• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.246-246
• /
• 2013

Atomic layer deposition (ALD)에 의해 증착된 알루미늄 산화막($Al_2O_3$)은 고효율 결정질 실리콘 태양전지를 위한 우수한 패시베이션 효과를 보인다. $Al_2O_3$은 고정 음전하를 가지고 있기때문에 p-형 태양전지 후면에서 field effect passivation에 의한 효과적인 표면 패시베이션을 형성한다. 하지만 ALD에 의한 $Al_2O_3$ 증착은 긴 공정시간이 필요하다. 이는 기존의 태양전지 산업에 적합하지 않다. 본 논문에서는 공정 시간의 단축을 위해 plasma-assisted atomic layer deposition (PA-ALD) 기술을 사용함으로서 $Al_2O_3$을 증착했다. PA-ALD 기술은 trimethyaluminum (TMA)와 plasma 분위기에서의 $O_2$ 가스를 사용하여 표면 반응을 한다. $Al_2O_3$ 층의 특성을 최적화하기 위해 증착 온도를 $150{\sim}250^{\circ}C$의 범위에서 가변하고, 열처리 온도와 시간을 변화하였다. 결과적으로, 실리콘 웨이퍼를 이용하여 $1250^{\circ}C$의 공정온도에서 증착한 $Al_2O_3$은 $400^{\circ}C$에서 10분 동안의 열처리 온도와 시간에서 1,610 ${\mu}s$의 최고의 유효 반송자 수명을 보였다.

• Korean Journal of Materials Research
• /
• v.2 no.4
• /
• pp.241-247
• /
• 1992

The direct bonding of Cu to $Al_2O_3$, employing the $Cu-Cu_2$O eutectic skin melt, is investigated. The bonding force and interface structure of samples prepared by oxidation at $1015^{\circ}C$ in $1.5{\times}10^{-1}$torr followed by bonding at 107$5^{\circ}C$ under $10_{-3}$ torr vacuum have been studied using peeling test, SEM, EDS and XRD. It has been found that the optimal strength is obtained for 3 minutes of oxidation while the adhesion force is decreased with oxidation shorter or longer than 3 minutes. The rupture occured at alumina-eutectic interface. Fractured surface of $Al_2O_3$covered with $Cu_2$O nodules pulled out of the Cu indicates that bonding strength is governed by $Cu-Cu_2$O interface and not by $Cu_2$O-A$l_2O_3$interface. The bonding force is slightly increased with bonding time and the reaction phases of CuA$l_2O_4$and $CuAlO_2$are formed at interface during the bonding.

• Korean Journal of Materials Research
• /
• v.10 no.5
• /
• pp.321-327
• /
• 2000

Two kinds of $Al_2O_3/TZP$ composites were prepared using the liquid infiltration of 3Y-TZP and 12Ce-TZP precursors into hte sintered porous $Al_2O_3$. Small TZP additions(~11.0wt%) had increased the strength(19~59%) and fracture toughness(14~157%) of the sintered Al2O3 material($1600^{\circ}C$, 2h). The addition of 3Y-TZP was effective on case of the strength. By the way, in case of the fracture toughness that of 12Ce-TZP was effective. Infiltrated TZP was concentrated on the surface where its grain growth was enhanced and $Al_2O_3$ grain growth was effectively inhibit-ed, when compared to the inner region of the composite. The indentation crack was propagated through both intergranular modes and transgranular and the proportion if intergranular fracture was the larger in $Al_2O_3/12Ce-TZP$.

• Korean Journal of Materials Research
• /
• v.9 no.8
• /
• pp.817-824
• /
• 1999

The $Al_2$$O_3$-SiC composite powder was prepared by Self-propagating High-Temperature Synthesis(SHS) process using $SiO_2$Al and C powders as raw material. The effects of the molar ratio in raw material, compaction pressure, initial temperature of reactants on the products and combustion process were studied. Self-propagating high temperature synthesis of $SiO_2$/Al/C system should be preheated above $400^{\circ}C$ owing to the low combustion temperature. As the result of the combustion reaction, the purity of final product became better than that of reactants. In this system, the optimum molar ratio of $SiO_2$:Al:C was 3.0:4.0:6.0. The free carbon was removed by roasting at $650^{\circ}C$ for 30min. In this study, pressureless sintering was very dffective both for controlling the disintegration of specimen with powder bed and for obtaining dense sintered-body at $1700^{\circ}C$. The sintered-body produced with hot-pressing was about 98% of the theoretical relative density.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.10 no.3
• /
• pp.233-238
• /
• 2000

t-$ZrO_2/Al_2O_3$composites having a superior biocompatability and phase stability were prepared by adding 0~4 mol% of $Eu_2O_3$and sintered for 1 h at $1600^{\circ}C$ to evaluate phase stability, chromaticity and mechanical properties of the composites. No tetragonal to monoclinic phase transformation was observed for the composites containing $Eu_2O_3$after heat treatment for 20 h at $180^{\circ}C$ under 3.5 MPa water vapor pressure condition. As $Eu_2O_3$content increased, the color of the composites was changed from a slight white ivory to a light pink. The strength and the fracture toughness of the composites containing $Eu_2O_3$were above 620 MPa and 7.6 MPa.$m^{1/2}$, respectively, when $Eu_2O_3$was added up to 3 mol%.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2001.05a
• /
• pp.163-163
• /
• 2001

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2000.11a
• /
• pp.160-160
• /
• 2000

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1994.05a
• /
• pp.76-76
• /
• 1994

• Korean Journal of Materials Research
• /
• v.15 no.10
• /
• pp.644-651
• /
• 2005

The thermal analysis of $Al(OH)_3-SiO_2-AIF_3$ system was done. The thermal behaviors of components and the effect of moisture on the formation of mullite were investigated via TG-DTA and XRD analysis. The mixture of $Al(OH)_3,\;SiO_2,\;AIF_3$showed two endothermic peaks with drastic weight loss and one exothermic peak. Fluorotopaz was formed at $800^{\circ}C$ and turned into mullite completely at $1100^{\circ}C$. But the mixture $Al_2O_3$ of or dehydrated $Al(OH)_3$ and $SiO_2$ could not form mullite even at $1200^{\circ}C$ in which the crystalline phases were $\alpha-Al_2O_3$ ana cristobalite. It was found that the synthesized mullite was aciculate shaped single crystalline whisker.

• Korean Journal of Materials Research
• /
• v.3 no.3
• /
• pp.207-214
• /
• 1993

Glass-ceramic monoliths with an ultra-low thermal expansion coefficient have been synthesized by the sol-gel technique using metal alkoxides as starting materials and dimethyl formamide as a drying control chemical additive. The ternary gels: $Li_2O\cdot Al_2O_3\cdot 2, 4 or $6SiO_2$ were obtained by hydrolysis and polycondensation reactions of metal alkoxides of silicon, aluminum and lithium. To produce cylindrical crack-free gel monoliths, excess water was used to the starting solutions and drying rates were controlled precisely to prevent cracking. In conversion process ,${\beta}$-eucryptite, $Li_2O\cdot Al_2O_3\cdot 3SiO_2$ and P-spodumene with ,${\beta}$-quartz solid solution phase were obtained by heating at the range of 750 ~$1000^{\circ}C$. Above $800^{\circ}C$, the ,${\beta}$-spodumene phase increased while ,${\beta}$-eucryptite phase decreased. The thermal expansion coefficient of the crystallized specimens were -15~ $+5{\times}{10^{-7}}/{\circ}C$ over the temperature range from room temperature to $600^{\circ}C$.