• Title/Summary/Keyword: chemical correlation

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A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing

  • Kim, Sang-Yong;Chung, Hun-Sang
    • Transactions on Electrical and Electronic Materials
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    • v.2 no.3
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    • pp.24-27
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    • 2001
  • The end point of oxide chemical mechanical polishing (CMP) have determined by polishing time calculated from removal rate and target thickness of oxide. This study is about control of oxide removal amounts on the shallow trench isolation (STI) patterned wafers using removal rate and thickness of blanket (non-patterned) wafers. At first, it was investigated the removal properties of PETEOS blanket wafers, and then it was compared with the removal properties and the planarization (step height) as a function of polishing time of the specific STI patterned wafers. We found that there is a relationship between the oxide removal amounts of blanket and patterned wafers. We analyzed this relationship, and the post CMP thickness of patterned wafers could be controlled by removal rate and removal target thickness of blanket wafers. As the result of correlation analysis, we confirmed that there was the strong correlation between patterned and blanket wafer (correlation factor: 0.7109). So, we could confirm the repeatability as applying for STI CMP process from the obtained linear formula. As the result of repeatability test, the differences of calculated polishing time and actual polishing time was about 3.48 seconds. If this time is converted into the thickness, then it is from 104 $\AA$ to 167 $\AA$. It is possible to be ignored because process margin is about 1800 $\AA$.

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A Comparative Study on the Chemical Compositions of Precipitations in Sungnam City of Kyunggi Province, Inchon City, Kangneung City of Kangwon Province, and Chongwon-gun of Chungbuk Province (경기도 성남시, 인천시, 강원도 강릉시, 충북 청원군 강수의 화학적 성분에 관한 비교 연구)

  • Park, Kuk-Tae;Moon, Gyung-Eon;Heo, Jeong-Goo;Hong, Hyun-Bok
    • Journal of Environmental Science International
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    • v.4 no.3
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    • pp.133-133
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    • 1995
  • A comparative study on the chemical compositions of precipitations from February 1993 to April 1993 in Sungnam city of Kyunggi province, Inchon city, Kangneung city of Kangwon province, and Chongwon-gun of Chungbuk province has been performed. The metal cation and anion concentrations were measured by atomic absorption spectrometer and ion liquid chromatography, respectively. pH/Ion meter and direct nesslerization method were used for the concentration measurements of $H^+$ and $NH^{4+}$ ions, respectively. The quantitative orders of the cation and anion average concentrations, correlation coefficients between the ion concentrations, and pH values are used for chemical analysis on the environmental pollution and pollutant sources in the urban, surburban, seaside, and rural areas of the Korean Peninsula.

The Correlation between Concepts on Chemical Reaction Rates and Concepts on Chemical Equilibrium in High School Students (고등학생들의 화학반응속도 개념과 화학평형 개념간의 상관관계)

  • Park, Guk-Tae;Kim, Gyeong-Su;Park, Gwang-Seo;Kim, Eun-Suk;Kim, Dong-Jin
    • Journal of the Korean Chemical Society
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    • v.50 no.3
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    • pp.247-255
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    • 2006
  • The purpose of this study was to investigate the correlation between concepts on chemical reaction rates and concepts on chemical equilibrium in high school students. The subjects of the investigation consisted of 120 third grade students attending high school in K city of Kyunggi province. For this study, questionnaire relevant to the subject of chemical reaction rates and chemical equilibrium was developed and the answers were analyzed. As a result of the study, a large percentage of high school students answered questions on reaction rates correctly, but only a small percentage of the students could give explanations. Many high school students answered questions on the rates of forward reactions correctly, but not the questions on the rates of reverse reactions. For the concepts on chemical equilibrium, many high school students gave correct answers when faced with equilibrium questions that only required the understanding of one side of the reaction. But the students could not answer the questions requiring understanding of both forward and reverse reactions as well. Overall, there was a little high correlation between concepts on chemical reaction rates and concepts on chemical equilibrium in high school students. Especially, high school students with little understanding of reverse reaction rates did not understand that chemical equilibrium is a dynamic equilibrium. Also, high school students with little understanding of the collision mechanism regarding chemical reaction rates did not understand the effect of concentration and catalyst factors on chemical equilibrium. And the correlation between concepts on chemical reaction rates and concepts on chemical equilibrium related to concentration and catalyst factors was low. In conclusion, the formation of scientific concepts on chemical reactions rates can decrease misconceptions on chemical equilibrium. Also the teaching-learning method limited to one side of a reaction can cause difficulty in forming the concepts on chemical dynamic equilibrium. Therefore, the development of a teaching-learning method which covers both the forward and reverse reactions can be effective in helping students form the concepts on chemical equilibrium.

