• Bulletin of the Korean Chemical Society
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• 제34권2호
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• pp.519-523
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• 2013

When atomic layer deposition (ALD) is performed on a porous material by using an organometallic precursor, minimum exposure time of the precursor for complete coverage becomes much longer since the ALD is limited by Knudsen diffusion in the pores. In the previous report by Min et al. (Ref. 23), shrinking core model (SCM) was proposed to predict the minimum exposure time of diethylzinc for ZnO ALD on a porous cylindrical alumina monolith. According to the SCM, the minimum exposure time of the precursor is influenced by volumetric density of adsorption sites, effective diffusion coefficient, precursor concentration in gas phase and size of the porous monolith. Here we modify the SCM in order to consider undesirable adsorption of byproduct molecules. $TiO_2$ ALD was performed on the cylindrical alumina monolith by using titanium tetrachloride ($TiCl_4$) and water. We observed that the byproduct (i.e., HCl) of $TiO_2$ ALD can chemically adsorb on adsorption sites, unlike the behavior of the byproduct (i.e., ethane) of ZnO ALD. Consequently, the minimum exposure time of $TiCl_4$ (~16 min) was significantly much shorter than that (~71 min) of DEZ. The predicted minimum exposure time by the modified SCM well agrees with the observed time. In addition, the modified SCM gives an effective diffusion coefficient of $TiCl_4$ of ${\sim}1.78{\times}10^{-2}\;cm^2/s$ in the porous alumina monolith.

• 한국농공학회논문집
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• 제59권4호
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• pp.1-15
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• 2017

Eutrophication of surface waters is of concern worldwide, because it can result in many undesirable water-quality and ecological problems, such as hypoxic 'dead' zones and harmful algal blooms, both associated with considerable economic costs. In this study, we used LSM (Land Surface Model) to simulate nitrogen in five major rivers in the Southern Korean Peninsula. The main objective of this research was to enhance nitrogen data for input of LM3V model in South Korea. Input data for nitrogen fluxes were categorized into three sections including agriculture fertilizer, livestock manure, atmosphere deposition, biological fixation, and sewage pollutants were used as the nitrogen input. For using LM3V model, the nitrogen input data were regenerated by considering states of agriculture and industry in South Korea at a $1/8^{\circ}$ resolution. Then, we simulated stream/river flows and N loads throughout the entire drainage networks in South Korea at a $1/8^{\circ}$ resolution. By using the same parameters for the entire country ($100,210km^2$), composed of 5 river basins with varying climate and land use, the model simulates spatial (11 sites) and temporal (1999~2010) patterns of flows and nitrate-N loads are resonable by comparing observed flow and nitrate-N loads. The r (Pearson's linear correlation) for water temperature, flow and nitrate-N at river were 080~0.93, 0.62~0.92 and 0.5~0.9 respectively. Based on enhanced N input data and model results, we find that LM3V model as land surface model can be applied in South Korea with interaction of atmosphere and land conditions.

• 한국정보과학회논문지:컴퓨팅의 실제 및 레터
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• 제14권8호
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• pp.818-822
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• 2008

본 논문에서는 가상환경에서 페인트를 분사하여 시간으로 물체를 도색 하는 시뮬레이션을 위한 충돌처리 및 시각화 알고리즘을 제시한다. 이를 통하여 물체에 페인트가 뿌려지면서 도색 되는 모습을 사실적으로 표현해 줄뿐만 아니라, 페인트 누적 모델을 이용하여 물체에 누적된 페인트의 두께 정보까지 시뮬레이션 하여 시각화함으로써 가상훈련 시스템에 적용할 수 있도록 한다. 분사되는 유체시뮬레이션을 위해서 기존에는 파티클 시스템이 이용되고 있으나 실시간으로 도색이 되는 과정을 시각화하기 위해서는 수백만 개의 파티클에 대하여 충돌 검사를 수행해야 하기 때문에 적절하지 않다. 따라서 본 연구에서는 소수의 레이와 텍스처 기법을 이용하여 효율적으로 충돌 검사를 수행하는 알고리즘을 제안하고 이를 구현하였으며 실시간 페인트 시뮬레이션 구현 결과와 수행 시간 분석을 통하여 알고리즘의 효율성을 검증하였다.

• 한국항만학회지
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• 제14권4호
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• pp.451-461
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• 2000

The design and maintenance of navigation channel and water facilities of an harbor which is located at the mouth of river or at the estuary area are difficult due to the complexity of estuarial water and sediment circulation. Effects of deepening navigable waterways, of changing coastline configurations, or of discharging dredged material to the open sea are necessary to be investigated and predicted in terms of water quality and possible physical changes to the coastal environment. A borad analysis of the transport mechanism in the estuary area was made in terms of sediment property, falling velocity, concentration and flow characteristics. In order to simulate the transport processes, a two-dimensional finite element model is developed, which includes erosion, transport and deposition mechanism of suspended sediments. Galerkin’s weighted residual method is used to solve the transient convection-diffusion equation. The fluid domain is subdivided into a series of triangular elements in which a quadratic approximation is made for suspended sediment concentration. Model could deal with a continuous aggregation by stipulating the settling velocity of the flocs in each element. The model provides suspended sediment concentration, bed shear stress, erosion versus deposition rate and bed profile at the given time step.

