• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.204-205
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• 2011

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is a most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. For best performance of thin film silicon solar cell, the dopant profiles at p/i and i/n interfaces need to be as sharp as possible. The sharpness of dopant profiles can easily achieved when using multi-chamber PECVD equipment, in which each layer is deposited in separate chamber. However, in a single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of a single-chamber PECVD system in spite of the advantage of lower initial investment cost for the equipment. In order to resolve the cross-contamination problem in single-chamber PECVD systems, flushing method of the chamber with NH3 gas or water vapor after doped layer deposition process has been used. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. A single-chamber VHF-PECVD system was used for superstrate type p-i-n a-Si:H solar cell manufacturing on Asahi-type U FTO glass. A 80 MHz and 20 watts of pulsed RF power was applied to the parallel plate RF cathode at the frequency of 10 kHz and 80% duty ratio. A mixture gas of Ar, H2 and SiH4 was used for i-layer deposition and the deposition pressure was 0.4 Torr. For p and n layer deposition, B2H6 and PH3 was used as doping gas, respectively. The deposition temperature was $250^{\circ}C$ and the total p-i-n layer thickness was about $3500{\AA}$. In order to remove the deposited B inside of the vacuum chamber during p-layer deposition, a high pulsed RF power of about 80 W was applied right after p-layer deposition without SiH4 gas, which is followed by i-layer and n-layer deposition. Finally, Ag was deposited as top electrode. The best initial solar cell efficiency of 9.5 % for test cell area of 0.2 $cm^2$ could be achieved by applying the in-situ plasma cleaning method. The dependence on RF power and treatment time was investigated along with the SIMS analysis of the p-i interface for boron profiles.

• 한국진공학회지
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• 제10권1호
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• pp.119-126
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• 2001

ECR-PECVD 방법으로 ECR 플라즈마 소스 power, $CH_4/H_2$ 가스 혼합비와 유량, 증착시간 및 기판 bias 전압을 변화시켜 가면서 수소가 함유된 비정질 탄소 박막을 증착하고, 증착조건에 따라서 박막 내부에 함유되어 있는 수소함량 변화를 2.5 MeV 헬륨 이온빔을 사용하는 ERDa로 측정하였다. ERDA의 결과와 hES 및 RBS에 의한 성분분석으로부터 본 실첨에서 증착된 박막은 탄소와 수소만으로 구성 되어있음을 확인할 수 있었고, FTIR의 결과로부터 박막 증착조건에 따라서 박막 내부에 함유되어 있는 수소함량이 변화함을 알 수 있었다. 기판 bias 전압을 증가시킬수록 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 현상으로 수소함량이 크게 감소됨을 알 수 있었다. 그 밖의 조건에서는 박막증착 초기에는 수소보다 탄소량이 좀 더 많다가 점차적으로 수소함량이 증가되었고, 이때 박막 내부에 함유되어 있는 수소함량은 45~55% 범위 내에 있음을 확인할 수 있었다.

• 한국해양환경ㆍ에너지학회지
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• 제16권3호
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• pp.163-170
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• 2013

본 논문에서는 낙동강 하구역 진우도 자연해빈을 대상으로 해안표착물과 식생대 전선의 상관성 및 상호거동에 대하여 연구하였다. 해안표착물과 식생대 주변의 비사에 의한 퇴적 특성을 고찰하기 위해 현장 바람과 바닥조건을 고려하여 실내 풍동실험을 수행하였다. 본 연구에서 고려하는 주요 영향은 해안표착물과 식생대 주변의 바람에 의한 모래의 퇴적현상이다. 해안표착물에 대한 실험결과로서, 모형 전면부터 퇴적되고 퇴적된 높이가 모형의 70% 정도 퇴적되었을 때 모형 후면이 퇴적되는 양상이 나타났다. 이에 반해, 식생을 대상으로 한 실험에서는 모형 전면보다 후면이 먼저 퇴적되고, 후면이 전면보다 60%정도 더 높게 쌓이는 양상이 나타났다.

• 한국농공학회지
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• 제17권3호
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• pp.3840-3847
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• 1975

With 30 excisting reservoirs in the Chin-Young area, the Sedimentation of the reservoirs has been calculated by comparing the present capacity with the original value, which revealed its reduced reservoir capacity. The reservoirs has a total drainage area of 3l4l ha, with a total capacity of 43.23 ha-m, and are short of water supply due to reduction of reservoir capacity, Annual sedimentation in the reservoir is relation to the drainage area, the mean of annual rainfall, and the slop of drainage area. The results of obtained from the investigation are summarized as follows: (1) A Sediment deposition rate is high, being about 7.03㎥/ha of drainage area, and resulting in the overage decrease of reservoir capacity by 16.1%. This high rate of deposition coule be mainly attributed to the serve denudation of forests due to disorderly cuttings of tree. (2) An average unit storageof 116mm as the time of initial construction is decreased to 95.6mm at present. This phenomena cause a greater storage of irrigation water, sinceit was assumed that original storage quantity itself was already in short. (3) A sediment deposition rate as a relation to the capacity of unit drainge area is as follow: Qs=1.27(C/A)0.6 and standard deviation is 185.5㎥/$\textrm{km}^2$/year. (4) A sediment deposition rate as a relation to the mean of annual rainfall is as follow: Qs=21.9p10.5 and the standard deviation is 364.8㎥/$\textrm{km}^2$/year. (5) A sediment deposition rate as a relation to the mean slop of drainage area is follow: Qs=39.6S0.75 and the standard deviation is 190.2㎥/$\textrm{km}^2$/year (6) Asediment deposition rate as a relation to the drainage area, mean of rainfall, mean of slope of drainage area is: Log Qs=0.197+0.108LogA-6.72LogP+2.20LogS and the standard deviation is 92.4㎥/$\textrm{km}^2$/year

