• 반도체디스플레이기술학회지
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• 제23권1호
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• pp.52-55
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• 2024

In this paper, a state change study was conducted through Frequency Domain Reflectometry (FDR) technology for the process chamber of plasma equipment for semiconductor manufacturing. In the experiment, by direct connecting the network analyzer to the RF matcher input of the 300 mm plasma enhanced chemical vapor deposition (PECVD) chamber, S11 was measured in a situation where plasma was not applied, and the frequency domain reacting to the chamber state change was searched. Response factors to changes in the status, such as temperature, spacing of the heating chuck, internal pressure difference, and process gas supply state were confirmed. Through this, the frequency domain in which a change in the reflection value was detected through repeated experiments. The reliability of the measured micro-displacement was verified through reproducibility experiments.

• 한국생산제조학회지
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• 제21권4호
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• pp.601-607
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• 2012

The magnetic abrasive polishing (MAP), for online monitoring with AE sensor attachment, was performed in this study. To predict the surface roughness after the magnetic abrasive polishing of NAK80, the signal data acquired from the AE sensor were analyzed. A dimensionless coefficient, which consisted of average of AErms and standard deviation of AE signal, was defined as a characteristic of the MAP and a prediction model was obtained using least square method. A neural network, which had multiple input parameters from AE signals and polishing conditions, was applied for predicting the surface roughness. As a result of this study, it was seen that there was very close correlation between the AE signal and the surface roughness in the MAP. And then on-line prediction of the surface roughness after the MAP of the NAK80 was possible by the developed prediction model.

• 한국생산제조학회지
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• 제5권2호
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• pp.38-45
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• 1996

This study was focused on the prediction of the approprite tool life by clarifying the correlation between progressive drill wear and AE signal. on drilling SM45C the following results have been obtained; RMSAE, AE CUM-CNTS had a tendency to increase slowly according to wear size, at 1000rpm, 150mm/min However, these increased suddenly in the range of 0.20~0.22mm wear, about 102 holes and had a tendency to go up and down until the drilling was impossible. The sudden increase of AE signals shows that something is wrong and it is closely connected with drill wear and chipping. It also makes the working surface bad From the above results, AE signals could be used to monitor the drill's condition and to determine the right time to change tools.

• 한국기계가공학회지
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• 제16권3호
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• pp.63-68
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• 2017

In order to process more complicated and higher-precision parts, generally, an additional axis for a machine tool is needed which was an approach to minimize the cost of tool modification. A table with a rotary reducer that can rotate through the axis of the gear system was employed to a machine tool to achieve the purpose of adding an extra motion axis. In general, the motion of the rotary reducer is driven by a worm/wheel or helical gear system, which is different from the hypoid helical gear structure that used in this research. Reliability of guarantee of high accurancy throughout the whole life cycle is on of the critical factors to evaluate a rotary reducer in this field. In this paper, in order to evaluate life-time of rotary reducer, a low-cost accelerated life test was developed to satisfy the demands of clients.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.455-460
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• 2007

A self-sensing circuit for piezo inkjet has been designed in order to monitor the operating condition during printing. In order to verify the circuit, both ink droplet images from strobe LED and vibration signals from the laser vibrometer were measured and compared with self-sensing signal. Experimental results show that self-sensing signal was effective in detecting the pressure wave change due to the bubble trapped in inkjet printhead.

• 한국인터넷방송통신학회논문지
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• 제15권6호
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• pp.311-319
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• 2015

본 논문에서는 산업공장 내의 생산 효율을 높이기 위하여 제조공정 자원을 예측하고 위험 관리를 효율적으로 이행하는 자원예측 및 위험관리를 위한 의사결정 시스템을 제안하였다. 각 공정에서 발생되는 다양한 정보들을 효율적으로 관리하는 세부 공정별 시나리오 생성이 어렵고, 동일한 공정 내에서도 다양한 제품의 생산하기 위해 제조 설비의 조건 변경이 빈번하다. 제품의 생산 주기 또한 일정하지 않아 연속되지 않은 데이터가 발생하여 소량의 데이터로 변동을 확인해야 하는 문제점이 있다. 이러한 문제점을 해결하기 위해서는 제조공정의 데이터 일원화, 공정 자원 예측, 위험 예측, 공정 현황 모니터링을 통하여 문제 발생시 즉각 조치가 가능하여야 한다. 본 논문에서는 설계도면 변경 범위, 자원 예측, 공정 완료 예정일을 회귀알고리즘을 이용하여 수식을 도출하였으며, 분류 트리 기법, 경계값 분석을 통하여 3단계로 의사결정 시스템을 제안하였다.

• 한국산학기술학회논문지
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• 제6권5호
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• pp.373-377
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• 2005

본 논문에서는 반도체 제조장비의 챔버 내부 가스누출을 방지하기위한 보완모듈을 제시하였다. MFC(mass flow controller) 다음단의 최종밸브와 챔버 사이의 가스관에 압력센서를 부착시켜, 압력센서의 신호와 최종밸브의 동작신호를 디지털 회로를 이용하여 실시간으로 감지하고 가스누출을 방지하도록 하였다. LED 모듈을 이용하여 공정중에 발생하는 2차 소성물로 인한 가스의 흐름과 관련된 시스템 고장을 표시한다. 본 연구에서 개발한 모듈을 이용하면 챔버 내에서의 가스누출로 인한 장비의 손상과 안전사고 등을 예방하는 효과가 있다.

• 한국생산제조학회지
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• 제7권6호
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• pp.90-96
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• 1998

The ductile cast iron is austempered at 300, 350 and 40$0^{\circ}C$ temperature in order to investigate the basic factors for monitoring drill wear in automatic production process, and cutting force and AE RMS signals are measured with changing cutting condition for ADI(Austempered Ductile Cast Iron) with different mechanical properties. The signals of cutting force were influenced by cutting speed and feedrate greatly. On the other hand AE RMS signals are influenced by cutting speed where as it is not related with feedrate. As the depth of drilling increases, cutting force shows a slow increase and the value of AE RMS increases until the range of h/d=4. But over the range it increases greatly due to an amount of chip discharge and friction with inner wall of drilling hole, etc. As the drill diameter increases at a constant depth of drilling. Cutting force increases linearly, but the level of AE RMS does not increases linearly due to circumferential velocity and great influence of h/d.

• 품질경영학회지
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• 제39권4호
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• pp.500-506
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• 2011

Evolutionary operation (EVOP) proposed by Box(1957) is a method for continuous monitoring and improvement of a full-scale manufacturing process with the objective of moving the current operating conditions toward the better ones. EVOP in experiments with mixtures consists of screening vital few components and making small changes in the current operating condition by making small increments in the proportion of the screened component. In this paper, how to determine operating conditions in EVOP in experiments with mixtures around the current operating condition is proposed. The proposed methods are illustrated with the simulated data based on the well known flare experimental data described by McLean and Anderson(1966).

• 한국공작기계학회논문집
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• 제16권5호
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• pp.108-114
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• 2007

A new cutting force estimating approach and machining state monitoring examples are presented which uses a cylindrical displacement sensor built into the spindle. To identify the tool-spindle system dynamics with frequency up to 2 kHz, a home-built electro-magnetic exciter is used. The result is used to build an algorithm to extract the dynamic cutting force signal from the spindle error motion; because the built-in spindle sensor signal contains both spindle-tool dynamics and tool-workpiece interactions. This sensor is very sensitive and can measure broadband signal without affecting the system dynamics. The main characteristic is that it is designed so that the measurement is irrelevant to the geometric errors by covering the entire circumferential area between the target and sensor. It is also very simple to be installed. Usually the spindle front cover part is copied and replaced with a new one with this sensor added. It gives valuable information about the operating condition of the spindle at any time. It can be used to monitor cutting force and chatter vibration, to predict roughness and to compensate the form error by overriding spindle speed or feed rate. This approach is particularly useful in monitoring a high speed machining process.