• Title/Summary/Keyword: beam spot

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NanoAnalysis with TOF-MEIS (TOF-MEIS 나노분석법)

  • Yu, Kyu-Sang;Moon, DaeWon
    • Vacuum Magazine
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    • v.2 no.2
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    • pp.17-23
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    • 2015
  • Medium Energy Ion Scattering (MEIS) has been successfully used for ultrathin film analysis such as gate oxides and multilayers due to its single atomic depth resolution in compostional and structural depth profiling. Recently, we developed a time-of-flight (TOF) MEIS for the first time, which can analyze a $10{\mu}m$ small spot. Small spot analysis would be useful for test pattern analysis in semiconductor industry and various thin film technology. The ion beam damage problem is minimized due to its improved collection efficiency by orders of magnitude and the ion beam neutralization problem is removed completely for quantitative analysis. Newly developed TOF-MEIS has been applied for gate oxides, ultra shallow junctions, nanoparticles, FINFET structures to provide compositional and structural profiles. Further development for submicron spot analysis and applications for functional nano thin films and nanostructured materials are expected for various nanotechnology and biotehnology.

Analysis of Specific Problems in Laser Scanning Optical System Design

  • Joo, Won-Don
    • Journal of the Optical Society of Korea
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    • v.15 no.1
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    • pp.22-29
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    • 2011
  • We analyze aberrations in an optical laser printer system in order to know how to determine an allowable non-uniformity of the movement of a light spot, how to determine allowed variation of spot sizes, and how to minimize the influence of these deviations on technological errors. In this paper, the correction and the tolerance of distortion are analyzed by using the concept of zonal and global distortions. The tolerance of field curvature is also obtained from Gaussian beam properties. In order to reduce the change of the entrance pupil position and to make a more compact laser printer system the minimum size of the rotator is exactly derived from the geometry with the introduction of the shift angle of the input beam.

Development of Multi-functional Laser Pointer Mouse Through Image Processing (영상처리를 통한 다기능 레이저 포인터 마우스 개발)

  • Kim, Yeong-Woo;Kim, Sung-Min;Shin, Jin;Yi, Soo-Yeong
    • Journal of Institute of Control, Robotics and Systems
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    • v.17 no.11
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    • pp.1168-1172
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    • 2011
  • Beam projector is popularly used for presentation. In order to pay attention to local area of the beam projector display, a laser pointer is used together with a pointing device(Mouse). Simple wireless presenter has limited functions of a pointing device such as "go to next slide" or "back to previous slide" in a specific application(Microsoft PowerPoint) through wireless channel; thus, there is inconvenience to do other tasks e.g., program execution, maximize/minimize window etc. provided by clicking mouse buttons. The main objective of this paper is to implement a multi-functional laser-pointer mouse that has the same functions of a computer mouse. In order to get position of laser spot in the projector display, an image processing to extract the laser spot in the camera image is required. In addition, we propose a transformation of the spot position into computer display coordinates to execute mouse functions on computer display.

Sweet Spot Search of Antenna Beam using the Modified Genetic Algorithm (변형된 유전자 알고리즘을 이용한 안테나 빔의 스위트 스폿 탐색)

  • Eom, Ki-Hwan;Jung, Kyung-Kwon
    • Journal of the Institute of Electronics Engineers of Korea CI
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    • v.42 no.6
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    • pp.47-54
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    • 2005
  • In this paper, we propose a method that search the sweet spot of antenna beam, and keep it for fast speed transmission in millimeter wave on point-to-point link. We use TDD(Time Division Duplex) as transfer method, and it transfers the control data of antenna. The proposed method is the modified genetic algorithm which selects a superior initial group through slave-processing in order to resolve the local solution of genetic algorithm. The efficiency of the proposed method is verified by means of simulations with white Gaussian noise and not on point-to-point link.

Sweet Spot Search of Array Antenna Beam (Array 안테나 빔의 스위트 스폿 탐색)

  • Eom, Ki-Hwan;Kang, Seong-Ho;Lee, Chang-Young;NamKung, Wook;Hyun, Kyo-Hwan
    • 한국정보통신설비학회:학술대회논문집
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    • 2005.08a
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    • pp.115-119
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    • 2005
  • In this paper, we propose a method that search the sweet spot of array antenna beam, and keep it for fast speed transmission in millimeter wave on single array antenna link. We use TDD(Time Division Duplex) as transfer method, and it transfers the control data of antenna. The proposed method is the modified genetic algorithm which selects a superior initial group through slave-processing in order to resolve the local solution of genetic algorithm. The efficiency of the proposed method is verified by means of simulations with white Gaussian noise and not on single array antenna link.

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Sweet Spot Search of Antenna Beam using The Two ADALINE (두개의 ADALINE을 이용한 안테나 빔의 스위트 스폿 탐색)

  • Lee, Chang-Young;Choi, Kyu-Min;Kang, Seong-Ho;Chung, Sung-Boo;Eom, Ki-Hwan
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.1
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    • pp.705-708
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    • 2005
  • In this paper, we propose a method that search the sweet spot of antenna beam, and keep it for fast speed transmission in millimeter wave on point-to-point link We use TDD(Time Division Duplex) as transfer method, and it transfers the control data of antenna. The proposed method is composed of two ADALINE which used the parallel. The efficiency of the proposed method is verified by means of simulations with white Gaussian noise and not on point-to-point link.