• 반도체디스플레이기술학회지
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• 제18권2호
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• pp.48-52
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• 2019

Virtual metrology, which is one of APC techniques, is a method to predict characteristics of manufactured films using machine learning with saving time and resources. As the photoresist is no longer a mask material for use in high aspect ratios as the CD is reduced, hard mask is introduced to solve such problems. Among many types of hard mask materials, amorphous carbon layer(ACL) is widely investigated due to its advantages of high etch selectivity than conventional photoresist, high optical transmittance, easy deposition process, and removability by oxygen plasma. In this study, VM using different machine learning algorithms is applied to predict the thickness of ACL and trained models are evaluated which model shows best prediction performance. ACL specimens are deposited by plasma enhanced chemical vapor deposition(PECVD) with four different process parameters(Pressure, RF power, $C_3H_6$ gas flow, $N_2$ gas flow). Gradient boosting regression(GBR) algorithm, random forest regression(RFR) algorithm, and neural network(NN) are selected for modeling. The model using gradient boosting algorithm shows most proper performance with higher R-squared value. A model for predicting the thickness of the ACL film within the abovementioned conditions has been successfully constructed.

• 한국표면공학회지
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• 제19권2호
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• pp.51-58
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• 1986

A theoretical model was proposed to predict the rate of particles impinging on the negatively biased substrate and the total kinetic energy per unit time. The model takes into an account of kinetic theory based on Maxwell statistics and elementary plasma theory, incorporated with Hertz-Knudsen's evaporation theory. It is found that as the bias potential increases the ion flux and kinetic energy increases to a value above which the effect of potential is insignificant.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.58-59
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• 2006

In Spray Forming, specific enthalpy is a key parameter in the deposition process as it influences the thermal condition of the impinging droplets as well as that of the deposit surface. An empirical model for the distribution of specific enthalpy in the spray cone was developed as an easy to handle alternative to numerical models with which the descriptive partial differential equations are solved numerically. The model results were compared with the experimental data to validate its applicability.

• 한국표면공학회지
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• 제33권4호
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• pp.261-265
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• 2000

Geometrically and chemically well defined Pt/alumina model catalysts have been prepared. To this end, we fabricated electrochemically alumina supports in which pores of constant size, length and shape were regularly distributed over a wide area of the surface. Platinum particles were dispersed on the pore surfaces via organometallic chemical vapor deposition technique using (trimethyl) methylcyclopentadienylplatinum (IV) as a precursor. The chemical composition of the alumina plane surfaces was examined by Auger electron spectroscopy and the adsorption characteristics of the platinum particles were studied by thermal desorption spectroscopy. A variety of industrial catalytic problems are now open for further investigation utilizing the Pt/alumina model catalysts.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.245-245
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• 2012

Syntheses of oxide supported metal catalysts by wet-chemical routes have been well known for their use in heterogeneous catalysis. However, uniform deposition of metal nanoparticles with controlled size and shape on the support with high reproducibility is still a challenge for catalyst preparation. Among various synthesis methods, arc plasma deposition (APD) of metal nanoparticles or thin films on oxide supports has received great interest recently, due to its high reproducibility and large-scale production, and used for their application in catalysis. In this work, Au and Pt nanoparticles with size of 1-2 nm have been deposited on titania powder by APD. The size of metal nanoparticles was controlled by number of shots of metal deposition and APD conditions. These catalytic materials were characterized by x-ray diffraction (XRD), inductively coupled plasma (ICP-AES), CO-chemisorption and transmission electron microscopy (TEM). Catalytic activity of the materials was measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. We found that Au/$TiO_2$ is reactive, showing 100% conversion at $110^{\circ}C$, while Pt/$TiO_2$ shows 100% conversion at $200^{\circ}C$. High activity of metal nanoparticles suggests that APD can be used for large scale synthesis of active nanocatalysts. We will discuss the effect of the structure and metal-oxide interactions of the catalysts on catalytic activity.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.54-54
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• 2018

To optimize the deposition parameters of diamond films, the temperature, pressure, and distance between the filament and the susceptor need to be considered. However, it is difficult to precisely measure and predict the filament and susceptor temperature in relation to the applied power in the hot filament chemical vapor deposition (HFCVD) system. In this study the temperature distribution inside the system was numerically calculated for the applied powers of 12, 14, 16 and 18 kW. The applied power needed to achieve the appropriate temperature at a constant pressure and other conditions was deduced, and applied to actual experimental depositions. The numerical simulation was conducted using the commercial computational fluent dynamics software, ANSYS-FLUENT. To account for radiative heat-transfer in the HFCVD reactor, the discrete ordinate (DO) model was used. The temperatures of the filament surface and the susceptor at different power levels were predicted to be 2512 ~ 2802 K, and 1076 ~ 1198 K, respectively. Based on the numerical calculations, experiments were performed. The simulated temperatures for the filament surface were in good agreement with experimental temperatures measured using a 2-color pyrometer. The results showed that the highest deposition rate and the lowest deposition of non-diamond was obtained at a power of 16 kW.