• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.107-107
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• 2009

본 연구에서는 중성빔을 이용한 Atomic Layer Etching(ALET) system을 이용하여 $ZrO_2$의 atomic layer etching mechanism에 대하여 연구하였다. Ar neutral beam irradiation dose와 $BCl_3$ gas pressure의 변화에 따라 $ZrO_2$ etch rate와 RMS roughness를 관찰했을 때, Ar neutral beam irradiation dose이 $1.485{\times}10^{16}atoms/cm^2{\bullet}cycle$ 이상이고 $BCl_3$ gas pressure가 0.15mTorr 이상 일 때 $ZrO_2$ etch rate은 $1.07\;{\AA}/cycle$의 일정한 값에서 유지됨을 확인하였다. 그리고 ALET와 ICP Etcher을 통해 $ZnO_2$를 각각 식각하여 physically or chemically damage를 비교한 결과, ALET가 기존의 ICP Etcher system보다 $ZrO_2$ 식각공정에 대해 적은 damage를 받는 것을 ARXPS를 통해 관찰 하였다.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.59-63
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• 2021

Upper electrode is one of core parts using plasma etching process at semiconductor. The purpose of this study is to analyze effects of cutting conditions for mechanical machining of silicon upper electrode. For this research, surface roughness of machined workpiece and depth of damage inside of silicon electrode are experimented and analyzed and different values of feed rate and depth of cut are applied for the experiments. From these experiments, it is verified that the surface roughness and internal damaged layer get worse according to take more fast feed rate. In conclusion, cutting condition is very important factor for machining. Results of this study can use to develop various parts which are made from single crystal silicon and affect various benefits to the semiconductor industry for better productivity.

• Journal of Ocean Engineering and Technology
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• v.13 no.3 s.33
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• pp.100-107
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• 1999

Due to the high temperature and pressure, the materials of pipeline in power plant are degraded by creep damage. So far, many conventional measurement techniques such as replica method, electric resistance method, adn hardness test method for creep damage have been used. Among them, the replica method has mainly been used for the inspection of components. But this technique is restricted to the applications at the surface of the objects and cannot be used to material inside. In this paper, the measuring methods of evaluation by using ultrasonic attenuation and electric resistance for the creep detection of creep damage in the form of cavities on grain boundaries or intergranular microcracks were carried out. Absolute measuring method of quantitave ultrasonic attenuation technique for 1Cr0.5Mo material degradation was analyzed for determining the creep degradation steps using life prediction formula. As a result of measurement for creep specimens, we founded that the coefficient of utrasonic attenuation was increased as the increase of creep life fracton(${phi}c$) and the decreasing rate of wlwctric resistance was also increased.

• 한국생물공학회:학술대회논문집
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• 2000.04a
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• pp.117-120
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• 2000

For detecting toxicity of endocrine disruptors (EDs), rapid, sensitive, and simple methods are needed. Therefore, in this study, a new method in which the different toxic effect of EDs can be monitored using 4 different recombinant bacteria was designed and evaluated. It was found that the recombinant bacteria could monitor the toxic effect, not estrogenic effect, due to EDCs through the measurement of bioluminescence and cell growth rate, which were shown to depend upon a form of cellular toxicity, such as DNA damage, protein damage, oxidative damage, and membrane damage. In addition, it was found that the damage done by EDCs can be divided into several groups based upon the toxic mechanisms of the EDCs

• Structural Engineering and Mechanics
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• v.68 no.3
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• pp.289-297
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• 2018

The real behavior of the RC structures constructed based on the assumed specifications of the used materials is matched with the designed ones when the assumed and the applied specifications in construction are the same. Despite in the construction phase of the reinforced concrete (RC) structures always it is tried to implement the same specifications of materials as given in the executive drawings, but considering the unpredicted/uncontrolled parameters that affect the specification of materials, always there is a deviation between the constructed and the designed materials' specifications. The objective of this paper is to submit a guideline for the evaluation of the strength and damage to the existing RC structures encountered deviation in materials' strengths. To achieve this goal, the lateral strength (plastic behaviors) and damage to twenty-five RC moment-resisting frames (MRFs) are studied by applying the inelastic analysis. In this study, a couple of concrete and reinforcement strengths' deviations are investigated. The obtained results indicate that in general, there is a semi-linear relationship between the deviation in the strength of reinforcement and the changes in the lateral strength values of the MRFs. The relative effect of the deviation in the strength of reinforcements is more than the relative effect of the deviation in the concrete strength on the damage rate. The obtained results could be a guideline for the engineers in the survey of the existing buildings encountered deviation in materials' strengths during their construction phase.

