• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.61-66
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• 2012

반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 화학적-기계적 연마(CMP: Chemical-Mechanical Planarization) 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 화학적-기계적 연마 공정의 중요성은 더욱 강조되고 있다. 화학적-기계적 연마공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 화학적-기계적 연마 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리(Slurry), 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. 패드 컨디셔닝이란 컨디셔너가 화학적-기계적 연마 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 화학적-기계적 연마 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 스크래치(Scratch) 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 유기박막을 표면에 증착하여 부식을 방지하고자 하였다. 컨디셔너 제작에 사용되는 금속인 니켈과 니켈 합금을 기판으로 하고, 증착된 유기박막으로는 자기조립단분자막(SAM: Self-Assembled Monolayer)과 불화탄소(FC: FluoroCarbon) 박막을 증착하였다. 자기조립단분자막은 2가지 전구체(Perfluoroctyltrichloro silane(FOTS), Dodecanethiol(DT))를 사용하여 기상 자기조립 단분자막 증착(Vapor SAM) 방법으로 증착하였고, 불화탄소막은 10 nm, 50 nm, 100 nm 두께로 PE-CVD(Plasma Enhanced-Chemical Vapor Deposition, SRN-504, Sorona, Korea) 방법으로 증착하여 표면의 부식특성을 평가하였다. 표면 부식 특성은 동전위분극법(Potentiodynamic Polarization)과 전기화학적 임피던스 측정법(Electrochemical Impedance Spectroscopy(EIS)) 등의 전기화학 분석법을 사용하여 평가되었다. 또한 측정된 임피던스 데이터를 전기적 등가회로(Electrical Equivalent Circuit) 모델에 적용하여 부식 방지 효율을 계산하였다. 동전위분극법과 EIS의 결과 분석으로부터 유기박막이 증착된 표면의 부식전류밀도가 감소하고, 임피던스가 증가하는 것을 확인하였다.

• 센서학회지
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• 제20권1호
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• pp.35-39
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• 2011

A disposable electrochemical immunosensor system has been developed for the detection of herbicide in aqueous samples. Disposable screen printed carbon electrodes(SPCE) were used as basic electrodes and an enzyme, horseradish peroxidase (HRP), and anti-herbicide antibodies was immobilised on to the working electrode of SPCE by using avidin-biotin coupling reactions. An herbicide-glucose oxidase conjugates have been used for the competitive immunoreaction with sample herbicides. The enzymatic reaction between the conjugated glucose oxidase and glucose added generates hydrogen peroxide, which was reduced by the peroxidase immobilised. The latter process caused an electrical current change, due to direct re-reduction of peroxidase by a direct electron transfer mechanism, which was measured to determine the herbicides in the sample. The optimal operational condition was found to be: $20\;{\mu}gl-1$ deglycosylated avidin loading to the working electrode and working potential +50 mV vs. Ag/AgCl. The total assay time was 15 min after sample addition. The detection limits for herbicides, atrazine and simazine, were found to be 3 ppb and 10 ppb, respectively.

• Journal of the Optical Society of Korea
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• 제17권5호
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• pp.423-427
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• 2013

We present the preparation and characteristics of liquid-phase sensors based on nano-porous silicon multilayer structures for determination of organic content in gasoline. The principle of the sensor is a determination of the cavity-resonant wavelength shift caused by refractive index change of the nano-porous silicon multilayer cavity due to the interaction with liquids. We use the transfer matrix method (TMM) for the design and prediction of characteristics of microcavity sensors based on nano-porous silicon multilayer structures. The preparation process of the nano-porous silicon microcavity is based on electrochemical etching of single-crystal silicon substrates, which can exactly control the porosity and thickness of the porous silicon layers. The basic characteristics of sensors obtained by experimental measurements of the different liquids with known refractive indices are in good agreement with simulation calculations. The reversibility of liquid-phase sensors is confirmed by fast complete evaporation of organic solvents using a low vacuum pump. The nano-porous silicon microcavity sensors can be used to determine different kinds of organic fuel mixtures such as bio-fuel (E5), A92 added ethanol and methanol of different concentrations up to 15%.

• 센서학회지
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• 제22권3호
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• pp.202-206
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• 2013

In this paper, a disposable glucose sensor was made of paper. Glucose sensor strip using carbon electrode is appropriate for the low price ones because it requires cheap materials and low cost production. Most of blood glucose sensors were developed with plastics, but it causes pollution problems. Therefore we developed disposable carbon electrode glucose sensor using paper. This sensor consists of upper and bottom plate. On the upper plate, three-dimensional channel are formed through pressing process. The fabricated paper glucose sensor shows relatively short sensing time of about 5seconds, excellent reproducibility ($R^2$=0.9558), and fabrication yield as well.

• Journal of Mechanical Science and Technology
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• 제19권10호
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• pp.1910-1918
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• 2005

Characterizing electrochemical polymerization of polypyrrole film on a substrate depends on many parameters. Among them, potential difference and cumulative charges play important role. The level of potential difference affects the quality of the polypyrrole. On the contrary, cumulative charge affects the thickness of the polypyrrole. The substrate surface is adjusted physically and chemically by treating with sandblasting and the addition of thiol for surface adhesion improvement. Experimental results show that the sandblasted and thiol treated substrate provides better. adhesion than non-sandblasted and non-thiol treated substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.528-528
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• 2007

Cu CMP widely has been using for the formation of multilevel metal interconnects by the Cu damascene process. And lower dielectric constant materials are required for the below 45nm technology node. As the dielectric constant of dielectric materials are smaller, the strength of dielectric materials become weaker. Therefore these materials are easily damaged by high down pressure during conventional CMP. Also, technical problems such as surface scratches, delamination, dishing and erosion are also occurred. In order to overcome these problems in CMP, the ECMP (electro-chemical mechanical planarization) has been introduced. In this process, abrasive free electrolyte, soft pad and low down force were used. The electrolyte is one of important factor to solve these problems. Also, additives are required to improve the removal rate, uniformity, surface roughness, defects, and so on. In this study, KOH and $NaNO_3$ based electrolytes were used for Cu ECMP and the electrochemical behavior was evaluated by the potentiostat. Also, the Cu surface was observed by SEM as a function of applied voltage and chemical concentration.