• Journal of Radiation Protection and Research
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• 제23권4호
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• pp.243-249
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• 1998

원자력 사고 후 우유에 대한 비상대응방법론을 비용/편익 분석법에 근거하여 고안하였다. 목초의 왕성한 성장시기인 8월 15일을 방사성물질의 침적시점(사고시점)으로 가정하여 지표위 방사성물질의 농도, 침적 후 대응행위의 시작시점과 수행기간의 함수로써 적용결과를 논의하였다. 침적 후 우유내 방사성물질의 농도는 동적섭식경로모델 DYNACON으로부터 예측되었다 대응행위로는 침적 후 첫해에 피폭을 효과적으로 줄일 수 있고 수행하기 용이한 섭취금지와 비오염 사료대체가 고려되었다. 대응행위 수행에 따른 총비용은 피폭부담과 금전비용의 합으로 평가하였다. 침적 후 신속한 대응은 소요되는 금전비용에 대한 피폭저감 측면에서 중요한 변수였다. 많은 경우 비오염 사료대체는 섭취금지보다 비용측면에서 효과적인 대응행위였다. 대응행위를 빨리 취할수록 대응행위의 정당화 및 최적기간은 증가하였다.

• 한국환경과학회:학술대회논문집
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• 한국환경과학회 1997년도 가을 학술발표회 프로그램
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• pp.1.1-32
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• 1997

Atmospheric monitoring capabilities were established in 1988 by the University of Florida at Duke forest, near Durham. NC: Cary forest, near Gainesville, FL: and Austin forest, near Nacogdoches, TX. Continuous (hourly averaged) measurements of air quality (ozone, nitrogen oxides and sulfur dioxide) and meteorological variables were made at these three low elevation (< 200 meters), rural locations in the southeastern U.S. for more than three years. During the same period at these sites wet and dry acid deposition samples were collected and analyzed on an event and weekly basis, respectively The monitoring locations were selected to determine actual atmospheric exposure indices for southern pine species in support of on-site surrogate exposure chamber studies conducted by Southern Commercial Forest Research Cooperative (SCFRC) investigators. Daily and quarterly averaged ozone maxima were higher (55 ppb) at the northernmost site in the network (Duke forest) in the second and third quarters (spring and summer seasons) and lower (35 ppb) in the first and fourth quarters (winter and fall seasons), when compared to ozone levels at the two southernmost sites (Cary and Austin forests). Seasonal ozone levels at the latter two sites were similar Nitrogen oxieds and sulfur dioxide levels were insignificant (< 5 ppb) most of the time at all sites, although soil emissions of NO at two sites were found to influence nighttime ozone concentrations. Typical maximum quarterly and annual aggregate ozone exposure indices were significantly higher at Duke forest (92.5/259 ppm-hr) than those values observed at the two southern sites (65.6/210 ppm-hr). Acid deposition (wet and dry) components concentrations and deposition fluxes observed at the Duke forest, NC piedmont site, were generally greater, dependent on site and season, than corresponding variables measured at either of the two southern coastal plain sites (Cary and Austin forests). Acid deposition variables observed at the latter two sites were remarkably similar, both qualitatively and quantitatively, although the sites were located 1300 km apart. A comparison of deposition fluxes of elemental nitrogen (NO3, NH4') and sulfur (5042-, SO3) components in wet and dry forms indicated that wet deposition accounts for approximately 70% of the total nitrogen and 73% of the total sulfur input on an annual equivalent basis at all sites.

