• Title/Summary/Keyword: ceria

Search Result 232, Processing Time 0.024 seconds

Effect of Yttria and Ceria on Mechanical Properties and Oxidation Behaviors of $\alpha$-Sialon Ceramics ($\alpha$-Sialon 세라믹스의 역학적 성질과 산화거동에 미치는 $Y_2O_3$$CeO_2$의 첨가영향)

  • 이은복;이홍림;조덕호;박원철
    • Journal of the Korean Ceramic Society
    • /
    • v.30 no.11
    • /
    • pp.941-948
    • /
    • 1993
  • The powder mixture of Si3N4-AlN-Y2O3, Si3N4-AlN-CeO2 and Si3N4-AlN-Y2O3-CeO2 system was hot-pressed at 175$0^{\circ}C$ for 2h in N2 to prepare $\alpha$-Sialon ceramics. The mechanical property and oxidation behaviour of the prepared $\alpha$-Sialon ceramics were investigated. At 120$0^{\circ}C$, oxidation resistance was best for the Y2O3 added $\alpha$-Sialon ceramics and oxidation rate increased when the amount of CeO2 increased. But when the mixture of Y2O3 and CeO2 added $\alpha$-Sialon ceramics showed a good oxidation resistance. Fracture toughness of (Y2O3+CeO2) added $\alpha$-Sialon ceramics was higher than Y2O3 added $\alpha$-Sialon ceramics.

  • PDF

CMP characteristics of sputtered Cu films for polishing time (스퍼터된 Cu웨이퍼의 연마횟수에 대한 CMP특성)

  • Lee, Woo-Sun;Son, Dong-Min;Park, Jin-Seong;Kim, Ju-Seung;Jeong, Chan-Mun;Seo, Yong-Jin
    • Proceedings of the KIEE Conference
    • /
    • 2002.11a
    • /
    • pp.122-123
    • /
    • 2002
  • Cu CMP process control for global planarization of semiconductor surface were studied on a platen polisher by using an experimental copper slurry containing ceria as the abrasive component. In order to understand the process. a design of experiment was conducted. From the experiment. the effects of polishing parameters such as polishing pressure, platen speed, and speed of wafer carrier on the removal rate of copper and the uniformity in copper removal were calculated and discussed. In this study, process parameters of Cu CMP and WIWNU(Within Wafer Non Uniformity) were presented.

  • PDF

Characteristic of Addition Oxidizer on the $WO_3$ Thin Film CMP (산화제 첨가에 따른 $WO_3$ 박막의 CMP 특성)

  • Lee, Woo-Sun;Ko, Pi-Ju;Choi, Kwon-Woo;Kim, Tae-Wan;Choi, Chang-Joo;Oh, Geum-Koh;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2004.07a
    • /
    • pp.313-316
    • /
    • 2004
  • Chemical mechanical polishing(CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics(ILD). we investigated the performance of $WO_3$ CMP used silica slurry, ceria slurry, tungsten slurry In this paper, the effects of addition oxidizer on the $WO_3$ CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity.

  • PDF

Global planarization Characteristic of $WO_3$ CMP ($WO_3$ CMP의 광역평탄화 특성)

  • Lee, Woo-Sun;Ko, Pi-Ju;Choi, Kwon-Woo;Lee, Young-Sik;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2003.11a
    • /
    • pp.188-191
    • /
    • 2003
  • Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). we investigated the performance of $WO_3$ CMP used silica slurry, ceria slurry, tungsten slurry. In this paper, the effects of addition oxidizer on the $WO_3$ CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity.

  • PDF

In Vitro Cytotoxicity of Zinc Oxide Nanoparticles in Cultured Statens Seruminstitut Rabbit Cornea Cells

  • Lee, Handule;Park, Kwangsik
    • Toxicological Research
    • /
    • v.35 no.3
    • /
    • pp.287-294
    • /
    • 2019
  • The possibility of eye exposure for workers participating in manufacturing of nanoparticles or consumers using products containing nanoparticles has been reported, but toxicity studies on the eye are scarce. In this study, cytotoxicity of five nanoparticles including silver, ceria, silica, titanium and zinc were tested using Statens Seruminstitut Rabbit Cornea (SIRC) cells. When cells were treated with nanoparticles with concentrations of $1-100{\mu}g/mL$ for 24 hr, zinc oxide nanoparticles showed higher toxicity to cornea cells. $LC_{50}$ of zinc oxide nanoparticles was less than $25{\mu}g/mL$ but those of other nanoparticles could not be calculated in this test, which means more than $100{\mu}g/mL$. Generation of reactive oxygen species was observed, and expression of apoptosis related biomarkers including Bax and Bcl-2 were changed after treatment of zinc oxide nanoparticles, while no other significant toxicity-related changes were observed in cornea cells treated with Ag, $CeO_2$, $SiO_2$ and $TiO_2$ nanoparticles.

