• 대한기계학회논문집B
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• 제27권10호
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• pp.1489-1497
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• 2003

Aerosol charge neutralizers with various radioactive sources have been used to apply an equilibrium charge distribution to aerosols of unknown charge distribution. However, the performance of aerosol charge neutralizers is not well known, especially for highly charged particles. Measurements of highly charged particles are needed in air cleaning devices, e.g. electrostatic precipitator, bag filter with a pre-charger, and electrical cyclone. In this study, the particle charging characteristics of two different aerosol charge neutralizers were experimentally investigated for singly charged monodisperse particles and highly charged polydisperse particles. One has radioactive source of $^{85}$ Kr (beta source, 2 mCi) and the other has $^{210}$ Po (alpha source, 0,5 mCi). The air flow rate passing through each aerosol charge neutralizer was changed from 0.2 to 2.5 L/min. The results show that the charge distribution of singly charged monodisperse particles passing through the $^{85}$ Kr aerosol charge neutralizer is well agreed with the Boltzmann equilibrium charge distribution at an air flow rate of 0.3 L/min, However, it deviates from the equilibrium charge distribution when the air flow rates are 0.6, 1,0, and 1,5 L/min, On the other hands, the effect of air flow rate is insignificant for the $^{210}$ Po aerosol charge neutralizer. The non-equilibrium character in charge distribution of highly charged polydisperse particles passing through the $^{85}$ Kr aerosol charge neutralizer greatly depends on the air flow rate, however it is insensitive to the air flow rate for the $^{210}$ Po aerosol charge neutralizer.

• 대한기계학회논문집B
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• 제27권10호
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• pp.1498-1507
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• 2003

A SMPS(scanning mobility particle sizer) system measures the number size distribution of particles using electrical mobility detection technique. An aerosol charge neutralizer, which is a component of the SMPS, is a bipolar charger using a radioactive source to apply an equilibrium charge distribution to aerosols of unknown charge distribution. However, the performance of aerosol charge neutralizers is not well known, especially for highly charged particles. In this study, the effect of the particle charging characteristics of two aerosol charge neutralizers on the measurement using a SMPS system was experimentally investigated for highly charged polydisperse particles. One has radioactive source of $^{85}$ Kr (beta source, 2 mCi) and the other has $^{210}$ Po (alpha source, 0.5 mCi). The air flow rate passing through each aerosol charge neutralizer was changed from 0.3 to 3.0 L/min. The results show that the non-equilibrium character in particle charge distribution appears as the air flow rate increases although the particle number concentration is relatively low in the range of 1.5∼2x10$^{6}$ particles/㎤. The low neutralizing efficiency of the $^{85}$ Kr aerosol charge neutralizer for highly charged particles can cause to bring an artifact in the measurement using a SMPS system. However, the performance of the $^{210}$ Po aerosol charge neutralizer is insensitive to the air flow rate.

• 한국입자에어로졸학회지
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• 제14권1호
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• pp.17-24
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• 2018

Since the motion of the charged particle strongly depends on its charge characteristics, information on charge distributions of target particles is one of the important variables in aerosol research. In this study, charged distribution of atomized NaCl particles were measured using a Gerdien type ion counter. Two kinds of particle charging conditions were used in this study. First, atomized NaCl particles were passed through an aerosol neutralizer to have a Boltzmann charge distribution, and then its charge distribution was measured. In this case, the portion of uncharged particles was compared with the portion obtained from the Boltzmann charge distribution for verifying the suggested experimental method. Second, same experiment was conducted without the aerosol neutralizer to measure the charge distribution of atomized and un-neutralized NaCl particles. In the conclusion, the portion of uncharged, negatively charged and positively charged particles were 19%, 62% and 20%, respectively, for neutralized particles. The atomized particles, which was generated without the aerosol neutralizer, also had almost a zero charge state, but the standard deviation in charge distribution was larger than that of neutralized particles. The test method proposed in this study is expected to be used in various aerosol research fields because it can obtain simple information on the particle charge characteristics more easily and quickly than the existing test methods.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권6호
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• pp.469-474
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• 1999