Relationship between Chemical Components and their Yields of Red Ginseng Extract Extracted by Various Extracting Conditions (적출조건에 따른 홍삼엑기스의 구성성분 및 수율간의 상관)

  • 성형순;윤석권
    • Journal of Ginseng Research
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    • v.9 no.2
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    • pp.170-178
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    • 1985
  • Korean red ginseng tails was extracted with solutions having various ethanol concentration at the temperature range of 70-100 $^{\circ}C$. Extraction was carried out for 1-5 times of 8 hours at given temperature. The results obtained on physicochemical properties of yields, saponins, sugars, minerals, color and viscosity were analyzed statistically to find the correlation with extracting conditions. A very high positive correlation was found between extraction time and cumulative values of yields of chemical components. Increase in ethanol concentration affected negatively on viscosity, absorbencies and yields of soluble solids and minerals. Some of the properties also showed a high correlation with temperature increase. Equations were also derived from the significant results on correlation analysis.

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A Model for Correlation of Various Solvatochromic Parameters with Composition in Aqueous and Organic Binary Solvent Systems

  • Aziz, Habibi-Yangjeh
    • Bulletin of the Korean Chemical Society
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    • v.25 no.8
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    • pp.1165-1170
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    • 2004
  • The applicability of the combined nearly ideal binary solvent/Redlich-Kister (CNIBS/R-K) equation for correlation of various solvatochromic parameters (SP) with composition is shown employing 84 experimental data sets for aqueous and organic binary solvent systems at temperatures ranging 15 to $75^{\circ}C$. The model provides a simple computational model to correlate/predict different SP values in various binary solvent systems. In proposed equations, $MPD_s$ (mean percentage deviations) are between 0.0500% and 6.9591% in mixtures of dimethyl sulfoxide with 2-methylpropan-2-ol and benzene with 2-methylpropan-2-ol, respectively. Correlation of the calculated and experimental values of various SP give an equation with an overall mean percentage deviation (OMPD) of 1.1900, $R^2$ = 0.99692, s.e = 0.01223 and F = 341925.51. Approximately 70% of the calculated SP values have IPD (individual percentage deviation) lower than one and it is possible to predict unmeasured SP values by using only eight experimental data.

Molecular Dynamics Simulation Studies of a Model System for Liquid Crystals Consisting of Rodlike Molecules in NPT Ensemble

  • Lee, Chang Jun;Sim, Hun Gu;Kim, Un Chun;Lee, Song Hui;Park, Hyeong Suk
    • Bulletin of the Korean Chemical Society
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    • v.21 no.3
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    • pp.310-316
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    • 2000
  • Molecular dynamics simulation studies for thermotropic liquid crystalline systems conposed of rodlike molecules with 6 Lennard-Jones interaction sites wre performed in NPT ensemble. Within the range of temperature studied, the system exhibited isotropic and smectic phase. For the characterization of the smectic phase, we examined the structure of the liquid crystalline phase via the radial distribution function, its longitudinal and transverse components to the director, and other orientational correlation function, its longitudinal and transverse components to the director, and other orientational correlation functions. In the smectic A phase, our results showed a large anisotropy in translational motion (i.e.,$D_⊥ >> D_∥$), and the decay of the collective orientational correlation function of rank two became slower than that of the single particle orientational correlation function of rank one. Comments on the spontaneous growth of orientational order directly from the isotropic phase are given.

Chemical Properties in the Soils of Reclaimed and Natural Tidelands of Southwest Coastal Area of Korea (II) - Distribution of Phosphorus Fractions - (우리나라 서남해안 간척지 및 간석지 토양의 화학적 특성 (II) - 인의 형태별 함량 분포 -)

  • Cho Jae-Young;Koo Ja-Woong;Son Jae-Gwon
    • Journal of The Korean Society of Agricultural Engineers
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    • v.48 no.2
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    • pp.3-9
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    • 2006
  • The chemical fractions of phosphorus were investigated in the soils of reclaimed and natural tidelands of southwest coastal area of Korea. The content of total-P varied to ranged from 322 to 614 mg/kg dry weight with a mean value of 467 mg/kg. The order of different fractions of phosphorus in reclaimed tideland soils was as follows: 1) inorganic phosphorus: Ca-P > Fe-P > Al-P > reductant soluble Fe-P. 2) organic phosphorus: Inositol-P > nucleic acid-P > phospholipid-P. The content of Al-P showed negative correlation with organic matter content but showed positive correlation with pH. The content of Fe-P showed negative correlation with clay mineral content but showed positive correlation with organic matter content. Reductant soluble Fe-P and Ca-P were no correlation with soil properties. The content of inositol-P showed highly positive correlation with clay mineral, organic matter content, and CEC.