Electrical Characterization of Ultrathin Film Electrolytes for Micro-SOFCs

  • Shin, Eui-Chol;Ahn, Pyung-An;Jo, Jung-Mo;Noh, Ho-Sung;Hwang, Jaeyeon;Lee, Jong-Ho;Son, Ji-Won;Lee, Jong-Sook
    • Journal of the Korean Ceramic Society
    • /
    • v.49 no.5
    • /
    • pp.404-411
    • /
    • 2012
  • The reliability of solid oxide fuel cells (SOFCs) particularly depends on the high quality of solid oxide electrolytes. The application of thinner electrolytes and multi electrolyte layers requires a more reliable characterization method. Most of the investigations on thin film solid electrolytes have been made for the parallel transport along the interface, which is not however directly related to the fuel cell performance of those electrolytes. In this work an array of ion-blocking metallic Ti/Au microelectrodes with about a $160{\mu}m$ diameter was applied on top of an ultrathin ($1{\mu}m$) yttria-stabilized-zirconia/gadolinium-doped-ceria (YSZ/GDC) heterolayer solid electrolyte in a micro-SOFC prepared by PLD as well as an 8-${\mu}m$ thick YSZ layer by screen printing, to study the transport characteristics in the perpendicular direction relevant for fuel cell operation. While the capacitance variation in the electrode area supported the working principle of the measurement technique, other local variations could be related to the quality of the electrolyte layers and deposited electrode points. While the small electrode size and low temperature measurements increaseed the electrolyte resistances enough for the reliable estimation, the impedance spectra appeared to consist of only a large electrode polarization. Modulus representation distinguished two high frequency responses with resistance magnitude differing by orders of magnitude, which can be ascribed to the gadolinium-doped ceria buffer electrolyte layer with a 200 nm thickness and yttria-stabilized zirconia layer of about $1{\mu}m$. The major impedance response was attributed to the resistance due to electron hole conduction in GDC due to the ion-blocking top electrodes with activation energy of 0.7 eV. The respective conductivity values were obtained by model analysis using empirical Havriliak-Negami elements and by temperature adjustments with respect to the conductivity of the YSZ layers.

Enhanced Catalytic Activity of Cu/Zn Catalyst by Ce Addition for Low Temperature Water Gas Shift Reaction (Ce 첨가에 따른 저온수성가스전이반응용 Cu/Zn 촉매의 활성 연구)

  • Byun, Chang Ki;Im, Hyo Bin;Park, Jihye;Baek, Jeonghun;Jeong, Jeongmin;Yoon, Wang Ria;Yi, Kwang Bok
    • Clean Technology
    • /
    • v.21 no.3
    • /
    • pp.200-206
    • /
    • 2015
  • In order to investigate the effect of cerium oxide addition, Cu-ZnO-CeO2 catalysts were prepared using co-precipitation method for water gas shift (WGS) reaction. A series of Cu-ZnO-CeO2 catalyst with fixed Cu Content (50 wt%, calculated as CuO) and a given ceria content (e.g., 0, 5, 10, 20, 30, 40 wt%, calculated as CeO2) were tested for catalytic activity at a GHSV of 95,541 h-1, and a temperature range of 200 to 400 ℃. Cu-ZnO-CeO2 catalysts were characterized by using BET, SEM, XRD, H2-TPR, and XPS analysis. Varying composition of Cu-ZnO-CeO2 catlysts led the difference characteristics such as Cu dispersion, and binding energy. The optimum 10 wt% doping of cerium facilitated catalyst reduction at lower temperature and improved the catalyst performance greatly in terms of CO conversion. Cerium oxide added catalyst showed enhanced activities at higher temperature when it compared with the catalyst without cerium oxide. Consequently, ceria addition of optimal composition leads to enhanced catalytic activity which is attributed to enhanced Cu dispersion, lower binding energy, and hindered Cu metal agglomeration.

