• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.333-333
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• 2011

We have investigated the breakdown properties in liquids by high voltage pulse system. High voltage pulse power system is consisted of the Marx-generator with two capacitors (0.5 ${\mu}F$, withstanding voltage is 40 kV), to which the charging voltage can be applied to maximum 30 kV DC, spark gap switch and charging resistor of 20 $M{\Omega}$. We have made use of tungsten pin electrodes of anode-cathode (A-K), which are immersed into the liquids. The breakdown voltage and current signals are measured by high voltage probe (Tektronix P6015A) and current monitor (IPC CM-1.S). Especially the high speed breakdown or plasma propagation characteristics in the pulsed A-K gap have been investigated by using the high speed ICCD camera. We have measured the electron temperature through the Boltzmann plot method from the breakdown spectrums. Here the A-K gap has been changed by 1 mm, 2 mm, and 3 mm. The used liquids are distilled water and solution of salt (0.9 %). The output voltage and current signals at breakdown in distilled water are shown to be bigger than those in saline solution. The breakdown voltage and current characteristics in liquids will be discussed in accordance with A-K gap distances. It is also found that the electron temperatures and plasma densities in liquids are decreased in conformity with A-K gap.

• 한국음향학회지
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• 제42권1호
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• pp.57-66
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• 2023

본 연구에서 제안한 에너지 하베스팅 장치는 입구가 넓고 출구가 좁은 퍼넬형 에너지 하베스터(Funnel Type Energy Harvester, FTEH)에 Macro Fiber Composite(MFC)가 외팔보 형태로 장착되어 있는 구조로서 MFC의 구조를 변화 시켰을 때 FTEH에 수확하는 에너지양의 특성을 이론과 실험을 통하여 분석하였다. MFC의 길이를 50 % 증가 시켰을 때 진동 변위는 3.5배 증가하였고, 두께를 75 % 감소시 30.9배 증가하였다. 수조 실험에서 최대 전력량은 스파이럴 스크루가 장착된 상태의 유연한 지지대에 수직으로 설치된 MFC가 스파이럴 스크루가 없고 견고한 지지대에 수평으로 설치된 경우보다 약 5배 정도 높았다. FTEH에 최적저항 4,010 kΩ을 적용하여 유속 0.24 m/s일 때 FTEH의 출력을 350 s 동안 커패시터에 에너지를 저장하면 4 ㎼·s에 도달하였다. 빠른 유속으로 유연한 지지대에 수직으로 설치된 대면적 MFC의 커패시터 충전 시간을 길게 하면 충전 에너지를 증가시킬 수 있음을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1066_1067
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• 2009

Wind power is one of most promising renewable energy. The output capacity of large wind turbine has been increased for off-shore application. Number of installation of small wind turbine also has been increased for the stand-alone and off-grid application of remote area and recently small wind turbine equipped with lamp on the pole is used for street lamp. Maximum wind energy must be extracted by wind turbine within rated wind speed. Power must be controlled to protect the system such as blade, generator, and power system above the rated wind speed. In this paper, small wind power system of 800W rating for battery charging is implemented and output power control by furling system is verified at wind tunnel test.

• 연구논문집
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• 통권27호
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• pp.153-166
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• 1997

In industry pneumatic control system has become a important means to obtain automation because of its simplicity, fast speed and low cost. However Due to of the compressibility of air and damping friction between moving parts, it is difficult to achieve high speed driving, accurate positioning and stopping without overshoot in one pneumatic control system. This paper describes the dynamic behaviors of pneumatic linear actuator. The results will be very useful in the prediction of actuated dynamics and for the manufacturers to improve the techniques in their redesign and get better performance. Also, the experimental data is very important for the dynamic simulation and theoretical analysis.

• 오토저널
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• 제13권6호
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• pp.48-56
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• 1991

This paper describes the experimental investigations on the pressure variations of intake and exhaust manifold and mass flow rate through exhaust turbine of turbocharged 6-cylinder diesel engine. The turbocharger of experimental diesel engine is constructed with the radial ty pe exhaust turbine and blower driven by exhaust gases. The pressure variations were measur ed by pressure transducer at the points such as turbine inlet and outlet, compressor inlet and outlet, and inlet pipe and exhaust manifolds for normal and combined charging engines with the change of engine speed. The experimental results of this study show that the mass flow rate of exhaust turbine and the variations of pressure in intake and exhaust manifold are all increased with the increase of engine speed.

