• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.149-154
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• 2004

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the relationship of transporting speed according to the change of flexural beam shape and the effect of transporting speed according to the change of weight and amplification voltage are verified. The vibration behavior of flexural beam in the ultrasonic transport system is experimented using Laser Scanning Vibrometer.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.153-158
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• 2007

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.934-937
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• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.2
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• pp.100-107
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• 1999

End milling experiments are conducted to investigate characteristics of laser beam signals due to tool fracture. The laser beam signals are obtained with adapt focusing of tool. Tool states are identified wit h scanning electron microscopy and optical microscopy. It is demonstrated that the laser beam signals provide reliable informations about the cutting processes and tool states. Moreover, tool fracture can be detected successfully using coefficient of variation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1295-1298
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• 2004

Selective Laser Sintering(SLS) method is one of Rapid Prototyping(RP) technologies. It is used to fabricate desirable part to sinter powder and stack the fabricated layer. To develop this SLS machine, it needs effective scanning path and the development of scanning device. This paper shows how to make fast scanning path with respect to scan spacing, laser beam size and scanning direction from 2-dimensional sliced file generated in commercial CAD/CAM software. Also, we develop the scanning device and its control algorithm to precisely follow the generated scanning path. Scanning path affects precision and total machining time of the final fabricated part. Sintering occurs using infrared laser which has high thermal energy. As a result, shrinkage and curling of the fabricated part occurs according to thermal distribution. Therefore, fast scanning path generation is needed to eliminate the factors of quality deterioration. It highly affects machining efficiency and prevents shrinkage and curling by relatively lessening the thermal distribution of the surface of sintering layer. To generate this fast scanning path, adaptive path generation is needed with respect to the shape of each layer, and not simply x, y scanning, but the scanning of arbitrary direction must be enabled. This paper addresses path generation method to focus on fast scanning, and development of scanning system and control algorithm to precisely follow generated path.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.21-22
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• 2012

• 대한방사선방어학회:학술대회논문집
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• 2011.11a
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• pp.196-197
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• 2011

• Korean Journal of Optics and Photonics
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• v.11 no.2
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• pp.73-79
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• 2000

We measure a beam diameter of scan and sub-scan direction of LSD (Laser Scanning Urnt) which uses $fheta$ lens produced by injecLion molding method as a scanning lens. While the measured beam diameter in scan direction, which is $62muextrm{m}$ to $68\mu\textrm{m}$, shows similar size comparing to the design beam diameter, the sub-scan beam diameter shows sIzable beam diameter deviation as much as 37 11m ranging from $78\mu\textrm{m}$ to $115\mu\textrm{m}$. Injection molding lens has the surface figure error due to the shrinkage III the cooling time and the internal distortion (birefringence) due to the uneven cooling conditIOn so that these bring about wavefront aberration (i.e., the enlargement of beam size), and are eventually expre~sed as the deterioration of the pdnting image. In this paper. we first measure and analyze beam diameter, birefringence (polanzation ratio), and asphedcal figure error of mIens in order to know the principle cause of the beam diameter deviation in sub-scan directIOn. And Lhen. through the analysis of a designed depth of focus and a calculated field curvature (imaging position of the optical axis directIon) using the above figure elTor data, we know Lhat the birefringence IS the main factor of sizable beam diameter deVIation in sub-scan direction. ction.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.6
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• pp.481-486
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• 2007

In large area scanning with a micro-electron-column, the operating condition for the best resolution was investigated in factors of working distance and field of view. The resolution of a test sample was dependent on electron beam energy and scanning field size. The best resolution with single deflector was obtained at 300 V and 30 mm in the electron emitting tip voltage and a working distance, respectively. The scanning area at that condition was $13.9{\times}13.9mm^2$, linearly increased with the working distance. Double deflector was employed for larger scanning size without increasing working distance, but showed only 1.7 times larger than that of single deflector, and the resolution was inverse proportional to the scanning size.

• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.196-198
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• 2006

In this paper, a stereoscopic display system using a rotary disk tyre beam shutter and two beam projectors is proposed. It is a kind of active stereoscopic display and can be easily converted from passive stereoscopic system using polarizing filters. If it is possible to synchronize the revolution speed of the beam shutter with the integer multiple of the scanning frequency of the beam projectors, we can obtain a comparable performance with our system to an active stereoscopic system using one expensive high performance beam projector. Further, if we rotate the beam shutter at sufficiently high revolution speed, our active stereoscopic system works regardless of synchronization and thus the system is much easier to implement.