\^$-8/ ㎣ /N cycle. These experimental methods can be effectively utilized for a better understanding the mechanical and tribological characteristics at the nano-scale.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.11a
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• pp.18-22
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• 2000

An experimental study was carried out to investigate the effect of nano-contact condition on the nano-adhesion phenomena. SPM(scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. DLC(diamond-like carbon) and W-DLC (tungsten-incorporated diamond-like carbon) were coated on (100) silicon wafer by PACVD(plasma assisted chemical vapor deposition). Pull-off forces of Pure Si-wafer, DLC and W-DLC were measured with SPM(scanning probe microscope). Also, the same series of tests were carried out with the tips with different radius of curvature. Results showed that DLC and W-DLC showed much lower pull-off force than Si-wafer and Pull-off force increased with the tip radius.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.273-275
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• 1997

We fabricated the conventional silicon tips coated with a diamond-like carbon (DLC) film. The DLC films are prepared by the filtered cathodic vacuum arc (FCVA) technique. With increasing nitrogen content in DLC film, the work function($\phi$) and the turn-on voltage decrease and the emission current increases. This phenomenon is due to the fact that the Fermi-level moves to the conduction band by increasing nitrogen doping concentration. We have tested on the stability of the DLC film coated silicon tip during 2 hours at 500V.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.54-58
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• 1999

We deposited diamond-like carbon (DLC) films using ion beam sputtering of a graphite target on flat substrates for use as a thin film field emitter. An n-type silicon wafer, titanium-coated silicon, and indium tin oxide (ITO) coated glass were used as a substrate. All films exhibited a sudden increase in the emission after a breakdown occurred at high voltage. The morphology of the films after the breakdown depended on the substrate. On ITO and Ti substrates, the DLC film peeled off upon breakdown, but on the Si substrate the surface melting due to breakdown resulted in the formation of various structures such as a sharp point, mound, and crater. By scanning the deformed surface with a tip anode, we found that the emission was concentrated at the deformed sites, indicating that the field enhancement due to the morphology change was responsible for the increased emission.

• Journal of the Korean institute of surface engineering
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• v.52 no.3
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• pp.163-170
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• 2019

Durability of instrument is one of the most important factor to ensure accurate treatment and decrease failure for the orthopedic surgical operation. Normally, a set-screw driver tip has been processed with hard coating for their higher durability and wear resistance. And several surface modification methods were obtained such as titanium nitride (TiN) coating, diamond like carbon coating, other nitriding, and etc. In this study, we have surface modified on set-screw driver tip with TiN and DLC, investigated whether the TiN and DLC coatings affect the mechanical properties and durability of the set-screw driver tip in the pedicle screw system. The surface morphologies were observed with scanning-electron microscopy (SEM), and the static/dynamic torsional properties were investigated with universal testing machine based on ASTM F543. Coating thickness of each coatings were commonly around $1^{\circ}C$. Static torsional stiffness, and ultimate torque values for DLC and TiN coated samples were significantly higher than those of non-coated sample by the pared T-test. Surface morphology of after the dynamic torsional test was more clean with less scratch or friction traces from DLC coating than that of TiN coating and non-coated sample.

• Tribology and Lubricants
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• v.20 no.3
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• pp.125-131
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• 2004

Nano-wear behavior of amorphous carbon films was studied by Atomic Force Microscopy. The a-C films are deposited on Si(100) substrate by DC magnetron sputtering method. The influences of different surface roughness on the nano-wear are investigated. Nano-wear tests were carried out using a very sharp diamond coated tip. Its spring constant was 1.6 N/m and radius of curvature was 110 nm. Normal force used in the wear tests ranged 0 to 400 nN. It was found that surface depression occurred during scratching because of plastic deformation and abrasive wear (cutting St ploughing). Wear depth increased linearly with normal force. Changing the surface roughness variables according to the bias pulse control, the less surface roughness decreased the wear depth. The thickness did not affect the wear resistance.