• 한국안전학회지
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• 제12권2호
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• pp.65-69
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• 1997

Especially, Fiber glass Reinforced Plastics(FRP) is the best composite insulating material which has been so far. Therefore, it's worthy of notice to investigate on the corona electrified composite insulating material by surface condition. And then some other materials will be focussed on. In this study, charge decay were measured with charging-time and grid voltage on FRP composite material surface in order to analyze the mechanism. As a result we have studied that the way of the composite glass fiber(GF) and Polymer and the condition of the contaminated surface was different. In case of the GF is mixed with vertical, charge decay speed is fast because the charge is easily leaked. On the other hand, the surface charge decay speed is depend on conductive or insulated of the contaminant.

• 디지털콘텐츠학회 논문지
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• 제9권1호
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• pp.69-75
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• 2008

VOD (Video-on-Demand) 서비스는 사용자가 원하는 비디오를 언제든지 볼 수 있도록 해 준다. 고속의 컴퓨터 네트워크의 발달로 웹 기반 VOD 서비스가 가능하게 되었다. VOD 서비스를 지원하기 위해서는 요금 부과 기법이 필요하다. VOD 요금 부과 기법으로 사용자가 시청한 분량에 따라 요금을 부과하는 pay-per-view를 생각할 수 있다. VOD에서 사용자의 사생활 보호 또한 중요한 이슈가 된다. 사용자는 자신의 시청 정보를 타인에게 노출시키고 싶지 않을 것이다. 이를 위해서 VOD 서비스에 익명성을 제공할 필요가 있다. 익명성 제공은 VOD 서비스 요금 계산을 복잡하게 한다. 익명성 제공과 요금 계산을 함께 지원하는 VOD 기법이 필요하다. 이 논문에서는 익명성이 제공되는 웹 기반 VOD 서비스가 제안된다. 제안된 기법은 사용자의 시청 분량에 따라 요금을 부과하는 pay-per-view 기능을 지원한다.

• 전기학회논문지
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• 제56권5호
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• pp.938-943
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• 2007

In this paper, we show that, in case of piezoelectric micropower generator, just replacing Schottky diodes in the bridge rectifier with ultra-low reverse leakage current diodes improves the mechanical-to-electrical energy conversion efficiency by more than 100%. Experimental and PSPICE simulation results show that, due to the ultra-low leakage current, the charging speed of the circuit employing PAD1 is higher than that of the circuit employing Schottky diodes and the saturation voltage of the circuit employing PAD1 is also higher. This study suggests that , when the internal impedance of source is very large (a few tens of $M{\Omega}$) such that maximum charging current is a few microamperes or less, in order to realize literally the energy scavenging system, ultra-low reverse leakage current diodes should be used for efficient energy conversion. Since low-level vibration is ubiquitous in the environment ranging from human movement to large infrastructures and the mechanical-to-electrical energy conversion efficiency is much more critical for use of these vibrations, we believe that the improvement in the efficiency using ultra-low leakage diodes, as found in this work, will widen greatly the application of piezoelectric micropower generator.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집B
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• pp.903-908
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• 2001

Residual gas acts as a diluent which results in reducing the in-cylinder temperature as well as the flame speed, significantly affecting fuel economy, NOx emissions and combustion stability. Therefore it is important to determine the residual gas fraction as a function of the engine operating parameters accurately. However, the determination of the residual gas fraction is very sophisticated due to the unsteady state of induction and exhaust process. There has been little work toward the development of a generally applicable model for quantitative predictions of residual gas fraction. In this paper, a simple model for calculating the residual gas fraction in SI engines was formulated. The effects of engine operating parameters on the residual gas were also investigated. The amount of fresh air was evaluated through AFR and fuel consumption. After this, from the intake temperature and pressure, the amount of total cylinder-charging gas was estimated. The residual fraction was derived by comparing the total charging and fresh air. This results coincide with measured value very well.