• 제목/요약/키워드: carbon precursor

검색결과 422건 처리시간 0.026초

Change the Properties of Amorphous Carbon Hardmask Film Prepared with the Variation of Process Parameters in Plasma Enhanced Chemical Vapor Depostion Systems

  • Kim, Seok Hwan;Yeo, Sanghak;Yang, Jaeyoung;Park, Keunoh;Hur, Gieung;Lee, Jaeho;Lee, Jaichan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.381.2-381.2
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    • 2014
  • In this study the amorphous carbon films were deposited by PECVD at the substrate temperature range of 250 to $600^{\circ}C$, and the process conditions of higher and lower precursor flow rate, respectively. The temperature was a main parameter to control the density and mirco-structures of carbon films, and their's properties depended with the process temperatrue are changed by controlling precursor flow rate. The precursor feeding rate affect on the plasma ion density and a deposition reactivity. This change of film properties was obtained the instrinsic stress, FT-IR & Raman analysis, refractive index (RI) and ext. coef. (k) measured by ellipsometer. In the process conditions of lower and higher flow rate of precursor it had a different intrinsic stress as a function of the substrate temperature.

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레이저 국소증착에 의한 탄소 미세 구조물 제조 및 분광분석 (Fabrication of micro carbon structures using laser-induced chemical vapor deposition and Raman spectroscopic analysis)

  • 한성일;김진범;;정성호
    • 한국레이저가공학회지
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    • 제5권2호
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    • pp.17-22
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    • 2002
  • Characteristics of micro carbon structures fabricated with laser-induced chemical vapor deposition (LCVD) are investigated. An argon ion laser (λ=514.5nm) and ethylene gas were utilized as the energy source and precursor, respectively. The laser beam was focused onto a graphite substrate to produce carbon deposit through thermal decomposition of the precursor. Average growth rate of a carbon rod increased for increasing laser power and pressure. Micro carbon rods with good surface quality were obtained at near the threshold condition. Micro carbon rods with aspect ratio of about 100 and micro tubular structures were fabricated to demonstrate the possible application of this method to the fabrication of three-dimensional microstructures. Laser Raman spectroscopic analysis of the micro carbon structures revealed that the carbon rods are consisting of amorphous carbon.

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탄소나노섬유 모형을 이용한 천공된 다각형 코발트 산화물 합성 (Synthesis of Perforated Polygonal Cobalt Oxides using a Carbon Nanofiber Template)

  • 신동요;안건형;안효진
    • 한국분말재료학회지
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    • 제22권5호
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    • pp.350-355
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    • 2015
  • Perforated polygonal cobalt oxide ($Co_3O_4$) is synthesized using electrospinning and a hydrothermal method followed by the removal of a carbon nanofiber (CNF) template. To investigate their formation mechanism, thermogravimetric analysis, field-emission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy are examined. To obtain the optimum condition of perforated polygonal $Co_3O_4$, we prepare three different weight ratios of the Co precursor and the CNF template: sample A (Co precursor:CNF template- 10:1), sample B (Co precursor:CNF template-3.2:1), and sample C (Co precursor:CNF template-2:1). Among them, sample A exhibits the perforated polygonal $Co_3O_4$ with a thin carbon layer (5.7-6.2 nm) owing to the removal of CNF template. However, sample B and sample C synthesized perforated round $Co_3O_4$ and destroyed $Co_3O_4$ powders, respectively, due to a decreased amount of Co precursor. The increased amount of the CNF template prevents the formation of polygonal $Co_3O_4$. For sample A, the optimized weight ratio of the Co precursor and CNF template may be related to the successful formation of perforated polygonal $Co_3O_4$. Thus, perforated polygonal $Co_3O_4$ can be applied to electrode materials of energy storage devices such as lithium ion batteries, supercapacitors, and fuel cells.

폴리아크릴로나이트릴/리그닌 복합소재로부터 생성된 탄소 필름의 전기적 성질 및 흡착 성능 (Preparation of Carbon Films from Polyacrylonitrile@Lignin Composites, and Their Electrical Properties and Adsorption Behavior)

  • 배준원
    • 공업화학
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    • 제34권2호
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    • pp.106-110
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    • 2023
  • 리그닌(lignin)은 고분자와 혼합될 수 있고 탄화도 가능하므로 효용성이 크다. 본 실험에서는, 탄화에 유리한 고분자인 폴리아크릴로나이트릴(polyacrylonitrile, PAN)과 리그닌을 혼합하여 탄소 전구체(precursor)로 제조하고, 탄화(carbonization)하여 안정한 탄소 필름이 제어된 탄화 과정을 통해 제조되었다. 얻어진 탄화 소재의 형태적, 전기적 특성들이 분석되었으며, 흡착 성능이 실험적으로 제시되었다. 탄소 전구체 복합소재의 형성은 적외선 분광기(Fourier-transform infrared, FT-IR)를 통해 확인하였고, 생성된 탄소 필름의 외형적 특성은 주사전자현미경(scanning electron microscope, SEM)을 이용하여 고찰하였다. 이를 통해 전구체 필름의 구조적 안정성이 탄화 이후에도 유지됨을 확인하였으며, 필름 내부에 존재하는 리그닌의 흔적도 고찰할 수 있었다. 탄소 필름의 미세 구조는 라만(Raman) 분광기를 통해 분석하였으며, 표면적 및 기공 구조는 BET (Brunauer-Emmett-Teller) 법으로 측정하여, 비교적 균일한 기공이 형성됨을 확인하였다. 탄소 시료의 전기적 특성도 고찰하여, 흡착 소재로서 사용 가능함을 확인하였고, 흡착(adsorption) 테스트를 통해 금속 양이온을 효율적으로 제거할 수 있음을 증명하였다. 본 연구는 해당 분야 향후 연구에 중요한 정보를 제공할 것이다.

Porosity Development on Activation of Char from Dry and Wet Babbool Wood

  • Manocha, Satish;Chauhan, Vanraj B.;Manocha, L.M.
    • Carbon letters
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    • 제3권3호
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    • pp.133-141
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    • 2002
  • It is well known that the porosity and adsorption capacity in a carbon depends on the nature of precursor, pyrolysis and activation conditions and the ash content. The studies on carbon prepared from the dry and wet babbool wood were under taken to ascertain the effect of initial state of precursor on the development of porosity in the resulting activated carbon. The characterization and adsorption studies carried out shows the presence of mainly mesoporosity in the carbon prepared from dry wood while more of microporosity was observed in the activated carbon prepared from wet wood. The results on porosity in both the cases have been compared and correlated with their processing conditions.

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Properties of Precursor Pitch Derived from Petroleum Residue

  • 유해일;이규동;권영배
    • 한국기계연구소 소보
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    • 통권15호
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    • pp.37-46
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    • 1985
  • Properties of Precursor pitch derived from petroleum residue were studied physical and chemical analysis method for investigation of production of pitch fiber. For preparing of those precursor pitches it was carried out a temperature and time variation experiment i reactor. It was demonstrated the precursor pitch prepared in this study to have a similar properties to Ashland precursor pitch capable of bulk mesophase formation from the results of the basic analysis, that is, molecular weight distribution, coking yield, carbon content, chemical composition, etc.

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Graphitic Mesostructured Carbon from an Aliphatic Hydrocarbon Precursor