Methods and systems to remove static electricity are requested in the field of industry because the static electricity causes a flammable gas explosion or fire and a reduction of production rate in manufacturing semiconductor devices and so on. This paper is a basic study about a new structure of electrode system to control the quantities of generated ions and to solve the problem of dust attachment to needle electrode. In addition, a new type field controlled electrostatic charge neutralizer was proposed, and it could control the electric field in the end of the needle electrode by controlling the voltage of the third electrode around the tip of the needle electrode. As aresult, it was possible to control the quantities of generated ion by controlling the electric field in the needle electrode with the third electrode, which shows the possibilities to solve the nonequilibrium of generated ions in ac power source and the problem of the dust in the needle electrode.

• 센서학회지
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• 제7권2호
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• pp.140-146
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• 1998

정전기는 고집적 반도체소자의 제조공정에서 제품의 제조수율을 감소시키거나, 정전하에 의해 가스폭발이나 화재 등을 일으키는 원인이 되므로 정전기를 제거하기 위한 수단이나 장치가 필수적으로 요구된다. 본 논문에서는 전하중화장치의 사용시간 경과에 따른 침전극 마모 및 분진부착 특성에 대해서 실험적으로 연구하였다. 또한 전하중화장치의 침전극의 마모 최소화와 발생이온량의 정량적인 제어를 위해 인가전원을 종래의 교류전원 대신에 고주파 펄스전원으로 하여 펄스주파수 및 펄스의 시비율을 변화시킴으로서, 펄스전력을 유효하게 제어할 수 있었으며, 또 펄스전원을 사용함으로서 전하중화장치의 이온 발생특성을 크게 할 수 있음을 실험적으로 확인하였다.

• Safety and Health at Work
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• 제8권3호
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• pp.296-305
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• 2017

Background: Surfactant-containing water sprays are commonly used in coal mines to collect dust. This study investigates the dust collection performance of different surfactant types for a range of coal dust particle sizes and charges. Methods: Bituminous coal dust aerosol was generated in a wind tunnel. The charge of the aerosol was either left unaltered, charge-neutralized with a neutralizer, or positively- or negatively-charged using a diffusion charger after the particles were neutralized. An anionic, cationic, or nonionic surfactant spray or a plain water spray was used to remove the particles from the air flow. Some particles were captured while passing through spray section, whereas remaining particles were charge-separated using an electrostatic classifier. Particle size and concentration of the charge-separated particles were measured using an aerodynamic particle sizer. Measurements were made with the spray on and off to calculate overall collection efficiencies (integrated across all charge levels) and efficiencies of particles with specific charge levels. Results: The diameter of the tested coal dust aerosol was $0.89{\mu}m{\pm}1.45$ [geometric $mean{\pm}geometric$ standard deviations (SD)]. Respirable particle mass was collected with $75.5{\pm}5.9%$ ($mean{\pm}SD$) efficiency overall. Collection efficiency was correlated with particle size. Surfactant type significantly impacted collection efficiency: charged particle collection by nonionic surfactant sprays was greater than or equal to collection by other sprays, especially for weakly-charged aerosols. Particle charge strength was significantly correlated with collection efficiency. Conclusion: Surfactant type affects charged particle spray collection efficiency. Nonionic surfactant sprays performed well in coal dust capture in many of the tested conditions.

