• 한국정밀공학회지
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• 제24권12호
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• pp.136-142
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• 2007

Precise fabrication of three-dimensional (3D) self-standing microstructures on thin glass plates via two-photon induced polymerization (TPP) has been an important issue for innovative 3D nanodevices and microdevices. However, there are still issues remaining to be solved, such as building 3D microstructures on opaque materials via TPP and being able to implant them as functional parts onto practical systems. To settle these issues simply and effectively, we propose a contact print lithography (CPL) method using an ultraviolet (UV)-curable polymer layer. We report some of the possibilities and potential of CPL by presenting our results for transplanting 3D microstructures onto large-area substrates and also our examination of some of the effects of the process parameters on successful transplantation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.179.2-179.2
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• 2014

Carbon nanotubes (CNT)-metal contacts play an important role in nanoelectronics applications such as field-effect transistor (FET) devices. Using Al and (10,0) CNT, we have recently showed that the CNT-metal contacts mediated via topological defects within CNT exhibits intrinsically low contact resistance, thanks to the preservation of the sp2 bonding network at the metal-CNT contacts.[1] It is well-established that metals with good wetting property such as Pd consistently yield good contacts to both metallic and semiconducting CNTs. In this work, the electronic and charge transport properties of the interfaces between capped CNT and Pd will be investigated based on first-principles computations and compared with previous results obtained for the Al electrodes.

• Computers and Concrete
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• 제25권6호
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• pp.551-563
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• 2020

This paper investigates the artificial neural network (ANN) to predict the dimensionless parameters for the maximum contact pressures and contact areas of a contact problem. Firstly, the problem is formulated and solved theoretically by using Theory of Elasticity and Integral Transform Technique. Secondly, the contact problem has been extended based on the ANN. The multilayer perceptron (MLP) with three-layer was used to calculate the contact distances. External load, distance between the two quarter planes, layer heights and material properties were created by giving examples of different values were used at the training and test stages of ANN. Program code was rewritten in C++. Different types of network structures were used in the training process. The accuracy of the trained neural networks for the case was tested using 173 new data which were generated via theoretical solutions so as to determine the best network model. As a result, minimum deviation value (difference between theoretical and C++ ANN results) of was obtained for the network model. Theoretical results were compared with artificial neural network results and well agreements between them were achieved.

• 한국가시화정보학회지
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• 제16권2호
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• pp.16-22
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• 2018

This study investigates dynamic wetting behaviors of a water droplet placed on surfaces with different wettability and nano-structures. Hydrophobic and hydrophilic properties on as-received silicon wafers were prepared by fabricating thin films of hydrophobic polymer and hydrophilic nanoparticles via layer-by-layer coating. Dynamic advancing contact angle of droplets on the prepared surfaces was measured at various moving velocities of triple contact line with a high-speed video camera. As advancing velocity of triple contact line increased, dynamic advancing contact angle on the as-received silicon and hydrophobic surfaces sharply increased up to $80^{\circ}$ in the range of order of mm/sec whereas the SiO2 nanoparticle-coated hydrophilic surface maintained low contact angles of about $30^{\circ}$ and then it gradually increased in the velocity range of order of hundred mm/sec. The improved dynamic wetting ability observed on the nanostructured hydrophilic surface can benefit the performance of various phase-change heat transfer phenomena under forced convective flow.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2006년도 제31회 학술논문발표회 초록집
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• pp.185-185
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• 2006

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.421-425
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• 2007

In the fabrication of dry adhesive structure, increasing contact-points or contact-area is the primary goal because the adhesive force grows in proportion to the contact-area. The simplest way to extend the contact surface is the fabrication by using soft materials. However, the column-array structure could confront the matting phenomenon which columns are stuck together. Therefore, we need a novel design to reduce the effective stiffness with adequate stiff materials like a gecko's setae. In this study, we propose a novel design for the dry adhesive structure. Moreover, we analyzed whether the adhesive structure conforms the rough surface sufficiently through finite element method adopted the non-bonding interaction as the body force. Also, we fabricated the novel structures via UV lithography and some techniques. In addition, we examined the adhesive force of the novel structures.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.293-293
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• 2014

