• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• Smart Structures and Systems
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• v.4 no.4
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• pp.391-406
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• 2008

This study attempts to develop a real-time debonding monitoring system for carbon fiber-reinforced polymer (CFRP) strengthened structures by continuously inspecting the bonding condition between the CFRP layer and the host structure. The uniqueness of this study is in developing a new concept and theoretical framework of nondestructive testing (NDT), in which debonding is detected without relying on previously-obtained baseline data. The proposed reference-free damage diagnosis is achieved based on the concept of time reversal acoustics (TRA). In TRA, an input signal at an excitation point can be reconstructed if the response signal measured at another point is reemitted to the original excitation point after being reversed in the time domain. Examining the deviation of the reconstructed signal from the known initial input signal allows instantaneous identification of damage without requiring a baseline signal representing the undamaged state for comparison. The concept of TRA has been extended to guided wave propagations within the CFRP-strengthened reinforced concrete (RC) beams to improve the detectibility of local debonding. Monotonic and fatigue load tests of large-scale CFRP-strengthened RC beams are conducted to demonstrate the potential of the proposed reference-free debonding monitoring system. Comparisons with an electro-mechanical impedance method and an inferred imaging technique are provided as well.

• Journal of the Korean Society of Environmental Restoration Technology
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• v.24 no.6
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• pp.97-107
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• 2021

Abnormal climate caused by climate change causes enormous social and economic damage. And such damage and its impact may vary depending on the location and regional characteristics of the region and the social and economic conditions of local residents. Therefore, it is necessary to continuously monitor whether there are indicators that are weaker than other regions among the detailed indicators that constitute the risk, exposure and vulnerability of climate change risk. In this study, the concept of climate change risk was used for heatwave to determine regional inequality of climate change risk. In other words, it was judged that inequality in climate change risk occurred in regions with high risk but high exposure and low vulnerability compared to other regions. As a result of the analysis, it was found that 13 local governments in Korea experienced regional inequality in climate change risk. In order to resolve regional inequality in climate change risks, the current status of regional inequality in climate change should be checked based on the analysis proposed in this study, there is a need for an evaluation and monitoring system that can provide appropriate feedback on areas where inequality has occurred. This continuous evaluation and monitoring-based feedback system is expected to be of great help in resolving regional inequality in climate change risks.

• Journal of the Korea Institute of Information Security & Cryptology
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• v.29 no.6
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• pp.1403-1412
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• 2019

Effect of damage and loss cost for downtime is huge, if physical devices such as turbines, pipe, and storage tanks are in the abnormal state originated from not only aging, but also cyber attacks on the control and monitoring system like PLC (Programmable Logic Controller). To improve availability and dependability of the physical devices, we design and implement an indirect health monitoring system which sense temperature, acceleration, current, etc. indirectly, and put sensor data into Influx DB in real-time. Then, the actual performance of detecting abnormal state is shown using the indirect health monitoring system. Analyzing data are acquired using the real-time indirect health monitoring system, abnormal state and security threats can be double-monitored and lower maintenance cost utilizing prognostics and health management.

• Structural Monitoring and Maintenance
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• v.1 no.4
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• pp.411-425
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• 2014

A relatively low frequency Lamb wave-based damage identification method called damage imaging method for rectangular composite plate is presented. A damage index (DI) is generated from the delay matrix of the Lamb wave response signals, and it is used to indicate the location and approximate area of the damage. The viability of this method is demonstrated by analyzing the numerical and experimental Lamb wave response signals from rectangular composite plates. The technique only requires the response signals from the plate after damage, and it is capable of performing near real time damage identification. This study sheds some light on the application of Lamb wave-based damage detection algorithm for plate-type structures by using the relatively low frequency (e.g., in the neighborhood of 100 kHz, more suitable for the best capability of the existing fiber optic sensor interrogator system with the sampling frequency of 500 kHz) Lamb wave response and a reference-free damage detection technique.

• Smart Structures and Systems
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• v.33 no.3
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• pp.227-241
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• 2024

Safety and structural integrity of civil structures, like bridges and buildings, can be substantially enhanced by employing appropriate structural health monitoring (SHM) techniques for timely diagnosis of incipient damages. The information gathered from health monitoring of important infrastructure helps in making informed decisions on their maintenance. This ensures smooth, uninterrupted operation of the civil infrastructure and also cuts down the overall maintenance cost. With an early warning system, SHM can protect human life during major structural failures. A real-time online damage localization technique is proposed using only the vibration measurements in this paper. The concept of the 'Degree of Scatter' (DoS) of the vibration measurements is used to generate a spatial profile, and fractal dimension theory is used for damage detection and localization in the proposed two-phase algorithm. Further, it ensures robustness against environmental and operational variability (EoV). The proposed method works only with output-only responses and does not require correlated finite element models. Investigations are carried out to test the presented algorithm, using the synthetic data generated from a simply supported beam, a 25-storey shear building model, and also experimental data obtained from the lab-level experiments on a steel I-beam and a ten-storey framed structure. The investigations suggest that the proposed damage localization algorithm is capable of isolating the influence of the confounding factors associated with EoV while detecting and localizing damage even with noisy measurements.

• Structural Monitoring and Maintenance
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• v.1 no.1
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• pp.1-45
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• 2014

The developments and implementations of the structural health monitoring (SHM) system for large infrastructures have been gradually recognized by researchers, engineers and administrative authorities in the last decades. This paper summarizes an updated review on innovations and applications in SHM for infrastructures carried out by researchers at Dalian University of Technology. Invented sensors and data acquisition system are firstly briefly described. And then, some proposed theories and methods including the sensing technology, sensor placement method, signal processing and data fusion, system identification and damage detection are discussed in details. Following those, the activities on the standardization of SHM and several case applications on specific types of structure are reviewed. Finally, existing problems and promising research efforts in the field of SHM are given.

• Smart Structures and Systems
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• v.4 no.6
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• pp.711-726
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• 2008

A number of efforts had been sought to instrument bridges for the purpose of structural monitoring and assessment. The outcome of these efforts, as gauged by advances in the understanding of the definition of structural damage and their role in sensor selection as well as in the design of cost and data-effective monitoring systems, has itself been difficult to assess. The authors' experience with the design, calibration, and operation of a monitoring system for the Kishwaukee Bridge in Illinois has provided several lessons that bear upon these concerns. The systems have performed well in providing a continuous, low-cost monitoring platform for bridge engineers with immediate relevant information.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.6_2
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• pp.1043-1050
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• 2020

In this study, a study was presented on the monitoring technique of landslide area using UAV. In the case of disaster investigation using drone mapping, it can be used at various disaster sites. The mission can be carried out at various disaster sites, including surveys of damage to mountainous areas caused by landslides, building collapses surveys of flood damage, typhoons, earthquakes. The damage investigation plan using drone mapping is expected to be highly utilized at disaster sites where investigators cannot access it like in mountainous areas and where it is difficult to conduct direct damage investigations at the site. Drone mapping technology has many advantages in terms of disaster follow-up, such as recovery. Compared to the existing survey system, which was mainly carried out manually, the investigation time can be drastically reduced, and it can also respond to disaster sites that are difficult to carry out or are difficult to access directly. In addition, it is possible to establish and guide spatial data at the disaster site based on accurate mapping data from the time of the disaster, which has considerable strength in managing the situation of the disaster site, selecting priority areas for recovery, and establishing recovery plans. As such, drone mapping is a technology that can be used in a wide range of sites along with natural disasters and social disasters. If a damage investigation system is established through this, it is believed that it will contribute significantly to the rapid establishment of recovery plans along with the investigation of disaster response time and extent of damage recovery.

• Smart Structures and Systems
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• v.5 no.2
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• pp.139-152
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• 2009

Globally, civil infrastructures are deteriorating at an alarming rate caused by overuse, overloading, aging, damage or failure due to natural or man-made hazards. With such a vast network of deteriorating infrastructure, there is a growing interest in continuous monitoring technologies. In order to provide a true distributed sensor and control system for civil structures, we are developing a Structural Nervous System that mimics key attributes of a human nervous system. This nervous system is made up of building blocks that are designed based on mechanoreceptors as a fundamentally new approach for the development of a structural health monitoring and diagnostic system that utilizes the recently developed piezo-fibers capable of sensing and actuation. In particular, our research has been focused on producing a sensory nervous system for civil structures by using piezo-fibers as sensory receptors, nerve fibers, neuronal pools, and spinocervical tract to the nodal and central processing units. This paper presents up to date results of our research, including the design and analysis of the structural nervous system.