Chemical Vapor Nucleation of Tungsten from $WF_6-SiH_4$ on Silicon Dioxide Surface
(산화규소 표면위에서 $WF_6-SiH_4$ 화학증착에 의한 텅스텐 핵의 생성)
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- Korean Journal of Materials Research
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- v.2 no.1
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- pp.19-26
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- 1992