• Journal of Korean Society of Forest Science
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• v.95 no.2
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• pp.216-219
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• 2006

After long exposure to low-density $SO_2$ the five tree species showed different changes in their visible damage: Ailanthus altissima showed no visible damage; Acanthopanax sessiliflorus, Populus alba ${\times}$ Populus glandulosa, and Platanus orientalis showed typical damage of yellow spots on their leaves; and Liriodendron tulipifera showed serious damage on the end of leaf tip. The photosynthesis rate of Liriodendron tulipifera and Acanthopanax sessiliflorus was usually lower than the control group: Ailanthus altissima, Populus alba ${\times}$ Populus glandulosa, and Platanus orientalis showed no difference from the control group, while Acanthopanax sessiliflorus and Liriodendron tulipifera showed large changes. In regard to the light compensation points, Ailanthus altissima showed similar values, Populus alba ${\times}$ Populus glandulosa and Platanus orientalis exposed to $SO_2$, showed 3 to $5{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$ higher values than the control group, and Acanthopanax sessiliflorus and Liriodendron tulipifera exposed to $SO_2$ showed approximately twice higher light compensation points.

• Journal of Power System Engineering
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• v.18 no.5
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• pp.137-143
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• 2014

An investigation on lightning characteristics and damage to wind turbines was performed on Jeju and Gangwon regions. The lightning data from January 2010 to September 2013 detected by IMPACT ESP were collected and analyzed in detail. Hangyeong and Seongsan wind farms of Jeju province and Taebaek, Changjuk, Taegisan and Gangwon wind farms of Gangwon province were selected for this study. Lightning rates and lightning damage events at the six wind farms were compared with each other. Lightning maps for the two regions were drawn using lightning frequency data. As a result, lightning frequency of Gangwon region was higher than that of Jeju region, while lightning strength of Gangwon was weaker than that of Jeju. Lightning rates were assessed to be good for all of the six wind farms. No lightning damage to wind turbines occurred at the two wind farms of Jeju, while some lightning damage to wind turbines took place at the four wind farms of Gangwon.

• The Plant Pathology Journal
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• v.32 no.6
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• pp.537-544
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• 2016

We developed a model, termed D-PSA-K, to estimate the accumulated potential damage on kiwifruit canes caused by bacterial canker during the growing and overwintering seasons. The model consisted of three parts including estimation of the amount of necrotic lesion in a non-frozen environment, the rate of necrosis increase in a freezing environment during the overwintering season, and the amount of necrotic lesion on kiwifruit canes caused by bacterial canker during the overwintering and growing seasons. We evaluated the model's accuracy by comparing the observed maximum disease incidence on kiwifruit canes against the damage estimated using weather and disease data collected at Wando during 1994-1997 and at Seogwipo during 2014-2015. For the Hayward cultivar, D-PSA-K estimated the accumulated damage as approximately nine times the observed maximum disease incidence. For the Hort16A cultivar, the accumulated damage estimated by D-PSA-K was high when the observed disease incidence was high. D-PSA-K could assist kiwifruit growers in selecting optimal sites for kiwifruit cultivation and establishing improved production plans by predicting the loss in kiwifruit production due to bacterial canker, using past weather or future climate change data.

• Geomechanics and Engineering
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• v.20 no.2
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• pp.113-120
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• 2020

Rock damage is the main cause of accidents in underground engineering. It is difficult to predict rock damage accurately by using only one parameter. In this study, a rock failure prediction model was established by using stress, energy, and damage. The prediction level was divided into three levels according to the ratio of the damage threshold stress to the peak stress. A classification predicting model was established, including the stress, energy, damage and AE impact rate using Bayesian method. Results show that the model is good practicability and effectiveness in predicting the degree of rock failure. On the basis of this, a multi-parameter classification predicting deterioration model of rock failure was established. The results provide a new idea for classifying and predicting rockburst.

• Smart Structures and Systems
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• v.2 no.3
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• pp.253-274
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• 2006

The structural monitoring of multi-wire strands is of importance to prestressed concrete structures and cable-stayed or suspension bridges. This paper addresses the monitoring of strands by ultrasonic guided waves with emphasis on the signal processing and automatic defect classification. The detection of notch-like defects in the strands is based on the reflections of guided waves that are excited and detected by magnetostrictive ultrasonic transducers. The Discrete Wavelet Transform was used to extract damage-sensitive features from the detected signals and to construct a multi-dimensional Damage Index vector. The Damage Index vector was then fed to an Artificial Neural Network to provide the automatic classification of (a) the size of the notch and (b) the location of the notch from the receiving sensor. Following an optimization study of the network, it was determined that five damage-sensitive features provided the best defect classification performance with an overall success rate of 90.8%. It was thus demonstrated that the wavelet-based multidimensional analysis can provide excellent classification performance for notch-type defects in strands.