• Title/Summary/Keyword: deposition equipment

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System Configuration of Ultrasonic Nuclear Fuel Cleaner and Quantitative Weight Measurement of Removed CRUD (초음파 핵연료 세정장비의 시스템 구성과 제거된 크러드의 정량적 무게 측정법)

  • Jung Cheol Shin;Hak Yun Lee;Un Hak Seong;Yeong Jong Joo;Yong Chan Kim;Wook Jin Han
    • Transactions of the Korean Society of Pressure Vessels and Piping
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    • v.20 no.1
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    • pp.1-6
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    • 2024
  • Crud is a corrosion deposit that forms in equipments and piping of nuclear reactor's primary systems. When crud circulates through the reactor's primary system coolant and adheres to the surface of the nuclear fuel cladding tube, it can lead to the Axial Offset Anomaly (AOA) phenomenon. This occurrence is known to potentially reduce the output of a nuclear power plant or to necessitate an early shutdown. Consequently, worldwide nuclear power plants have employed ultrasonic cleaning methods since 2000 to mitigate crud deposition, ensuring stable operation and economic efficiency. This paper details the system configuration of ultrasonic nuclear fuel cleaning equipment, outlining the function of each component. The objective is to contribute to the local domestic production of ultrasonic nuclear fuel cleaning equipment. Additionally, the paper introduces a method for accurately measuring the weight of removed crud, a crucial factor in assessing cleaning effectiveness and providing input data for the BOA code used in core safety evaluations. Accurate measurement of highly radioactive filters containing crud is essential, and weighing them underwater is a common practice. However, the buoyancy effect during underwater weighing may lead to an overestimation of the collected crud's weight. To address this issue, the paper proposes a formula correcting for buoyancy errors, enhancing measurement accuracy. This improved weight measurement method, accounting for buoyancy effects in water, is expected to facilitate the quantitative assessment of filter weights generated during chemical decontamination and system operations in nuclear power plants.

Robust Design for Showerhead Thermal Deformation

  • Gong, Dae-Wi;Kim, Ho-Jun;Lee, Seung-Mu;Won, Je-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.150.1-150.1
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    • 2014
  • Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

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Investigation about the Actual Prevention of Infection and Vaccination against B-type Hepatitis among Dental Workers in Daegu (대구지역 치과 의료기관 종사자의 B형간염 예방접종 및 감염관리 실태)

  • Eun, Jeong-Hwa;Bae, Ji-Young
    • Journal of Korean society of Dental Hygiene
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    • v.5 no.2
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    • pp.219-233
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    • 2005
  • This study was conducted on 185 workers at 73 dental clinics and university hospitals in Daegu to investigate the actual prevention of infection and vaccination against B-type hepatitis among dental workers. 1. According to the result of medical examination, only 35 out of 144 (24%) dental clinic workers had periodic health examination while 7 out of 9 (78%) university hospital workers did. 2. In a survey on vaccination against B-type hepatitis, 52 workers aged 29 or younger (96.3%), 38 dental hygienists (51.9%) and 44 dental workers at dental clinics (81.5%) have not had any vaccination against B-type hepatitis. The rest appeared to have had vaccination or be aware that they had antibody against B-type hepatitis without having to have any vaccination. 3. According to the result of a survey on the existence of antibody by job, 42 (56%) of dental hygienists, 15 (20%) of assistant nurses, 12 (16%) of medical assistants and 6 (8%) of dental technicians did not know whether or not they had antibody. This suggests that all types of dental workers except dental hygienists have low awareness of whether or not they have antibody. 4. In a survey on the relation between general characteristics of subjects and the sterilization of dental equipment, alcohol disinfection of high speed handpiece and low speed handpiece was most common among dental workers aged 29 or younger, and all of those aged over 40 used autoclave. By position, alcohol disinfection was used most commonly for high-speed handpiece. antiseptic solution deposition for disposable suction lips, and autoclaving for impression. By workplace, dental workers at university hospitals used autoc1aving most frequently for high/low speed handpiece while those at dental hospitals and dental clinics used alcohol disinfection most frequently and even some respondents replied that they did not disinfect. For metal cups, workers at dental clinics and dental hospitals did not use any sterilizing method while those at university hospitals used autoclaving. For disposable suction tips, workers at dental clinics used antiseptic solution deposition and those at dental hospitals used alcohol disinfection but some respondents replied that they did not disinfect. For metal suctions and impression trays, autoclaving was most common in all workplaces but some dental clinics replied that they did not disinfect impression trays. According to work experience, alcohol disinfection was most common for high/low speed handpiece. For disposable suction tips, dental workers with 3 years' or shorter work experience, those with 3~6 years' experience and those with 9~12 years' experience used antiseptic solution deposition most commonly, and many of those with 6~9 years replied that they did not disinfect. The results of this study stated above suggest that systematic education is necessary for all dental workers for enhancing th eir awareness of B-type hepatitis and the prevention of infection. Moreover, dental workers are required to make efforts to prevent infection with B-type hepatitis voluntarily and actively.