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Dose distribution at junctional area for head and neck radiotherapy (두경부 방사선치료시 접합 조사면의 선량분포)

  • 김정기;김기환;오영기;김진기;정동혁;신교철;양광모;조문준;박인규
    • Progress in Medical Physics
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    • v.12 no.2
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    • pp.161-169
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    • 2001
  • For the head and neck radiotherapy, the technique of half beam using independent collimator is very useful to avoid overlapping of fields particularly when the lateral neck fields are placed adjacent to anterior supraclavicular field. Also abutting photon field with electron field is frequently used for the irradiation of posterior neck when tolerable dose on spinal cord has been reached. Using 6 MV X-ray and 9 MeV electron beams of Clinac1800(Varian, USA) linear accelerator, we performed film dosimetry by the X-OMAT V film of Kodak in solid water phantom and the dose distribution at beam center of 2 half beams further examined according to depths(0 cm, 1.5 cm, 3 cm, 5 cm) for single anterior half beam and anterior/posterior half beam. The dose distribution to the junction line between photon and electron fields was also measured. For the single anterior half beam, the absorption doses at 0.3 cm, 0.5 cm and 1 cm distances from beam center were 88%, 93% and 95% of open beam, respectively. In the anterior/posterior half beams, the absorption doses at 0.3 cm, 0.5 cm and 1 cm distances from beam center were 92%, 93% and 95% of open beam, respectively At the junction line between photon and electron fields, hot spot was developed on the side of the photon field and a cold spot was developed on that of the electron field. The hot spot in the photon side was developed at depth 1.5 cm with 7 mm width. The maximum dose of hot spot was increased to 6% of reference doses in the photon field. The cold spot in the electron side was developed at all measured depths(0.5 cm-3 cm) with 1-12.5 mm widths. The decreased dose in the cold spot was 4.5-30% of reference dose in the electron field. With above results, we concluded that when using electron beam or independent jaw for head and neck radiotherapy, the hot and cold dose area should be considered as critical point.

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대향2문조사시 Target Volume의 위치에 따른 Beam Weight의 최적화

  • Lee Jin Guk;Kim Ji Han;Im Ik Su;Choe Yeong Heon
    • The Journal of Korean Society for Radiation Therapy
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    • v.5 no.1
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    • pp.68-73
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    • 1992
  • If the same weight is used in parallel opposed 6 and 10 MV x-ray beams, the lowest dose is achieved at SAD. Therefore, dose homogeneity in the target volume is decreased when SAD is taken at center of target volume than center of phantom or patient. With Standard deviation of ${\pm}6\%$ that repuesented the dose homogeneity in tarhet volume, we studied the optimized beam weights at which hot spot dose was least in parallel opposed beams. The optimized beam weights that maximally decrease the hot spot dose, wer 1.29, 1.19, 2.71, 3.50, and 4.70 in 6 MV x-ray and 1.25, 1.53, 1.90, 2.36, 3.01, and 3.7 in 10 MV x-ray, reapectively, when center of target volume was changed to 2,4,6,8,10, and 12cm from center plan of phantom along the centeral axis of beams.

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Design of a High-Transmission C-Shaped Nano-Aperture in a Perfectly Electric Conductor Film (완전도체 박막에서 고 투과율 C형 나노 개구 설계)

  • Park Sin-Jeung;Hahn Jae-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.6 s.183
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    • pp.160-165
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    • 2006
  • We have designed a high-transmission nano aperture in a perfect electric conductor film with the incident beam of 532 nm wavelength. The aperture basically has a C-shape and is known to produce a bright spot nearby the aperture in small size less than diffraction limit. The bright spot is strongly coupled with the local plasmon excited through the aperture hole. The characteristics of transmission and peak power of the aperture output were calculated using finite differential time domain (FDTD) technique, and the geometry of the aperture was determined to get a maximum transmission and peak power. To find the effect of the surface plasmon induced near by the aperture, we calculated the variations of the transmittance and the beam sizes by changing the size of the input beam irradiated on the aperture.

A Concept of Adaptive Focusing using a Rotman Lens for Detecting Buried Structures

  • Kim, Jae-Heung
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2003.11a
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    • pp.536-540
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    • 2003
  • A new concept of adaptive focusing, using a Rotman lens, is presented in this paper. A Rotman lens is a microwave lens which is able to focus microwave power on its focal arc or generate multiple beams. By adding the array of phase shifters between a Rotman lens and antenna elements, the wavefront can be adaptively modulated to focus objects distributed in short range rather than far-field zone. From the optical point of view, the propagations of the lens have been simplified from the Fresnel diffraction integral to the Fourier transform. Using Fourier Transform, a beam propagation method has been developed to show improvement of the resolution by controlling wavefront of wave propagating from an aperture-type antenna array. The beam width(or spot size) and intensity have been calculated for a focused beam propagating from an array having $10{\lambda}$ of its size. For the beam with $20{\lambda},\;30{\lambda}$, and $50{\lambda}$ of geometrical focal length, the half-power beamwidth (spot size) is about $1.1{\lambda},\;1.3{\lambda}$, and $1.9{\lambda}$, respectively.

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