The applicability of graphene has been demonstrated in the electronic fields. But, high performance of graphene is limited by the contact resistance (Rc) at the metal-graphene interface. Recently, Rc was found to be improved by forming edge-contacted graphene via theoretical simulation. Based on the differences between the surface and edge contacts at the M-G interface, we demonstrate "edge-contacted" graphene through the use of a controlled plasma processing technique that generates the edge structure of the bond and significantly reduces the contact resistance. The contact resistance attained by using pre-plasma processing was of $270{\Omega}{\cdot}{\mu}m$. Mechanisms of pre-plasma process leading to low Rc was revealed by SEM and Raman spectroscopy. In the end, controlled pre-plasma processing enabled to fabricate CVD-graphene field effect transistors with an enhanced adhesion and improved carrier mobility.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 춘계학술대회 발표 논문집
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• pp.12-17
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• 2003

본 연구에서는 MICP Etching system 을 이용한 Via contact 및 Deep contact hole etch process 특성을 연구하였다. Langmuir probe 를 이용한 MICP source 의 Plasma density & electron temperature 측정하였고 탄소와 플로우르를 포함하는 혼합 Plasma 를 형성하여 RF frequency, wall temperature, chamber gap, gas chemistry 등의 변화에 따른 식각 특성을 조사하였다. Plasma density 는 1000w 에서 $10^{11}$/$cm^3$ 이상의 high density plasma와 uniform plasma 형성을 확인하였고 $CH_{2}F_{2}$와 CO의 적절한 혼합비를 이용하여 Oxide to PR 선택비가 10 이상인 고선택비 조건을 확보하였다. 고선택비 형성에 따라 Polymer 형성이 많이 되었고 이를 개선하기 위하여 반응 챔버의 온도 조절을 통하여 Polymer 증착 방지에 효과적인 것을 확인하였다. MICP source를 이용하여 탄소와 플로우르의 혼합 가스와 식각 챔버의 온도 조절에 의한 선택비 증가를 확보하여 High Aspect Ratio Contact Hole Etch 가능성을 확보하였다.

• Structural Engineering and Mechanics
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• 제85권5호
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• pp.621-633
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• 2023

The major objective of this paper is to study the receding contact problem between two functional graded layers under a flat indenter. The gravity is assumed negligible, and the shear moduli of both layers are assumed to vary exponentially along the thickness direction. In the absence of body forces, the problem is reduced to a system of Fredholm singular integral equations with the contact pressure and contact size as unknowns via Fourier integral transform, which is transformed into an algebraic one by the Gauss-Chebyshev quadratures and polynomials of both the first and second kinds. Then, an iterative speediest descending algorithm is proposed to numerically solve the system of algebraic equations. Both semi-analytical and finite element method, FEM solutions for the presented problem validate each other. To improve the accuracy of the numerical result of FEM, a graded FEM solution is performed to simulate the FGM mechanical characteristics. The results reveal the potential links between the contact stress/size and the indenter size, the thickness, as well as some other material properties of FGM.

• Computers and Concrete
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• 제33권1호
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• pp.13-25
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• 2024

In this study, contact analysis in a functionally graded (FG) layer loaded with two circular punches is solved using the finite element method (FEM). The problem is consisted of a functionally graded layer that resting on an elastic semi-infinite plane and is loaded with two rigid punches of circular geometry. External loads P and Q are transferred to the layer via two rigid punches. The finite element model of the functionally graded layer is created using the ANSYS package program and a 2-dimensional analysis of the problem is analyzed. The contact lengths, obtained as a result of the analysis are compared with the analytical solution in the literature. In the study, the effects of parameters such as distances between punches, loads, inhomogenity parameter on contact zones, initial separation loads and distances, normal stresses, stresses across depth and contact stresses are investigated. As a result, in this study, it can be said that the magnitude of the stresses occurring in the FG layer is less than the homogeneous layer, therefore the life of FG materials will be longer than the homogeneous layer. When the distance between the punches is 2.25, the initial separation distance is 6.98, and when the distance between the punches is 4, the initial separation distance decreases to 6.10. In addition, when the load increased in the second punch, the initial separation load decreased from 55 to 18. The obtained results are presented in the form of graphs and tables.