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Sol-gel deposited TiInO thin-films transistor with Ti effect

  • Kim, Jung-Hye;Son, Dae-Ho;Kim, Dae-Hwan;Kang, Jin-Kyu;Ha, Ki-Ryong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.200-200
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    • 2010
  • In recent times, metal oxide semiconductors thin films transistor (TFT), such as zinc and indium based oxide TFTs, have attracted considerable attention because of their several advantageous electrical and optical properties. There are many deposition methods for fabrication of ZnO-based materials such as chemical vapor deposition, RF/DC sputtering and pulsed laser deposition. However, these vacuum process require expensive equipment and result in high manufacturing costs. Also, the methods is difficult to fabricate various multicomponent oxide semiconductor. Recently, several groups report solution processed metal oxide TFTs for low cost and non vacuum process. In this study, we have newly developed solution-processed TFTs based on Ti-related multi-component transparent oxide, i. e., InTiO as the active layer. We propose new multicomponent oxide, Titanium indium oxide(TiInO), to fabricate the high performance TFT through the sol-gel method. We investigated the influence of relative compositions of Ti on the electrical properties. Indium nitrate hydrate [$In(NO^3).xH_2O$] and Titanium isobutoxide [$C_{16}H_{36}O_4Ti$] were dissolved in acetylacetone. Then monoethanolamine (MEA) and acetic acid ($CH_3COOH$) were added to the solution. The molar concentration of indium was kept as 0.1 mol concentration and the amount of Ti was varied according to weighting percent (0, 5, 10%). The complex solutions become clear and homogeneous after stirring for 24 hours. Heavily boron (p+) doped Si wafer with 100nm thermally grown $SiO_2$ serve as the gate and gate dielectric of the TFT, respectively. TiInO thin films were deposited using the sol-gel solution by the spin-coating method. After coating, the films annealed in a tube furnace at $500^{\circ}C$ for 1hour under oxygen ambient. The 5% Ti-doped InO TFT had a field-effect mobility $1.15cm^2/V{\cdot}S$, a threshold voltage of 4.73 V, an on/off current ratio grater than $10^7$, and a subthreshold slop of 0.49 V/dec. The 10% Ti-doped InO TFT had a field-effect mobility $1.03\;cm^2/V{\cdot}S$, a threshold voltage of 1.87 V, an on/off current ration grater than $10^7$, and a subthreshold slop of 0.67 V/dec.

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Study on Property of Diamond Mobile Telephone Windows

  • Lin, Liu-Tie;Sheng, Yang-Guang;Wu, Zhou-Jian;Ning, Sun-Yi
    • Journal of Korean Vacuum Science & Technology
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    • v.6 no.2
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    • pp.105-107
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    • 2002
  • a-C:H films were coated on windows of mobile telephone by RF plasma chemical vapor deposition equipment made in our company. Thickness of the coatings is about 0.7 micrometers and they have high hardness, low friction coefficient, good adhesion, high optical transparency and chemical inertness. Knoop hardness of the diamond-like carbon films on glass substrate is 2328 kg/mm$^2$. The adherence between films and substrate is good and shows to be 69 N by scratching test. The optical performance is improved obviously owing to coat the film on it. The index of the coated windows is 2.5, transmission of visible light is larger than 90%, and transmission of ultraviolet light decreases by 30% and the ultraviolet light can be obstructed obviously. The coated glass also has self-clean effect and decontamination ability. The films have hydrophobic character and the soakage angle of water drop is larger than 90 degrees. The windows have fog-proof ability owing to eliminate the capillary phenomena in the inner surface. The physics and chemical properties of the coated windows are steady. Study indicates that the performance of a-C:H coated mobile phone windows are improved notably on wear-resistance, corrosion-proof and optical properties and it is excellent mobile windows protective coatings.

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Influence of Substrate on Mechanical Characteristics of ZnO Thin Film by NI Technology (NI법에 의한 기계적 특성에 미치는 ZnO박막의 기판재의 영향)

  • Jung Hun-Cbae;KIM Dong-Hyun;Yoon Han-Ki;Lim Hee-Sup;Yu Yun-Sik
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2004.05a
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    • pp.342-346
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    • 2004
  • Recently there has been a great world-wide interest in developing and characterizing new nano-structured materials. These newly developed materials are often prepared in limited quantities and shapes unsuitable for the extensive mechanical testing. The development of depth sensing indentation methods have introduced the advantage of load and depth measurement during the indentation cycle. In the present work, ZnO thin films are prepared on the Glass, GaAs(100), Si(111), and Si(100) substrates at different temperatures by pulsed laser deposition(PLD) method. Because the potential energy in c-axis is law, the films always shaw c-axis orientation at the optimized conditions in spite of the different substrates. Thin films are investigated by X-ray diffractometer and Nano indentation equipment. From these measurements it is possible to get elastic modulus and hardness of ZnO thin films on all substrates.

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Analysis the depth effect of organic pollutants and heavy metals using biostimulant ball in contaminated coastal sediments (해양오염저질의 오염물질 정화를 위한 생물활성촉진제 투여 깊이 연구)

  • Song, Young-chae;Woo, Jung-Hui;Subha, Bakthavachallam
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2015.07a
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    • pp.177-178
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    • 2015
  • Sediments play a major role in determining pollution pattern in aquatic systems and reflecting the pollutant deposition. In the present study analysis the depth effect of organic pollutants and heavy metals using slow release biostimulant ball (BSB) in coastal sediment. BSB size fixed at 3cm, depth varied from 0cm to 10cm depth and 1 and 3 month interval period was carried out for the study. The organic pollutants of chemical oxygen demand, total solids and volatile solids were significantly changed at the surface sediment (0cm)in 1 month and 3 month interval time using BSB. In contrast, sediment depth increase upto 10cm the reduction percentage decrease like to control. Vertical distribution of heavy metals are not consistent from the surface layer toward the bottom layers. Heavy metals fractions were significantly changes, the exchangeable fraction was reduced and other organic and residual fractions were stabilized percentage are increased. This finding concluded BSB is effective for reduce organic pollutants, heavy metals stabilization from the contaminated sediment.

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Compatibility Assessment of Copper Alloy and Hydrocarbon Fuel for Regeneratively Cooled Combustion Chamber (재생냉각 연소기용 구리합금과 연료 적합성 검증시험)

  • Lim Byoung-Jik;Kim Jong-Gyu;Kang Dong-Hyuk;Kim Hong-Jip;Kim Hui-Tae;Han Yeoung-Min
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2006.05a
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    • pp.100-109
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    • 2006
  • In the regeneratively cooled combustion chambers using hydrocarbon fuels, coking occurs as the wall temperature increases which generates compounds deposition on the wall. This phenomenon reduces cooling capability of the coolant, finally it can cause damage to combustor by overheating of chamber wall. In this paper electrical heating equipment which is used for the coking experiments and the test results are introduced. The compatibilities of copper alloy with let A-1 were assessed at each condition based on the test results.

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Performance of FBAR devices was enhanced by fabrication of ZnO buffer layer and improvement of c-axis orientation (ZnO buffer layer 제작과 c-축 배향성 향상으로 인한 FBAR 성능 개선에 관한 연구)

  • Lee, Soon-Bum;Park, Sung-Hyun;Kwon, Sang-Jik;Lee, Neung-Heon;Shin, Young-Hwa
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.249-250
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    • 2006
  • In this study, we tried to Improve c-axis orientation of ZnO thin films used in a piezoelectric layer of FBAR devices. First. ZnO deposition conditions were determined by changing various conditions of RF sputter such as RF power, pressure and $O_2$ contents. The Piezoelectric layer was deposited on ZnO buffer layer of dense structure which was formed by ALD equipment. The c-axis orientation of ZnO piezoelectric layer was measured by XRD and we confirmed fine Grains and columnar structure by SEM, AFM.

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Inactivation of Legionella pneumophila by Electrochemical Disinfection (전기화학적 소독에 의한 Legionella pneumophila 불활성화)

  • Park, Young-Seek;Kim, Dong-Seog
    • Journal of Korean Society on Water Environment
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    • v.23 no.5
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    • pp.613-619
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    • 2007
  • This study has carried out a performance of dimensionally stable anode for the purpose of disinfection of Legionella pneumophila in water. Three kinds of electrode were prepared by plating and thermal deposition, which were coated by the oxides of Pt, Ru and Ir on Ti metal surface, respectively. The order of disinfection performance for Legionella pneumophila was Ru/Ti > Ir/Ti > Pt/Ti. Free Cl and $ClO_2$ generation of Ir/Ti electrode was higher than that of two electrodes. However, the concentrations of generated $H_2O_2$ and $O_3$ of the Ru/Ti electrode were highest among the three electrodes. The higher NaCl concentration was, the more oxidants was generated and disinfection effect was increased. However, optimum NaCl dosage was 0.0125% due to the regulation on the conductivity and $Cl^-$ concentration for the cooling water quality of air conditioning and refrigeration equipment. With the increase of current, oxidants was more generated and following disinfection effect was increased. The increase of electrode distance reduced oxidants generation due to the low electric power, and their disinfection effect was decreased accordingly.