Correlation of Rates of Solvolysis of Phenyl Chlorodithioformate

  • An, Sun-Kyoung;Yang, Jin-Soon;Cho, Jun-Mi;Yang, Ki-yull;Lee, Jong-Pal;Bentley, T.W.;Lee, Ik-choon;Koo, In-Sun
    • Bulletin of the Korean Chemical Society
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    • v.23 no.10
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    • pp.1445-1450
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    • 2002
  • Solvolytic rate constants at 25 $^{\circ}C$ are reported for solvolysis of chlorodithioformate (1) in binary mixtures of water with acetone, ethanol, methanol, methanol-d, 50%methanol-d/50%D2O, and 2,2,2-trifluroethanol (TFE), and also in TFE-ethanol mixtures. The Grunwald-Winstein plot shows that the three aqueous mixtures exhibit dispersions into separate line. The correlation is improved only slightly by additional parameters NT for solvent nucleophilicity and/or I for aromatic ring parameter. Rate ratios in solvents of the same $Y_cl$ value, having different nucleophilicity provide measures of the minimum extent of nucleophilic solvent assistance, and the value of 3.35 for $[$k_{40EW}$/$k_97TFE$]_Y$ (EW = ethanol-water), is consistent with an essentially SN1 reaction mechanism. This study has shown that the magnitude of l, m and h values associated with a change of solvent composition is able to predict the SN1 reaction mechanism. log(k/$k_o$) = mY + lN + hI

A Comparative Study on the Chemical Compositions of Precipitations in Sungnam City of Kyunggi Province, Inchon City, Kangneung City of Kangwon Province, and Chongwon-gun of Chungbuk Province (경기도 성남시, 인천시, 강원도 강릉시, 충북 청원군 강수의 화학적 성분에 관한 비교 연구)

  • 박국태;문경언
    • Journal of Environmental Science International
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    • v.4 no.3
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    • pp.285-294
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    • 1995
  • A comparative study on the chemical compositions of precipitations from February 1993 to April 1993 in Sungnam city of Kyunggi province, Inchon city, Kangneung city of Kangwon province, and Chongwon-gun of Chungbuk province has been performed. The metal cation and anion concentrations were measured by atomic absorption spectrometer and ion liquid chromatography, respectively. pH/Ion meter and direct nesslerization method were used for the concentration measurements of $H^+$ and $NH^{4+}$ ions, respectively. The quantitative orders of the cation and anion average concentrations, correlation coefficients between the ion concentrations, and pH values are used for chemical analysis on the environmental pollution and pollutant sources in the urban, surburban, seaside, and rural areas of the Korean Peninsula.

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Relationship between Plant Species Covers and Soil Chemical Properties in Poorly Controlled Waste Landfill Sites

  • Kim, Kee-Dae;Lee, Eun-Ju
    • Journal of Ecology and Environment
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    • v.30 no.1
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    • pp.39-47
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    • 2007
  • The relationships between the cover of herbaceous species and 15 soil chemical properties (organic carbon contents, total N, available P, exchangeable K, Na, Ca and Mg, HCl-extractable Cd, Cr, Cu, Fe, Mn, Ni, Pb and Zn) in nine poorly controlled waste landfill sites in Korea were examined by correlation analysis and multiple regression equations. Species showed different patterns of correlation between their cover values and soil chemical properties. The cover of Ambrosia artemisiifolia var. elatior, Aster subulatus var. sandwicensis and Erechtites hieracifolia were negatively correlated with the contents of Fe, Mn and Ni within landfill soils. Total cover of all species in quadrats was positively correlated with the contents of Cd and negatively correlated with the contents of Mn and Fe from stepwise regression analysis with 15 soil properties. Canonical correspondence analysis demonstrated that the distribution of native and exotic plants on poorly controlled landfills was significantly influenced by the contents of Na and Ca in soils, respectively.