• 제목/요약/키워드: composite thin film

검색결과 271건 처리시간 0.039초

두께 변화에 따른 BST 박막의 특성 (The Properties of BST Thin Films by Thickness)

  • 홍경진;민용기;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.455-458
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    • 2001
  • The thin films of high pemitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)$TiO_3$ thin films as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Ti/$SiO_2/Si$ substrate at 4,000 [rpm] for 10 seconds. The devices of BST thin films to composite $(Ba_{0.7},Sr_{0.3})TiO_3$ were fabricated by changing of the depositing layer number on $Pt/Ti/SiO_2/Si$ substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was $2500[\AA]$, $3500[\AA]$, $3800[\AA]$. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency l[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

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두께 변화에 따른 BST 박막의 특성 (The Properties of BST Thin Films by Thickness)

  • 홍경진;민용기;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.455-458
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    • 2001
  • The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin films as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Ti/SiO$_2$/Si substrate at 4,700 [rpm] for 10 seconds. The devices of BST thin films to composite (Ba$\_$0.7/Sr$\_$0.3/)TiO$_3$ were fabricated by changing of the depositing layer number on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was 2500[${\AA}$], 3500[${\AA}$], 3800[${\AA}$]. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency 1[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

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Thin composite film passivation through RF sputtering method For Large-sized Organic Display Devices

  • Lee, Joo-Won;Kim, Young-Min;Park, Jung-Soo;Bea, Sung-Jin;Kim, Na-Rae;Kim, Jai-Kyeong;Jang, Jin;Ju, Byeong-Kwon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1480-1483
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    • 2005
  • Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): $SiO_2$ (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.

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이온 질화층이 TiN 박막의 밀착성에 미치는 영향 (The Adhesion of TiN Coatings on Plasma-nitrided Steel)

  • 고광만;김홍우;김문일
    • 열처리공학회지
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    • 제4권4호
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    • pp.1-14
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    • 1991
  • In PECVD(Plasma-Enhanced Chemical Vapor Deposition) process, titanium nitride is thin and its adhesion is poor for the protective coatings. Therefore it has been studied that intermediate layer forms between substrate and TiN thin film. Using R.F. plasma nitriding, nitride layer was first formed, then TiN thin film coated by PECVD. The chemical composition of the coatings has been characterized using AES, EDS and their crystallographic structure by means of XRD. Mechanical properties such as microhardness and film adhesion have also been determined by vickers hardness test, scratch test and indentation test. As a result, there was no difference in chemical composition and structure between the TiN deposition only and the composite of TiN deposition on nitrided steel. It was found that nitrided substrate increased the hardness of TiN coatings and was beneficial in preventing the plastic deformation in the substrate. Therefore the effective load bearing capacity of the TiN coatings on nitrided steel was increased and their adhesion was improved as well. According to the results of this study, the processes that lead to the formation of composite layers characterized by good working properties, i.e., high microhardness, adhesion and resistance to deformation.

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In situ reduction of gold nanoparticles in PDMS matrices and applications for large strain sensing

  • Ryu, Donghyeon;Loh, Kenneth J.;Ireland, Robert;Karimzada, Mohammad;Yaghmaie, Frank;Gusman, Andrea M.
    • Smart Structures and Systems
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    • 제8권5호
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    • pp.471-486
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    • 2011
  • Various types of strain sensors have been developed and widely used in the field for monitoring the mechanical deformation of structures. However, conventional strain sensors are not suited for measuring large strains associated with impact damage and local crack propagation. In addition, strain sensors are resistive-type transducers, which mean that the sensors require an external electrical or power source. In this study, a gold nanoparticle (GNP)-based polymer composite is proposed for large strain sensing. Fabrication of the composites relies on a novel and simple in situ GNP reduction technique that is performed directly within the elastomeric poly(dimethyl siloxane) (PDMS) matrix. First, the reducing and stabilizing capacities of PDMS constituents and mixtures are evaluated via visual observation, ultraviolet-visible (UV-Vis) spectroscopy, and transmission electron microscopy. The large strain sensing capacity of the GNP-PDMS thin film is then validated by correlating changes in thin film optical properties (e.g., maximum UV-Vis light absorption) with applied tensile strains. Also, the composite's strain sensing performance (e.g., sensitivity and sensing range) is also characterized with respect to gold chloride concentrations within the PDMS mixture.

