• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.310-310
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• 2016

최근 NAND flash memory는 높은 집적성과 데이터의 비휘발성, 낮은 소비전력, 간단한 입, 출력 등의 장점들로 인해 핸드폰, MP3, USB 등의 휴대용 저장 장치 및 노트북 시장에서 많이 이용되어 왔다. 특히, 최근에는 smart watch, wearable device등과 같은 차세대 디스플레이 소자에 대한 관심이 증가함에 따라 유연하고 투명한 메모리 소자에 대한 연구가 다양하게 진행되고 있다. 대표적인 플래시 메모리 소자의 구조로 charge trapping type flash memory (CTF)가 있다. CTF 메모리 소자는 trap layer의 trap site를 이용하여 메모리 동작을 하는 소자이다. 하지만 작은 window의 크기, trap site의 열화로 인해 메모리 특성이 나빠지는 문제점 등이 있다. 따라서 최근, trap layer에 다양한 물질을 적용하여 CTF 소자의 문제점을 해결하고자 하는 연구들이 진행되고 있다. 특히, 산화물 반도체인 zinc oxide (ZnO)를 trap layer로 하는 CTF 메모리 소자가 최근 몇몇 보고 되었다. 산화물 반도체인 ZnO는 n-type 반도체이며, shallow와 deep trap site를 동시에 가지고 있는 독특한 물질이다. 이 특성으로 인해 메모리 소자의 programming 시에는 deep trap site에 charging이 일어나고, erasing 시에는 shallow trap site에 캐리어들이 쉽게 공급되면서 deep trap site에 갇혀있던 charge가 쉽게 de-trapped 된다는 장점을 가지고 있다. 따라서, 본 실험에서는 산화물 반도체인 ZnO를 trap layer로 하는 CTF 소자의 메모리 특성을 확인하기 위해 간단한 구조인 metal-oxide capacitor (MOSCAP)구조로 제작하여 메모리 특성을 평가하였다. 먼저, RCA cleaning 처리된 n-Si bulk 기판 위에 tunnel layer인 SiO2 5 nm를 rf sputter로 증착한 후 furnace 장비를 이용하여 forming gas annealing을 $450^{\circ}C$에서 실시하였다. 그 후 ZnO를 20 nm, SiO2를 30 nm rf sputter로 증착한 후, 상부전극을 E-beam evaporator 장비를 사용하여 Al 150 nm를 증착하였다. 제작된 소자의 신뢰성 및 내구성 평가를 위해 상온에서 retention과 endurance 측정을 진행하였다. 상온에서의 endurance 측정결과 1000 cycles에서 약 19.08%의 charge loss를 보였으며, Retention 측정결과, 10년 후 약 33.57%의 charge loss를 보여 좋은 메모리 특성을 가지는 것을 확인하였다. 본 실험 결과를 바탕으로, 차세대 메모리 시장에서 trap layer 물질로 산화물 반도체를 사용하는 CTF의 연구 및 계발, 활용가치가 높을 것으로 기대된다.

• Geomechanics and Engineering
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• v.16 no.4
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• pp.399-413
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• 2018

This paper addresses the issue of field measurement of excavation damage zone (EDZ) and its numerical simulation method considering both excavation unloading and blasting load effects. Firstly, a 2000 m-deep rock cavern in China is focused. A detailed analysis is conducted on the field measurement data regarding the mechanical response of rock masses subjected to excavation and blasting operation. The extent of EDZ is revealed 3.6 m-4.0 m, accounting for 28.6% of the cavern span, so it is significantly larger than rock caverns at conventional overburden depth. The rock mass mechanical response subjected to excavation and blasting is time-independent. Afterwards, based on findings of the field measurement data, a numerical evaluation method for EDZ determination considering both excavation unloading and blasting load effects is presented. The basic idea and general procedures are illustrated. It features a calibration operation of damage constant, which is defined in an elasto-plastic damage constitutive model, and a regression process of blasting load using field blasting vibration monitoring data. The numerical simulation results are basically consistent with the field measurement results. Further, some issues regarding the blasting loads, applicability of proposed numerical method, and some other factors are discussed. In conclusion, the field measurement data collected from the 2000 m-deep rock cavern and the corresponding findings will broaden the understanding of tunnel behavior subjected to excavation and blasting at great depth. Meanwhile, the presented numerical simulation method for EDZ determination considering both excavation unloading and blasting load effects can be used to evaluate rock caverns with similar characteristics.