• 자원환경지질
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• 제20권1호
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• pp.1-18
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• 1987

The Cheolam silver deposits are emplaced along the fractures in breccia dike and the Hongjesa granite. Breccia dike contains fragments of late Cretaceous acidic volcanic rocks and other fragments of various rocks distributed in the mine area. Therefore it is presumed that the mineralization was taken place in later than late Cretaceous time. Mineral paragenesis is complicated by multiple episodes of fracturing. Six distinct depositional stages can be recognized: stage I, deposition of base metal sulfides; stage II, deposition of base metal sulfides and silver minerals; stage III, deposition of carbonates; stage IV, deposition of silver minerals and base metal sulfides; stage V, deposition of silver minerals; stage VI, deposition of barren quartz. Silver minerals from the deposits are native silver, acanthite, pyrargyrite, argentian tetrahedrite, stephanite, polybasite, pearceite, allargentum, antimonial silver and electrum. Fluid inclusion studies ware carried out for stage I, II, IV and VI quartz and stage III calcite. Homogenization temperatures for each stage are as follows: stage I, from $225^{\circ}$ to $360^{\circ}C$; stage II, from $145^{\circ}$ to $220^{\circ}C$; stage III, from $175^{\circ}$ to $240^{\circ}C$; stage IV, from $130^{\circ}$ to $185^{\circ}C$; stage VI, from $120^{\circ}$ to $145^{\circ}C$. Salinities of ore fluids were in the range of 4 and 10 wt.% equivalent NaCl over stage I and stage VI. Ore mineralogical data of each stage indicate that temperatures are within the range of homogenization temperature of fluid inclusions and sulfur fugacities declined steadily from $10^{-9.7}atm$. to $10^{-18.7}atm$. through stage I into stage V.

• 한국측량학회지
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• 제34권2호
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• pp.153-159
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• 2016

Rivers refer to either natural or artificial structures whose primary functions are flood control and water conservation. Due to recent localized torrential downpours led by climate change, large amounts of eroded soil have been carried away, forming deposits downstream, which in turn degrades the capacity to fulfill these functions. To manage rivers more effectively, we need data on riverbed erosion and deposition. However, environmental factors make it challenging to take measurements in rivers, and data errors tend to prevent researchers from grasping the current state of erosions and deposits. In this context, the aim of the present study is to provide basic data required for river management. To this end, the author made annual measurements with a Real-time Kinematic-Global Positioning System (RTK-GPS) and a total station in Pats Cabin Canyon, Oregon, United States, and also prepared thematic maps of erosion and deposition thickness as well as water depth profiles based on a GIS spatial analysis. Furthermore, the author statistically analyzed the accuracy of three dimensional (3D) measurement points and only used the data that falls within two standard deviations (i.e. ±2σ). In addition, the author determined a threshold for a DEM of Difference (DoD) by installing measurement points in the rivers and taking measurements, and then estimated erosion and deposition thickness within a confidence interval of ±0.1m. Based on the results, the author established reliable data on river depth profiles and thematic maps of erosion and deposition thickness using pre-determined work flows. It is anticipated that the riverbed data can be utilized for effective river management.

• 한국광학회지
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• 제4권3호
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• pp.266-275
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• 1993

Si 기판 위에 low pressure chemical vapor deposition 방법에 의해 TEOS (tetraethylorthosilicate)와 TMPite (trimethylphosphite)를 재료로하여 집적광학용 $P_2O_5-SiO_2$ 박막을 만들고 그 특성을 조사하였다. TEOS의 반응에 TMPite가 참여함으로서 반응활성화에너지는 54.6 kcal/mole에서 39.2 kcal/mole로 크게 낮아졌으며 박막의 증착속도와 P 농도는 TMPite의 유량에 비례하여 증가하였다. 또한 증착온도가 높을스록 박막의 증착속도는 증가하나 P 농도는 감소하였다. 제작된 박막의 굴절률은 P 농도 1wt% 당 0.0019로 P 농도에 비례하여 증가하였다. 측정된 박막 불균일도는 두께 ${\pm}$7% 및 P 농도 ${\pm}$0.5wt% 정도로서 이러한 불균일성은 주로 TMPite의 불균일한 수송에 기인함을 보였다. 또한 P 농도가 10wt% 이상인 박막을 대기중에 장시간 노출하면 표면에 인산이 석출됨을 확인하였다.

• 한국재료학회지
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• 제23권12호
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• pp.680-686
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• 2013

Tungsten oxide films were prepared by an electrochemical deposition method for use as the anode in rechargeable lithium batteries. Continuous potentiostatic deposition of the film led to numerous cracks of the deposits while pulsed deposition significantly suppressed crack generation and film delamination. In particular, a crack-free dense tungsten oxide film with a thickness of ca. 210 nm was successfully created by pulsed deposition. The thickness of tungsten oxide was linearly proportional to deposition time. Compositional and structural analyses revealed that the as-prepared deposit was amorphous tungsten oxide and the heat treatment transformed it into crystalline triclinic tungsten oxide. Both the as-prepared and heat-treated samples reacted reversibly with lithium as the anode for rechargeable lithium batteries. Typical peaks for the conversion processes of tungsten oxides were observed in cyclic voltammograms, and the reversibility of the heat-treated sample exceeded that of the as-prepared one. Consistently, the cycling stability of the heat-treated sample proved to be much better than that of the as-prepared one in a galvanostatic charge/discharge experiment. These results demonstrate the feasibility of using electrolytic tungsten oxide films as the anode in rechargeable lithium batteries. However, further works are still needed to make a dense film with higher thickness and improved cycling stability for its practical use.