• 한국분말재료학회지
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• 제28권5호
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• pp.429-434
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• 2021

Magnetic nanoparticles have a significant impact on the development of basic sciences and nanomedical, electronic, optical, and biotech industries. The development of magnetic structures with size homogeneity, magnetization, and particle dispersibility due to high-quality process development can broaden their utilization for separation analysis, structural color optics using surface modification, and energy/catalysts. In addition, magnetic nanoparticles simultaneously exhibit two properties: magnetic and plasmon resonance, which can be self-assembled and can improve signal sensitivity through plasmon resonance. This paper reports typical examples of the synthesis and properties of various magnetic nanoparticles, especially magnetoplasmonic nanoparticles developed in our laboratory over the past decade, and their optical, electrochemical, energy/catalytic, and bio-applications. In addition, the future value of magnetoplasmonic nanoparticles can be reevaluated by comparing them with that reported in the literature.

• 한국식품위생안전성학회지
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• 제35권4호
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• pp.291-303
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• 2020

해양 생물 유래 독소는 그 치명적인 유독성으로 인해 비단 인류의 건강 뿐만 아니라 양식, 어업, 해양 생태계 전반에 걸쳐 경제적 손실을 비롯한 부정적인 영향을 미친다. 하지만, 종래에 사용되던 해양 독소 검출법만으로는 이를 다 파악하여 위협을 미연에 방지하기에는 아직 부족한 실정이다. 본 논문에서는 해산물의 해양 독소 잔존 여부를 판별하기 위해 종래에 사용되었던 시험법들의 한계를 개선하고자 각종 나노 재료 및 신규 기술들이 도입된 신속 검출법들에 대해 조사했으며, 대표적인 연구 결과들을 선정하여 사용한 나노 입자 및 전략에 대해 서술하였다. 특히 이러한 생물 유래 독소의 검출 기술을 대중화시키고 상용화하기 위해서는, 이를 생성하는 생물군으로부터 독소를 추출하는 전처리 과정을 간소화하는 것이 매우 중요하다. 해당 문제를 해결하고자 다양한 연구에서 표적 독소와 특이적으로 결합하는 항체를 고정화한 자성 나노 입자 기반의 전처리법을 보고했으며, 더 나아가 자성 나노 입자의 촉매 특성까지 활용해 검출 감도를 높이는 다양한 연구들도 발표되었다. 또한, 기존 효소 기반의 비색법의 검출 한계를 낮추고 검출 시스템의 안정성을 높이기 위해 양자점과 같은 형광 나노 입자를 도입하는 보고들도 있었다. 이 외에도 압타머와 나노 입자 복합체 기반의 전기화학 측정법 및 신규 기술들을 사용하고자 하는 연구들도 보고되었다. 하지만 해양 환경의 변화에 따라 생성된 신종 독소에 대한 대처는 아직 미흡한 실정이므로, 해양 독소 유도체 또한 아울러 진단 가능한 검출 기술에 대한 후속 연구가 필요하다.

• 한국기계가공학회지
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• 제12권4호
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• pp.10-15
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• 2013

In order to fabricate high sensitive and stable biosensors, we require the material with superior biocompatibility and physical-chemical stability. Many kinds of biomaterials have been evaluated to apply for bioindustry. Recently, carbon based diamond thin films have been focal pointed as bio-applications and their possibility has been evaluated. Diamond thin film has many advantages for electrochemical and biological applications, such as wide potential window (3.0-3.5V), low background current and chemical-physical stability. In this work, we have cultured neuroblastoma cell (SH-SY5Y) on the crystalline diamond films. We use MTT assay to evaluate the characteristic of cell culture on the substrates. As a result, neuroblastoma cell was cultured on the crystalline diamond film as similar as cell culture dish.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.153-153
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• 2017

The application of the coating supports the mechanical characteristics of the implant, and various materials and coatings are currently being used in the implant in a way to accelerate adhesion. Especially, plasma electrolytic oxidation (PEO) coating has been proposed continually with good surface treatment of titanium alloys. Also, the PEO process can incorporate Ca and P ions on the titanium surface through variables varied factor. PEO process for bioactive surface has carried out in electrolytes containing Ca and P ions. Natural bone is composed of mineral elements such as Mg, Si, Zn, Sr, and Mn, etc. Especially, Mg and Si of these elements play role in bone formation and growth after clinical implantation of bio-implants. In this study, corrosion charateristics of PEO-treated Ti-6Al-4V alloy in solution containing Si and Mg ions has been investigated using several experimental techniques. The PEO-treated surfaces were identified by X-ray diffraction, using a diffractometer (XRD, Philips X' pert PRO, Netherlands) with Cu $K{\alpha}$ radiation. The morphology was observed by field-emission scanning electron microscopy (FE-SEM, Hitachi 4800, Japan) and energy-dispersive X-ray spectroscopy (EDX, Oxford ISIS 310, England). The potentiodynamic polarization and AC impedance tests for electrochemical degradations were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV.