• Laser Solutions
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• v.1 no.1
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• pp.24-29
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• 1998

A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.171-179
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• 2004

Micro-stereolithography technology has made it possible to fabricate a freeform 3D microslructure. This technology is based on conventional stereolithography, in which a UV laser beam irradiates the open surface of a UV-curable liquid photopolymer, causing it to solidify. In micro-stereolithography, a laser beam of a few $\mu m$ diameter is used to solidify a very small area of the photopolymer. This is one of the key technological elements, and can be achieved by using a focusing lens. Thus, the solidification phenomena of the liquid photopolymer must be carefully investigated. In this study, the photopolymer solidification phenomena in response to variations in the scanning pitch of a focused laser beam was investigated experimentally. The effect of layer thickness on the solidification width and depth was also examined. These studies were conducted under the conditions of relatively lower laser power and relatively higher scanning speed. Moreover, the photopolymer solidification phenomena for the relatively higher laser power and lower scanning speed was investigated, too. In this case, comparing to the case of lower laser power and higher scanning speed, the photopolymer absorbed large amount of irradiation energy of the laser beam. These results were compared with those obtained from a photopolymer solidification model. From these results, a new laser-scanning scheme was proposed according to the shape of the 3D model. Samples by each method were fabricated successfully.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.2
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• pp.24-29
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• 2006

The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.3
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• pp.194-201
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• 2014

This paper is able to be solved by improving degradation in multi-path environment by adjust beam pattern angle through modifying pulse phase of each antennas by using TRM (Transmitter Receiver Module). Beam Scanning Array Antenna, which is transmitter/receiver that improves degradation in multi-path environment without any signal distortion, is designed and manufactured. Beam Scanning Array Antenna should be able to send/receive signal at the antenna's longitudinal part without distortion and should not influences other systems. Also, it should include target detecting ability by beam steering.Dispersion characteristic of Beam Scanning Antenna, which is designed, is analysed by using fidelity, and steering and radar resolution performance is verified by using $1cm{\times}1cm$ sized target. To manufacture Beam Scanning Array Antenna, control board and GUI, which is able to control Vivaldi Antenna for IR-UWB, Tri-Band Wilkinson power divider, and TRM (Transmitter Receiver Module), is designed. Throughout this research, developed Beam Scanning UWB Array Antenna system is adoptable for radar application field. and time domain analysis techniques by using network analyser made the antenna characteristics analysis for setting up antenna more accurate. In addition, it makes beam width checking without difficulties.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1017-1020
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• 2004

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with several electo-magnetic lens is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included several electro-magnetic lens and main body which are essentially constructed for column unit are designed and manufactured. And this established column unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.90-95
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• 2001

f-$\theta$len is one of the important parts in Laser Scanning Unit because it affects on the optical performance of Laser Scanning Unit dominantly. It is necessary to find out the relationship between the surface profile error of f-$\theta$lens and the beam profile focusing on the Organic Photo Conductive drum in order to analysis the beam profile problems such as appearance of side lobe and expansion of center lobe. In this research, a simulation process which relates the surface profile characteristics to the beam profile has been developed by CODE V. The simulated beam profile also have been compared with the measurement results.

• Applied Microscopy
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• v.51
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• pp.1.1-1.2
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• 2021

We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO₃ grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO₃/crystalline SrTiO₃.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.99.3-99
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• 2001

In fluorescence mode confocal scanning microscope, level of detected signal is very low. In object scanning type confocal scanning microscope, the additional optical system with objective lens and plane mirror was proposed to increase signal intensity, but there was none for beam scanning type confocal scanning microscope. We propose reflecting optical systems which improve signal intensity in beam scanning type confocal scanning microscope. We choose one of the proposed optical systems and design the optical system, i.e., select optical components and assign distances between the selected components. To design the optical system, we use finite ray tracing method and make cost function to be minimized.

• Nuclear Engineering and Technology
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• v.52 no.9
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• pp.2064-2071
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• 2020

For proton pencil beam scanning (PBS) technology, the accuracy of the dose distribution in a patient is sensitive to the properties of the incident beam. However, mechanical deformation of the proton therapy facility may occur, and this could be an important factor affecting the proton dose distribution in patients. In this paper, we investigated the effect of deformation on an SC200 proton facility's beam isocenter properties. First, mechanical deformation of the PBS nozzle, L-shape plate, and gantry were simulated using a Finite Element code, ANSYS. Then, the impact of the mechanical deformation on the beam's isocenter properties was evaluated using empirical formulas. In addition, we considered the simplest case that could affect the properties of the incident beam (i.e. if only the bending magnet (BG3) has an error in its mounting alignment), and the effect of the beam optics offset on the isocenter characteristics was evaluated. The results showed that the deformation of the beam position in the X and Y direction was less than 0.27 mm, which meets the structural design requirements. Compared to the mechanical deformation of the L-shape plate, the deformation of the gantry had more influence on the beam's isocenter properties. When the error in the mounting alignment of the BG3 is equal to or more than 0.3 mm, the beam deformation at the isocenter exceeds the maximum accepted deformation limits. Generally speaking, for the current design of the SC200 scanning beam delivery system, the effects of mechanical deformation meet the maximum accepted beam deformation limits. In order to further study the effect of the incident beam optics on the isocenter properties, a fine-scale Monte Carlo model including factors relating to the PBS nozzle and the BG3 should be developed in future research.