Intrinsic and Extrinsic Defects and Their Itinerant Electronic Conductivity of Ceria (본성 및 외성 영역에서 Ceria 의 결함구조 및 자유전자 전도도)

  • Keu Hong Kim;Hyun Koen Suh;Young Sik Kwon;Jae Shi Choi
    • Journal of the Korean Chemical Society
    • /
    • v.31 no.5
    • /
    • pp.389-394
    • /
    • 1987
  • The electrical conductivity of CeO$_2$ has been measured in the temperature range of 300 to 1000${\circ}$C under the oxygen pressures of 10$^{-5}$ to 10$^{-1}$ atm. Plots of log ${\sigma}$ vs. 1/T at constant PO$_2$ are found to be linear with an inflection, and the activation energy obtained from the slopes appears to be 2.16 eV for the intrinsic region. The conductivity dependences on PO$_2$ at the above temperature range are closely approximated by ${\sigma}$ ${\alpha}$PO$_2^{-1/4}$ for the intrinsic and ${\sigma}$ ${\alpha}$PO$_2^{-1/6.2}$ for the extrinsic, respectively. The dominant defects in this sample are believed to be Ce$^{3{\cdot}}$ interstitial for the intrinsic and the (Vo-2e') for the extrinsic range. The interpretations of conductivity dependences on temperature and $PO_2$ are presented, and conduction mechanisms are proposed to explain the data.

  • PDF

Microstructure of Yttria-doped Ceria-Stabilized Zirconia Polycrystals (Yttria를 도핑한 세리아 안정화 지르코니아 세라믹스의 미세구조)

  • Lee, J.K.;Kang, H.H.;Seo, D.S.;Lee, E.G.;Kim, H.
    • Korean Journal of Materials Research
    • /
    • v.9 no.8
    • /
    • pp.768-774
    • /
    • 1999
  • Yttia-doped ceria-stabilized ziconia polycrystals(Ce-TZP) was prepared by dipping method and its microstructure was investigated. By controlling doped-yttria content and annealing condition, yttria-doped Ce-TZP showed the microstructure with irregular grain shape and undulated grain boundary. Irregularity of grain shape increased with the amount of yttria doped, and severe undulated grain boundary was observed mainly at the surface region. In the case of yttria-doped Ce-TZP annealed at 1$650^{\circ}C$ for 2h after two dipping times into yttrium nitrate solution of 0.2M, it showed irregular grain shape both at the surface and at the interior region as well as the most severe irregularity. Hot pressed specimen had mean grain size of 0.3$\mu\textrm{m}$ and undulated grain boundary. All specimens with irregular grain shape were retained the tetragonal phase. The fracture toughness of yttria-doped Ce-TZP with irregular grain shape was over the value of 17.6MPa.m(sup)1/2.

  • PDF

Effect of Co-catalyst CeO2 on NOx Reduction in PtNi/W-TiO2 Catalysts for Low-temperature H2-SCR (저온 H2-SCR용 PtNi/W-TiO2 촉매에 조촉매 CeO2가 NOx 저감에 미치는 영향)

  • Jungsoo Kim;Younghee Kim
    • Clean Technology
    • /
    • v.29 no.4
    • /
    • pp.313-320
    • /
    • 2023
  • In order to increase the usability of H2-SCR, the NOx removal characteristics with catalyst powder of PtNi/CeO2-W-TiO2 using Ce as a co-catalyst was synthesized and coated on a porous metal structure (PMS) were evaluated. Catalyst powder of PtNi/CeO2-W-TiO2(PtNi nanoparticles onto W-TiO2, with the incorporation of ceria (CeO2) as a co-catalysts) was synthesized and coated onto a porous metal structure (PMS) to produce a Selective Catalytic Reduction (SCR) catalyst. H2-SCR with CeO2 as a co-catalyst exhibited higher NOx removal efficiency compared to H2-SCR without CeO2. Particularly, at a 10wt% CeO2 loading ratio, the NOx removal efficiency was highest at 90℃. As the amount of catalyst coating on PMS increased, the NOx removal efficiency was improved below 90℃, but it was decreased above 120℃. When the space velocity was changed from 4,000 h-1 to 20,000 h-1, the NOx removal efficiency improved at temperatures above 120℃. It was expected that the use of the catalyst could be reduced by applying the PMS with excellent specific surface area as a support.