Preparation of SiO2-CuO-CeO2 Composite Powders and Its Thin Film Templated with Oxalic Acid

  • Son, Boyoung;Jung, Miewon
    • 한국재료학회지
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    • 제22권10호
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    • pp.526-530
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    • 2012
  • Silica-based ceramic-matrix composites have shown promise as advanced materials for many applications such as chemical catalysts, ceramics, pharmaceuticals, and electronics. $SiO_2$-CuO-$CeO_2$ multi-component powders and their thin film, using an oxalic acid template as a chelating agent, have larger surface areas and more uniform pore size distribution than those of inorganic acid catalysts. $SiO_2$-CuO-$CeO_2$ composite powders were synthesized using tetraethylorthosilicate, copper (II) nitrate hemi (pentahydrate), and cerium (III) nitrate hexahydrate with oxalic acid as template or pore-forming agent. The process of thermal evolution, the phase composition, and the surface morphology of these powders were monitored by thermogravimetry-differential thermal analysis (TG-DTA), X-ray diffractometry (XRD), field-emission scanning electron microscopy (FE-SEM), and energy dispersive X-ray spectrometry (EDXS). The mesoporous property of the powders was observed by Brunner-Emmett-Teller surface (BET) analysis. The improved surface area of this powder template with oxalic acid was $371.4m^2/g$. This multi-component thin film on stainless-steel was prepared by sol-gel dip coating with no cracks.

Molecular Aligning Properties of a Dielectric Layer of Polymer-Ceramic Nanocomposite for Organic Thin-Film Transistors

  • Kim, Chi-Hwan;Kim, Sung-Jin;Yu, Chang-Jae;Lee, Sin-Doo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1200-1203
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    • 2004
  • We investigated the molecular aligning capability of a polymer layer containing ceramic nanoparticles which can be used as a gate insulator of organic thin-film transistors (OTFTs). Because of the enhanced dielectric properties arising from the nanoparticles and molecular aligning properties of the polymer, the composite layer provides excellent mobility characteristics of the OTFTs.

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Organic Passivation Material-Polyvinyl Alcohol (PVA)/Layered Silicate Nanocomposite-for Organic Thin Film Transistor

  • Ahn, Taek;Suk, Hye-Jung;Yi, Mi-Hye
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1539-1542
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    • 2007
  • We have synthesized novel organic passivation materials to protect organic thin film transistors (OTFTs) from $H_2O$ and $O_2$ using polyvinyl alcohol (PVA)/layered silicate (SWN) nano composite system. Up to 3 wt% of layered silicate to PVA, very homogeneous nanocomposite solution was prepared.

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An exact solution for mechanical behavior of BFRP Nano-thin films embedded in NEMS

  • Altabey, Wael A.
    • Advances in nano research
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    • 제5권4호
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    • pp.337-357
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    • 2017
  • Knowledge of thin films mechanical properties is strongly associated to the reliability and the performances of Nano Electro Mechanical Systems (NEMS). In the literature, there are several methods for micro materials characterization. Bulge test is an established nondestructive technique for studying the mechanical properties of thin films. This study improve the performances of NEMS by investigating the mechanical behavior of Nano rectangular thin film (NRTF) made of new material embedded in Nano Electro Mechanical Systems (NEMS) by developing the bulge test technique. The NRTF built from adhesively-bonded layers of basalt fiber reinforced polymer (BFRP) laminate composite materials in Nano size at room temperature and were used for plane-strain bulging. The NRTF is first pre-stressed to ensure that is no initial deflection before applied the loads on NRTF and then clamped between two plates. A differential pressure is applying to a deformation of the laminated composite NRTF. This makes the plane-strain bulge test idea for studying the mechanical behavior of laminated composite NRTF in both the elastic and plastic regimes. An exact solution of governing equations for symmetric cross-ply BFRP laminated composite NRTF was established with taking in-to account the effect of the residual strength from pre-stressed loading. The stress-strain relationship of the BFRP laminated composite NRTF was determined by hydraulic bulging test. The NRTF thickness gradation in different points of hemisphere formed in bulge test was analysed.

PLD 공정으로 제조된 LSM-YSZ 나노복합체층이 포함된 경사구조 박막 공기극을 적용한 SOFC의 성능 분석 (Performance of Solid Oxide Fuel Cell with Gradient-structured Thin-film Cathode Composed of Pulsed-laser-deposited Lanthanum Strontium Manganite-Yttria-stabilized Zirconia Composite)

  • 명두환;홍종일;황재연;이종호;이해원;김병국;조성걸;손지원
    • 한국세라믹학회지
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    • 제48권6호
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    • pp.487-492
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    • 2011
  • The effect of the application of lanthanum strontrium manganite and yttria-stabilized zirconia (LSM-YSZ) nano-composite fabricated by pulsed laser deposition (PLD) as a cathode of solid oxide fuel cell (SOFC) is studied. A gradient-structure thin-film cathode composed of 1 micron-thick LSM-YSZ deposited at an ambient pressure ($P_{amb}$) of 200 mTorr; 2 micron-thick LSM-YSZ deposited at a $P_{amb}$ of 300 mTorr; and 2 micron-thick lanthanum strontium cobaltite (LSC) current collecting layer was fabricated on an anode-supported SOFC with an ~8 micron-thick YSZ electrolyte. In comparison with a 1 micron-thick nano-structure single-phase LSM cathode fabricated by PLD, it was obviously effective to increase triple phase boundaries (TPB) over the whole thickness of the cathode layer by employing the composite and increasing the physical thickness of the cathode. Both polarization and ohmic resistances of the cell were significantly reduced and the power output of the cell was improved by a factor of 1.6.