• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
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• pp.611-615
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• 1994

In this paper, the sensitivity, linearity and temperature drift characteristics of various capacitive force sensors are evaluated and compared using new experimental methods. In particular, two designs were employed to reduce temperature drift. Both types of sensor use high-sensitivity Al coated PET film, and their externals are miniaturized. The first has a layered design consisting of two dielectric substances with different temperature characteristics. The prototype of this design had a temperature drift of only 0.1% of the sensor's capacity in the 20-80.deg. C range. The second type uses both a dummy sensor ind an active sensor with the same characteristics. The temperature drift of the prototype was one-fifth the temperature drift of a single sensor.

• 전기전자학회논문지
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• 제17권3호
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• pp.234-240
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• 2013

본 논문에서는 단일-극 커패시터 방식의 터치센서를 위한 incremental 델타-시그마 아날로그-디지털 변환기를 설계하였다. 델타-시그마 모듈레이터의 구조는 단일비트 2차 cascade of integrators with distributed feedback(CIFB)를 사용하였으며 $0.18-{\mu}m$ CMOS 공정을 이용하여 제작하였다. Incremental 델타-시그마 아날로그-디지털 변환기의 입력으로 이어지는 센서가 넓은 입력 범위를 얻고 높은 정확성을 가지도록 변환기 앞에 shielding 신호와 디지털적으로 조절 가능한 오프-셋 커패시터를 위치시켰다. 본회로의 공급전압은 2.6 V에서 3.7 V이며 ${\pm}10-pF$의 입력범위를 가지고 fF 이하의 해상도를 필요로 하는 단일-극 커패시터 방식의 터치센서에 적합하다.

• 전기학회논문지
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• 제59권6호
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• pp.1087-1094
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• 2010

We have developed a cylindrical multi-terminal capacitive-conductive sensor that could be attached to the internal surface of cooling system pipe to evaluate capacitance and conductivity of heat transfer fluid. It was used as measuring system to diagnose insulating condition, by which was kept a insulating resistance of inner stack and at the same time was cooled electrochemical heat of reaction of FCEV(fuel cell electric vehicle) stack that used a compressed hydrogen gas reacting with oxygen in accordance with variation on thermal degradation of nonconductive heat transfer fluid. Also to assess diagnosis characteristics of heat transfer fluid, i.e. coolant, we have performed accelerated aging test using developed sensor attached to cooling system. Consequently, it was measured dielectric and electric resistance of coolant to estimate and analyse for dielectric properties by degradation condition.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 ICEIC The International Conference on Electronics Informations and Communications
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• pp.82-85
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• 2004

This paper proposes an advanced circuit for the capacitive type fingerprint sensor signal processing and an effective isolation structure for minimizing an electrostatic discharge(ESD) influence and for removing a signal coupling noise of each sensor pixel. The proposed detection circuit increases the voltage difference between a ridge and valley about $80\%$ more than old circuit. The test chip is composed of $160\;\times\;192$ array sensing cells $(9,913\times11,666\;um^2).$ The sensor plate area is $58\;\times\;58\;um^2$ and the pitch is 60um. The image resolution is 423 dpi. The chip was fabricated on a 0.35um standard CMOS process. It successfully captured a high-quality fingerprint image and performed the registration and identification processing. The sensing and authentication time is 1 sec(.) with the average power consumption of 10 mW at 3.0V. The reveal ESD tolerance is obtained at the value of 4.5 kV.

• 센서학회지
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• 제26권2호
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• pp.101-106
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• 2017

A novel intravenous (IV) infusion monitoring sensor is presented to measure the drop rate in the drip chamber of an IV infusion set. It is based on a capacitive proximity sensor and detects the variation of the longitudinal electric field induced by the drop falling into the drip chamber. Unlike the conventional capacitor sensor with two semi-cylindrical conductor plates, the proximity sensor for IV monitoring is composed of a pair of conductor rings which are mounted on the outer surface of the drip chamber with a specific gap between them. The characteristics of the proximity sensor for IV monitoring were investigated through three dimensional electrostatic simulations. It showed quite superior performances in comparison with the conventional capacitor sensor. Especially, the proposed proximity sensor exhibits consistent sensitivity regardless of its mounting position on the drip chamber, operates normally though the drip chamber is tilted and shows robustness to the changes of the drop size and the drip factor of the IV infusion set. Thus, the proximity sensor for IV monitoring is more suitable for use in actual environment of IV therapy compared with the conventional capacitor sensor.

• 한국멀티미디어학회논문지
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• 제22권11호
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• pp.1280-1287
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• 2019

For developing a wireless implantable device to monitoring the artery variation in real-time. The concept of a special vessel variation measurement capacitive sensor is presented in this paper. The sensor consists of two part; main sensor to measuring the arterial variation, and reference sensor is used to improve the accuracy of the capacitance value variation. Before sensor manufacture, a model of the sensor attached on the artery was designed in 3D to conduct in the FEA simulation to validate the validity and feasibility of the idea. The artery model was designed as layered structures and made of collagenous soft tissues with intima inside, followed by the media and the adventitia. Also, a grease layer was designed in the inner of the arterial wall to imitate the clogged arteries. The simulation was divided into two parts; sensor performance test by changing the diameter of the grease layer, and arterial wall tension test by changing the blood pressure. As the simulation results, the capacitance value measured by the proposed sensor is decreased follow the diameter of the grease increased. Also, large elastic deformation of the arterial wall since changing the blood pressure has been observed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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• pp.32-37
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• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle system. The main god of our research is to develop technology to produce high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is bang developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. In this paper, we report the selection process of the sensor types and the experimental results with driving circuits.

• JSTS:Journal of Semiconductor Technology and Science
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• 제4권2호
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• pp.128-132
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• 2004

This paper presents the design, fabrication sequence and measurement results of a highly sensitive capacitive-type humidity sensor using a polyimide film without hydrophobic elements. The structure of the humidity sensor is MIM (metalinsulator-metal). For a high sensitivity, a modified aromatic polyimides as a moisture absorbing layer has been synthesized instead of using general polyimides containing hydrophobic elements. The polyimide film was obtained by synthesizing and thermally polymerizing polyamic acid composed of m-pyromellitic dianhydride, phenelenediamine and dimethylacetamide. Characteristics of fabricated sensors which include sensitivity, hysteresis and stability have been measured. The measurement result shows the percent normalized capacitance change of 0.37/%RH over a range from 10 to 90%RH, hysteresis of 0.77% over the same %RH range and maximum drift of 0.25% at 50%RH. The result shows that the developed humidity sensor can be applied to evaluate a hermeticity of various sensors and actuator systems as well as micro packages.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1609-1611
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• 2003

This paper presents the results on the development of capacitive sensor for the diagnosis of electrical insulating oil, widely used for power transformer. To survey the dielectric properties of the new and used mineral insulating oil, we utilized the highly precise measuring system of KRISS. And the results were used to determine the design factors of the sensor. To evaluate the operational and the hysteresis characteristics of the sensor, we constructed a test chamber, including dielectric property measuring system. Through the results we could confirm the superior characteristics of the newly developed sensor.

• 센서학회지
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• 제25권5호
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• pp.310-319
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• 2016

Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of $0.63mV/{\mu}m$ for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of $3{\mu}m/^{\circ}C$ from $20^{\circ}C$ to $30^{\circ}C$, and a monotonic characteristic for the gap between the sensor and the target.