• 한국안전학회지
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• 제23권4호
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• pp.42-46
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• 2008

Ionizers are essential in various areas of manufacturing industries to protect electrostatic hazards and to reduce inferior products. For ion sources used in the charge neutralizers, there are corona discharge, soft X-ray, ultraviolet and glow discharge. Glow discharge has lots of attractive properties, such as lower discharge sustaining voltage, no generation of ozone, and so on. In this paper, we did an experimental study to trace the mechanism and stabilization of atmospheric pressure glow discharge using the several size and shape of electrodes. As an experimental result, to sustain conditions of atmospheric pressure glow discharge is that discharge voltage is 360V, discharge current is 12mA, apply frequency is 1kHz between electrodes when positive electrode is molybdenum(Mo) and negative electrode is copper(Cu). We confirmed that the mechanism and stabilization of atmospheric glow discharge is deeply concerned with the shape and material of electrode for discharge. Especially, glow discharge in atmospheric pressure was well generated and sustained according with the physical properties used electrode materials, example melting point, thermal conductivity, and etc.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.283-283
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• 2011

본 연구에서는 XRR 측정에 있어 박막두께 표준보급을 하기 위하여 표준물질을 이온빔 스퍼터링 증착법을 이용하여 제작하였다. 시편제작 시 공기 중 노출에 의해 산화가 되지 않는 산화물 박막과 산화물 기판을 선택하였다. 기판 및 타겟물질 등을 변화시키면서 제작된 시편의 특성을 살펴보았다. 사용된 타겟 물질로는 HfO2, Ta2O5, Cr2O3를 사용하였으며, 기판으로는 glass, sapphire, quartz, SiO2(1 ${\mu}m$-thermal oxidation)를 사용하였다. 산화물 타겟을 사용하여 증착 시 타겟 주위로 생기는 전하들의 charge build-up 되는 현상은 neutralizer를 사용함으로써 문제를 해결하였다. 제작된 시편은 XRR을 이용하여 측정하였고, XRR simulation과 curve fitting을 통하여 박막의 두께, 표면 및 계면의 거칠기, 밀도를 평가하였다. 기판으로 사용된 glass, quartz는 타겟 물질과 관계없이 표면 거칠기가 좋지 않아 XRR 반사율이 급격히 떨어지면서 측정되는 각도의 영역이 작아졌다. sapphire로 제작한 시편에서는 측정된 데이터와 simulation의 curve fitting이 양호하지 않았다. 이 문제는 현재 조사중에 있다. SiO2 기판으로 제작한 시편의 경우 타겟 물질과 관계없이 XRR curve fitting 결과가 양호 하였다. 그 중 Cr2O3의 결과가 다른 타겟 물질에 비해 x 2 값이 작았고 반사율 곡선에서의 거칠기와 진폭도 양호하였다. 위 연구결과로써 SiO2 기판을 사용한 Cr2O3 타겟 물질로 제작된 시편이 XRR 박막 두께 표준물질로써 적합한 것으로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.368-368
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• 2008

Ion implantation has been widely developed during the past decades to become a standard industrial tool. To comply with the growing needs in ion implantation, innovative technology for the control of ion beam parameters is required. Beam current, beam profile, ion fractions are of great interest when uniformity of the implant is an issue. Especially, it is important to measure the spatial distribution of beam power and also the energy distribution of accelerated ions. This energy distribution is influenced by the proportion of mass for ion in the plasma generator(ion source) and by charge exchange and dissociation within the accelerator structure and also by possible collective effects in the neutralizer which may affect the energy and divergence of ions. Hydrogen atom has been the object of a good study to investigate the energy distribution. Hydrogen ion sources typically produce multi-momentum beams consisting of atomic ion ($H^+$) and molecular ion ($H_2^+$ and $H_3^+$). In the beam injector, the molecular ions pass through a charge-exchanges gas cell and break up into atomic with one-half (from $H_2^+$) or one-third (from $H_3^+$) according to their accelerated energy. Burrell et al. have observed the Doppler shifted lines from incident $H^+$, $H_2^+$, and $H_3^+$ using a Doppler shift spectroscopy. Several authors have measured the proportion of mass for hydrogen ion and deuterium using an ion source equipped with a magnetic dipole filter. We developed an ion implanter with 50-KeV and 20-mA ion source and 100-keV accelerator tube, aiming at commercial uses. In order to measure the proportion of mass for ions, we designed a filter system which can be used to measure the ion fraction in any type of ion source. The hydrogen and helium ion species compositions are used a filter system with the two magnets configurations.