• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2003.11a
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• pp.541-545
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• 2003

본 논문에서는 하나의 급전소자와 두개의 무급전 소자로 구성된 전 후방 지향성을 가진 비행체 탑재 능동 빔 조향 프린트형 야기-우다 안테나를 설계, 제작하였다. 제작된 안테나는 두개의 무급전 소자에 부착된 칩다이오드의 간단한 스위칭 작용(Open, Short)으로 지향성 다이버시티를 구현하였다. 그리고 모노폴 급전 소자와 두개의 무급전 소자와의 거리를 변화시켜 상호 임피던스의 영향이 고려된 최대 전.후방비를 찾았다. 중심주파수 1.81 GHz에서 모노폴 급전소자와 무급전소자간의 간격이 $0.25{\lambda}$일 때, 26.6 dB의 최대 전.후방비(Open-Short 또는 Short-Open)특성이 나타내었다. 이를 통해 후방에 있는 지상 통제소와 미사일의 비행 방향에 관계없이 교신 가능한 수신 레벨을 유지 할 수 있음을 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.82-85
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• 1996

It is considered that the effect of radiation aging, such as electron beam due to the ultra-high voltage for transmission, on the physical properties and electrical characteristics of electrital insulating materials. Low-density polyethylene(thickness 100[${\mu}{\textrm}{m}$]) is selected as an experimental specimen. Fourier transform infra-red spectrum, X-ray diffraction, differential scanning calorimetry and scanning electron microscopy is used so as to analysis the physical properties, the morphological changes and the crystallinity of LDPE. And it is made an experiments of dielectric characteristics in the temperature range of 20[$^{\circ}C$]~120[$^{\circ}C$], in the frequency range of 30[Hz]~1.5$\times$10$^{5}$ [Hz] and in the applied voltage range of 300[mV]~1500[mV].

• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.31-35
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• 2003

We present a formation technique of thin film heater for heat transfer components. Thin film structures of Cr-Si have been prepared on top of alumina substrates by magnetron sputtering. More samples of Mo thin films were prepared on silicon oxide and silicon nitride substrates by electron beam evaporation technology. The electrical properties of the thin film structures were measured up to the temperature of $500^{\circ}C$. The thickness of the thin films was ranged to about 1 um, and a post annealing up to $900^{\circ}C$ was carried out to achieve more reliable film structures. In measurements of temperature coefficient of resistance (TCR), chrome-rich films show the metallic properties; whereas silicon-rich films do the semiconductor properties. Optimal composition between Cr and Si was obtained as 1 : 2, and there is 20% change or less of surface resistance from room temperature to $500^{\circ}C$. Scanning electron microscopy (SEM) and Auger electron spectroscopy (AES) were used for the material analysis of the thin films.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.2
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• pp.171-175
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• 2014

In this study, we suggest a method to measure the thickness of thin films nondestructively using the dispersion characteristics of a surface acoustic wave propagating along the thin film surface. To measure the thickness of thin films, we deposited thin films with different thicknesses on a Si (100) wafer substrate by controlling the deposit time using the E-beam evaporation method. The thickness of the thin films was measured using a scanning electron microscope. Subsequently, the surface wave velocity of the thin films with different thicknesses was measured using the V(z) curve method of scanning acoustic microscopy. The correlation between the measured thickness and surface acoustic wave velocity was verified. The wave velocity of the film decreased as the film thickness increased. Therefore, thin film thickness can be determined by measuring the dispersion characteristics of the surface acoustic wave velocity.

• JSTS:Journal of Semiconductor Technology and Science
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• v.12 no.1
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• pp.34-40
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• 2012

We have developed a highly sensitive inspection technique based on an electron beam inspection for detecting the contact failure of a poly-Si plugged layer. It was difficult to distinguish the contact failure from normal landing plugs with high impedance. Normally, the thermal annealing method has been used to decrease the impedance of poly-Si plugs and this method increases the difference of charged characteristics and voltage contrast. However, the additional process made the loss of time and broke down the device characteristics. Here, the interval scanning method without thermal annealing was effectively applied to enhance the difference of surface voltage between well-contacted poly-Si plugs and incomplete contact plugs. It is extremely useful to detect the contact failures of non-annealed plug contacts with high impedance.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.400-406
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• 2015