• Tunnel and Underground Space
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• v.16 no.1 s.60
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• pp.11-25
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• 2006

The world's largest nucleon decay experiment facility is constructed at a depth of approximately 1,000 meters, in the Kamio Mine, Japan. The excavated cavern is consisted of a cylinder of 42.4 m high and a semi elliptical dome of 15.2 m high, with a bottom diameter of 40 m. The total excavation volume is approximately $69,000\;m^3$. Because of the character as a large cavern excavation in deep underground, there is many unknown factors in rock mechanics. Based on the results of rock test and numerical analysis, the monitoring of rock mass behavior accompanying progress of construction was performed by various instruments installed in the rock mass surrounding the cavern. The monitoring data was used in the study of measures for cavern stability.

• Structural Engineering and Mechanics
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• v.76 no.2
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• pp.269-278
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• 2020

In this paper, the mechanical characteristics of the open type hyperbolic-parabolic membrane structure under wind load were investigated. First, the numerical simulation of a typical plane membrane structure was performed based on the Large-Eddy Simulation method. The accuracy of the simulation method was validated by the corresponding wind tunnel test results. Then, the wind load shape coefficients of open type hyperbolic-parabolic membrane structures are obtained from the series of numerical calculations and compared with the recommended values in the "Technical Specification for Membrane Structures (CECS 158: 2015). Finally, the influences of the wind directions and wind speeds on the mean wind pressure distribution of open type hyperbolic-parabolic membrane structures were investigated. This study aims to gain a better understanding of the wind-induced response for this type of structure and be useful to engineers and researchers.

• Geomechanics and Engineering
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• v.20 no.5
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• pp.461-474
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• 2020

Analysing the incompatible deformation and damage evolution around the tunnels in mixed strata is significant for evaluating the tunnel stability, as well as the interaction between the support system and the surrounding rock mass. To investigate this issue, confined compression tests were conducted on upper-soft and lower-hard strata specimens containing a circular hole using a rock testing system, the physical mechanical properties were then investigated. Then, the incompatible deformation and failure modes of the specimens were analysed based on the digital speckle correlation method (DSCM) and Acoustic Emission (AE) data. Finally, numerical simulations were conducted to explore the damage evolution of the mixed strata. The results indicate that at low inclination angles, the deformation and v-shaped notches inside the hole are controlled by the structure plane. Progressive spalling failure occurs at the sidewalls along the structure plane in soft rock. But the transmission of the loading force between the soft rock and hard rock are different in local. At high inclination angles, v-shaped notches are approximately perpendicular to the structure plane, and the soft and hard rock bear common loads. Incompatible deformation between the soft rock and hard rock controls the failure process. At inclination angles of 0°, 30° and 90°, incompatible deformations are closely related to rock damage. At 60°, incompatible deformations and rock damage are discordant due that the soft rock and hard rock alternately bears the major loads during the failure process. The failure trend and modes of the numerical results agree very well with those observed in the experimental results. As the inclination angles increase, the proportion of the shear or tensile damage exhibits a nonlinear increase or decrease, suggesting that the inclination angle of mixed strata may promote shear damage and restrain tensile damage.