  • Kim, Chy-Hyung;Oh, Teresa
    • Bulletin of the Korean Chemical Society
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    • 제30권9호
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    • pp.1978-1980
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    • 2009
  • A mesostructured form of carbon was fabricated from a template of mesostructured silica by using pentane, an aliphatic hydrocarbon precursor. To synthesize the mesostructured silica, a buffered (pH of 6.5) mixture of nonionic Pluronic P123 surfactant, sodium silicate, and acetic acid were used. The impregnated silica with Fe$(CO)_5$ (wt 5%) and pentane was placed in a quartz tube, treated with pentane vapor at 800 ${^{\circ}C}$ for two hours to synthesize the mesostructured carbon. The XRD patterns of the carbon replica in the low/wide angle regions, its TEM images, and nitrogen adsorption-desorption isotherm revealed that the long-range framework order of mesostructure with the pore size centered on 2.8 nm was maintained to some extent mainly due to some portions of mesophase carbon that work as a support to fix the hexagonal frameworks by anchoring on the pore surface with an improved graphitic character. The dc conductivity of the mesostructured carbon in pressed powder form at 6.0 MPa was 2.08 S/cm.

Preparation of Carbon Fiber from Heavy Oil Residue through Bromination

  • Park, Young-Ok;Yang, Kap-Seung
    • Fibers and Polymers
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    • 제2권4호
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    • pp.178-183
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    • 2001
  • A pitch precursor for a general purpose carbon fiber was prepared by condensation of pyrolized fuel oil (petroleum residual oil) with bromine under nitrogen blowing. such a condensation raised the softening point of the pitch from 4$0^{\circ}C$ to $265^{\circ}$ with a yield of 43%. The pitch precurosr showed an enhanced aromaticity and enlarged molecular size, which led to a reduction in molecular mobility and optical isotropy. The precursor was spun into fibers of $20\mu\textrm{m}$ diameter at a take-up speed of 700m/min. The fiber was stepwise stabilized in air and carbonized in Ar gas to obtain an isotropic carbon fiber. The carbon fiber exhibited tensile strengths of 500-800 ㎫though the fiber was formed via a crude method. The electric conductivity of the carbon fiber was relatively high, 2.2$\times$$10^2$S/cm, sufficient to be used as electrode materials.

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액상수은 제어를 위한 다공성 탄소입자 제조에 관한 연구 (Synthesis of Porous Carbon Particles for the Absorption of Mercury)

  • 이정민;강신재;박수진
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 추계학술대회 논문집
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    • pp.305-305
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    • 2009
  • The carbon nano-structured materials could be applied to the fields of advanced fillers, templates, electrode materials, sensor, storage, and absorption materials. The polyacrylonitrile (PAN) based carbon nano-particles provide the remarkable properties of high specific surface area, large pore volume, chemical inertness, and good mechanical stability. In this study, well-defined carbon nano-particles were obtained through pyrolysis of polyacrylonitrile based particles. The precursor nano-particles were prepared by modified aqueous dispersion polymerization using hydrophilic poly(vinyl alcohol) in a water/ N,N-dimethylformamide mixture media. Synthesized precursor nanoparticles have relatively monodisperse particles ranging 80 ~ 250nm. Stable spherical particles are obtained without coagulum or secondary particles in our system. The characteristic of the carbon nanoparticles were investigated in terms of surface area, morphology, and size distribution.

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Purification of Water Contaminants Using Activated Carbon Fiber Filter with Phenolic Resin Coated on Glass Fibers as a Precursor

  • Baek, Il-Hyun
    • Carbon letters
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    • 제1권2호
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    • pp.82-86
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    • 2000
  • The present research was undertaken to evaluate the possibility of water purification filter with activated carbon fibers (ACFs) using a very low cost precursor consisting of phenolic resin coated on glass fibers. The simplified procedure involving coating, curing and activation and a very low cost glass fiber as a raw material were adopted in order to reduce manufacturing cost. The breakthrough curves of the manufactured ACFs and the commercial activated carbon (AC, Calgon F-200) were investigated in the initial concentration range from 19 to 49 ppm for benzene, toluene and ethylbenzene. From breakthrough profiles, the manufactured ACFs had significantly faster adsorption kinetics than the AC. Especially the benzene breakthrough curves, the manufactured ACF (13 g of ACF with 32% of carbon on the glass) was over the limited level (5 ppb) after flowing of 32 l at initial concentration of 15 ppm, while the commercial AC was shown about 3 ppm in initial adsorption.

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