This study researched the structure of the source of an ion milling machine used to fabricate a scanning electron microscope (SEM) sample. An ion source is used to mill out samples of over 1 mm dimension using a broad ion beam to generate plasma between the anode and cathode using a permanent magnet. To mill the sample in the vacuum chamber, the ion source should be greater than 6 kV for a positive ion current over $200{\mu}A$. To discover the optimum operating conditions for the ion miller, the diameter of the extractor, anode shape, and strength of the permanent magnet were varied in the experiments. A silicon wafer was used as the sample. The sputter yield was measured on the milled surface, which was analyzed using the SEM. The wafer was milled by injecting 1 sccm of argon gas into the 0.5 mTorr vacuum chamber.

• Proceedings of the Korean Society of Medical Physics Conference
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• 2002.09a
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• pp.180-182
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• 2002

A Proton Therapy Center was established this year in National Cancer Center, Korea. We chose IBA of Belgium as the vendor of the equipment package. A 230 MeV fixed-energy cyclotron will deliver proton beams into two gantry rooms, one horizontal beam room, and one experimental station. The building for the equipment is currently under design with a special emphasis on radiation shielding. Installation of equipments is expected to begin in September next year starting with the first gantry, and the acceptance test will be performed about a year later. To generate therapeutic radiation fields the wobbling method will be a main treatment mode for the first gantry. A pencil beam scanning system on the other hand will be equipped for the second gantry relying on the availability at the time of installation. The beam scanning with intensity modulation adapted will be a most advanced form in radiation therapy known as IMPT. Some details on the project progress, scope of the system, and design of building are described.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.3
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• pp.283-288
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• 2013

This paper describes development of a high speed Doppler OFDI system for non-invasive vascular imaging. Doppler OFDI (optical frequency domain imaging) is one of the phase-resolved second generation OCT (optical coherence tomography) techniques for high resolution imaging of moving elements in biological tissues. To achieve a phase-resolved imaging, two temporally separated measurements are required. In a conventional Doppler OCT, a pair of massively oversampled successive A-lines is used to minimize de-correlation noise at the expense of significant imaging speed reduction. To minimize a de-correlation noise between targeted two measurements without suffering from significant imaging speed reduction, several methods have been developed such as an optimized scanning pattern and polarization multiplexed dual beam scanning. This research represent novel imaging technique using frequency multiplexed dual beam illumination to measure exactly same position with aimed time interval. Developed system has been verified using a tissue phantom and mouse vessel imaging.

• Journal of the Optical Society of Korea
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• v.14 no.4
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• pp.431-437
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• 2010

A stack of gradient-index (GRIN) rod lenses cannot be used for coherent anti-Stokes Raman scattering (CARS) microendoscopy for insertion to internal organs through a surgical keyhole with minimal invasiveness. That's because GRIN lens has large amount of inherent chromatic aberrations in spite of absolutely requiring a common focus for pump and Stokes beam with each frequency of ${\omega}_p$ and ${\omega}_S$. For this endoscopic purpose, we need to develop a long slender probe-type objective, namely probe-type microscope objective (PMO). In this paper, we introduce the structure, the working principle, and the design techniques of PMO which is composed of a probe-type lens module (PLM) and an adaptor lens module (ALM). PLM is first designed for a long slender type and ALM is successively designed by using several design parameters from PLM for eliminating optical discords between scanning unit and PLM. A combined module is optimized again to eliminate some coupling disparities between PLM and ALM for the best PMO. As a result, we can obtain a long slender PMO with perfectly diffraction-limited performance for pump beam of 817 nm and Stokes beam of 1064 nm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.331-332
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• 2006

Transport systems which are the important part of the factory automation have much influence on improving productivity. Object transport systems are driven typically by the magnetic field and conveyer belt. In recent years, as the transmission and processing of information is required more quickly, demands of optical elements and semiconductors increase. However, conventional transport systems are not adequate for transportation of those. The reason is that conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. Vibration modes of each flexural beam are verified by using Laser Scanning Vibrometer.