• Tunnel and Underground Space
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• v.29 no.6
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• pp.508-522
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• 2019

Because of the slope failure, not only property damage but also human damage can occur, slope stability analysis should be conducted to predict and reinforce of the slope. This paper, defines the ground areas that can be characterized in terms of slope failure such as Rockmass jointset, Rockmass fault, Soil, Leakage water and Crush zone in sloped images. As a result, it was shown that the deep learning instance segmentation network can be used to recognize and automatically segment the precise shape of the ground region with different characteristics shown in the image. It showed the possibility of supporting the slope mapping work and automatically calculating the ground characteristics information of slopes necessary for decision making such as slope reinforcement.

• Geomechanics and Engineering
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• v.21 no.2
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• pp.201-206
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• 2020

A stress-induced brittle failure in deep tunneling generates spalling and slabbing, eventually causing a v-shaped notch formation. An empirical relationship for the depth of the notch to the maximum tangential stress assuming an equivalent circular cross-section was proposed (Martin et al. 1999). While this empirical approach has been well recognized in the industry and used as a design guideline in many projects, its applicability to a non-circular opening is worth revisiting due to the use of equivalent circular profile. Moreover, even though the extent of the notch also contributes to notch failure, it has not been estimated to date. When the estimate of both the depth and the extent of notch are combined, a practical and economically justifiable support design can be achieved. In this study, a new methodology to assess the depth as well as the extent of notch failure is developed. Field data and numerical simulations using the Cohesion Weakening Frictional Strengthening (CWFS) model were collected and correlated with the three most commonly accepted failure criteria (σ₁/σ₃, D_is=σ_max/σ_c, σ_dev/σ_cm). For the numerical analyses, the D-shaped tunnel was used since most civil tunnels are built to this profile. Inferential statistical analysis is applied to predict the failure range with a 95% confidence level. Considering its accuracy and simplicity, the new correlation can be used as an enhanced version of failure assessment.

• Tunnel and Underground Space
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• v.32 no.1
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• pp.1-19
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• 2022

In this report, new standard, published by Japanese Geotechnical Society, on in-situ stress measurements by hydraulic fracturing was reviewed. In the standard, modification was made for the calculation of fracture re-opening pressure in consideration of fracture surface roughness and residual aperture. The standard also presents how much the system compliance influences the estimation of the fracture re-opening pressure and subsequent in-situ stresses. It is shown that the stiffer the rock mass is, the system compliance should be sufficiently small enough so as to obtain in-situ stress measurement with higher confidence.

• Tunnel and Underground Space
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• v.32 no.3
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• pp.219-230
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• 2022

The Geo-Reservoir Experimental Analogue Technology (GREAT) cell was designed to recreate the thermal-hydro-mechanical conditions of deep subsurface in the laboratory. This apparatus can generate a polyaxial stress field using lateral loading elements, which rotate around the longitudinal axis of a sample and is capable of performing a fluid flow test for samples containing fractures. In the present study, numerical simulations were carried out for triaxial compression tests using the GREAT cell and the mechanical behavior of samples under different conditions of lateral loading was investigated. We simulated an actual case, in which triaxial compression tests were conducted for a polymer sample without fractures, and compared the results between the numerical analysis and experiment. The surface strain (circumferential strain) of the sample was analyzed for equal and non-equal horizontal confining pressures. The results of the comparison showed a good consistency. Additionally, for synthetic cases with a fracture, we investigated the effect of the friction and type of fracture surface on the deformation behavior.

• Tunnel and Underground Space
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• v.32 no.6
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• pp.411-434
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• 2022

In deep geological disposal concept for spent nuclear fuel, it is well-known that rock mass at near-field experiences the thermal-hydraulic-mechanical (THM) coupled behavior. The mechanical properties of rock changes during the coupled process, and it is important to consider the changes into the analysis of numerical simulation and in-situ tests for long-term stability evaluation of nuclear waste disposal repository. This report collected the previous studies on indirect coupled behaviors of rock. The effects of water saturation and temperature on some mechanical properties of rock was considered, while the change in hydraulic conductivity of rock due to stress was included in the indirect coupled behavior.